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Christophe Marcadal
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Apparatus and process for plasma-enhanced atomic layer deposition
Patent number
9,032,906
Issue date
May 19, 2015
Applied Materials, Inc.
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ampoule with a thermally conductive coating
Patent number
8,951,478
Issue date
Feb 10, 2015
Applied Materials, Inc.
Schubert S. Chu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas coupler for substrate processing chamber
Patent number
8,216,374
Issue date
Jul 10, 2012
Applied Materials, Inc.
Joel Huston
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Method and apparatus for generating a precursor for a semiconductor...
Patent number
8,062,422
Issue date
Nov 22, 2011
Applied Materials, Inc.
Ling Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and process for plasma-enhanced atomic layer deposition
Patent number
7,850,779
Issue date
Dec 14, 2010
Applied Materisals, Inc.
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition and densification process for titanium nitride barrier l...
Patent number
7,838,441
Issue date
Nov 23, 2010
Applied Materials, Inc.
Amit Khandelwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical delivery apparatus for CVD or ALD
Patent number
7,832,432
Issue date
Nov 16, 2010
Applied Materials, Inc.
Norman Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of recovering valuable material from exhaust gas stream of a...
Patent number
7,833,358
Issue date
Nov 16, 2010
Applied Materials, Inc.
Schubert S. Chu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical delivery apparatus for CVD or ALD
Patent number
7,748,400
Issue date
Jul 6, 2010
Applied Materials, Inc.
Norman Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition of tantalum-containing materials using the...
Patent number
7,691,742
Issue date
Apr 6, 2010
Applied Materials, Inc.
Christophe Marcadal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and process for plasma-enhanced atomic layer deposition
Patent number
7,682,946
Issue date
Mar 23, 2010
Applied Materials, Inc.
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical precursor ampoule for vapor deposition processes
Patent number
7,597,758
Issue date
Oct 6, 2009
Applied Materials, Inc.
Ling Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for generating a chemical precursor
Patent number
7,588,736
Issue date
Sep 15, 2009
Applied Materials, Inc.
Ling Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-step barrier deposition method
Patent number
7,576,002
Issue date
Aug 18, 2009
Applied Materials, Inc.
Ling Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical delivery apparatus for CVD or ALD
Patent number
7,568,495
Issue date
Aug 4, 2009
Applied Materials, Inc.
Norman Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical delivery apparatus for CVD or ALD
Patent number
7,562,672
Issue date
Jul 21, 2009
Applied Materials, Inc.
Norman Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition of tantalum-containing materials using the...
Patent number
7,524,762
Issue date
Apr 28, 2009
Applied Materials, Inc.
Christophe Marcadal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for generating a precursor for a semiconductor...
Patent number
7,524,374
Issue date
Apr 28, 2009
Applied Materials, Inc.
Ling Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition and densification process for titanium nitride barrier l...
Patent number
7,521,379
Issue date
Apr 21, 2009
Applied Materials, Inc.
Amit Khandelwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus of generating PDMAT precursor
Patent number
7,270,709
Issue date
Sep 18, 2007
Applied Materials, Inc.
Ling Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reduction of copper dewetting by transition metal deposition
Patent number
7,265,048
Issue date
Sep 4, 2007
Applied Materials, Inc.
Hua Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integration of ALD/CVD barriers with porous low k materials
Patent number
7,244,683
Issue date
Jul 17, 2007
Applied Materials, Inc.
Hua Chung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition of tantalum-containing materials using the...
Patent number
7,241,686
Issue date
Jul 10, 2007
Applied Materials, Inc.
Christophe Marcadal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reliability barrier integration for Cu application
Patent number
7,026,238
Issue date
Apr 11, 2006
Applied Materials, Inc.
Ming Xi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
CVD TiSiN barrier for copper integration
Patent number
6,958,296
Issue date
Oct 25, 2005
Applied Materials, Inc.
Ling Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tantalum barrier layer for copper metallization
Patent number
6,953,742
Issue date
Oct 11, 2005
Applied Materials, Inc.
Ling Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus of generating PDMAT precursor
Patent number
6,905,541
Issue date
Jun 14, 2005
Applied Materials, Inc.
Ling Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for removing an underlying layer and depositing a barrier l...
Patent number
6,660,622
Issue date
Dec 9, 2003
Applied Materials, Inc.
Ling Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Copper interconnect barrier layer structure and formation method
Patent number
6,607,976
Issue date
Aug 19, 2003
Applied Materials, Inc.
Ling Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for improved vaporization of deposition mater...
Patent number
6,596,085
Issue date
Jul 22, 2003
Applied Materials, Inc.
John Vincent Schmitt
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
Publication number
20230402268
Publication date
Dec 14, 2023
Applied Materials, Inc.
Songjae LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method For Increasing The Verticality Of Pillars
Publication number
20190355621
Publication date
Nov 21, 2019
Micromaterials LLC.
Christophe Marcadal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE
Publication number
20120270384
Publication date
Oct 25, 2012
Applied Materials, Inc.
ERROL ANTONIO C. SANCHEZ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL DELIVERY APPARATUS FOR CVD OR ALD
Publication number
20100006167
Publication date
Jan 14, 2010
Norman Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL DELIVERY APPARATUS FOR CVD OR ALD
Publication number
20090314370
Publication date
Dec 24, 2009
Norman Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION AND DENSIFICATION PROCESS FOR TITANIUM NITRIDE BARRIER L...
Publication number
20090280640
Publication date
Nov 12, 2009
Applied Materials Incorporated
AMIT KHANDELWAL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER DEPOSITION OF TANTALUM-CONTAINING MATERIALS USING THE...
Publication number
20090202710
Publication date
Aug 13, 2009
Christophe Marcadal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR GENERATING A PRECURSOR FOR A SEMICONDUCTOR...
Publication number
20090151633
Publication date
Jun 18, 2009
LING CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND PROCESS FOR PLASMA-ENHANCED ATOMIC LAYER DEPOSITION
Publication number
20080268171
Publication date
Oct 30, 2008
PAUL MA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES
Publication number
20080216743
Publication date
Sep 11, 2008
LING CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AMPOULE WITH A THERMALLY CONDUCTIVE COATING
Publication number
20080149031
Publication date
Jun 26, 2008
APPLIED MATERIALS, INC.
SCHUBERT S. CHU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION AND DENSIFICATION PROCESS FOR TITANIUM NITRIDE BARRIER L...
Publication number
20080085611
Publication date
Apr 10, 2008
AMIT KHANDELWAL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL DELIVERY APPARATUS FOR CVD OR ALD
Publication number
20080041311
Publication date
Feb 21, 2008
Norman Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION OF TANTALUM-CONTAINING MATERIALS USING THE...
Publication number
20080032041
Publication date
Feb 7, 2008
Christophe Marcadal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of recovering valuable material from exhaust gas stream of a...
Publication number
20070235059
Publication date
Oct 11, 2007
APPLIED MATERIALS, INC.
Schubert S. Chu
B08 - CLEANING
Information
Patent Application
Chemical delivery apparatus for CVD or ALD
Publication number
20070235085
Publication date
Oct 11, 2007
Norman Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RELIABILITY BARRIER INTEGRATION FOR CU APPLICATION
Publication number
20070151861
Publication date
Jul 5, 2007
Ming Xi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
GAS COUPLER FOR SUBSTRATE PROCESSING CHAMBER
Publication number
20070144436
Publication date
Jun 28, 2007
APPLIED MATERIALS, INC.
Joel Huston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND PROCESS FOR PLASMA-ENHANCED ATOMIC LAYER DEPOSITION
Publication number
20070128863
Publication date
Jun 7, 2007
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND PROCESS FOR PLASMA-ENHANCED ATOMIC LAYER DEPOSITION
Publication number
20070128864
Publication date
Jun 7, 2007
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND PROCESS FOR PLASMA-ENHANCED ATOMIC LAYER DEPOSITION
Publication number
20070128862
Publication date
Jun 7, 2007
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND PROCESS FOR PLASMA-ENHANCED ATOMIC LAYER DEPOSITION
Publication number
20070119371
Publication date
May 31, 2007
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND PROCESS FOR PLASMA-ENHANCED ATOMIC LAYER DEPOSITION
Publication number
20070119370
Publication date
May 31, 2007
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION PROCESSES FOR RUTHENIUM MATERIALS
Publication number
20070077750
Publication date
Apr 5, 2007
Paul Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for generating a precursor for a semiconductor...
Publication number
20070067609
Publication date
Mar 22, 2007
Ling Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION PROCESSES FOR RUTHENIUM MATERIALS
Publication number
20070054487
Publication date
Mar 8, 2007
APPLIED MATERIALS, INC.
PAUL MA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR GENERATING A CHEMICAL PRECURSOR
Publication number
20060257295
Publication date
Nov 16, 2006
Ling Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Reduction of copper dewetting by transition metal deposition
Publication number
20060199372
Publication date
Sep 7, 2006
APPLIED MATERIALS, INC.
Hua Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Atomic layer deposition of tantalum-containing materials using the...
Publication number
20060019495
Publication date
Jan 26, 2006
APPLIED MATERIALS, INC.
Christophe Marcadal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multi-step barrier deposition method
Publication number
20050255690
Publication date
Nov 17, 2005
Ling Chen
H01 - BASIC ELECTRIC ELEMENTS