This application is a continuation of Ser. No. 09/704,161, filed Nov. 1, 2000, now U.S. Pat. No. 6,498,091.
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Number | Date | Country |
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XP-002223600 | May 2000 | JP |
2000-323571 | Nov 2000 | JP |
Entry |
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Yamagihshi et al., “TEM/SEM Investigation and Electrical Evaluation of a Bottomless 1-PVS Ta(N) Barrier in a Dual Mask”, Advanced Metallization Conference 2000, Proceedings of the Conference 2000, Advanced Metallization Conference 2000, Proceedings of the Conference, San Diego, CA, USA, Oct. 2-5, 2000, 279-285 pp . |
Number | Date | Country | |
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Parent | 09/704161 | Nov 2000 | US |
Child | 10/290746 | US |