Christopher F. Bevis

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 12,165,863
- Issue date Dec 10, 2024
- NOVA MEASURING INSTRUMENTS INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass spectrometer detector and system and method using the same
- Patent number 11,823,883
- Issue date Nov 21, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Christopher F. Bevis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 11,764,050
- Issue date Sep 19, 2023
- NOVA MEASURING INSTRUMENTS INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hyper-spectral imaging of airborne biological particles
- Patent number 11,474,016
- Issue date Oct 18, 2022
- Scanit Technologies, Inc.
- Joel Kent
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 11,430,647
- Issue date Aug 30, 2022
- NOVA MEASURING INSTRUMENTS, INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass spectrometer detector and system and method using the same
- Patent number 11,183,377
- Issue date Nov 23, 2021
- NOVA MEASURING INSTRUMENTS, INC.
- Christopher F. Bevis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,910,208
- Issue date Feb 2, 2021
- NOVA MEASURING INSTRUMENTS, INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,636,644
- Issue date Apr 28, 2020
- Nova Measuring Instruments Inc.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,403,489
- Issue date Sep 3, 2019
- Nova Measuring Instruments Inc.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,056,242
- Issue date Aug 21, 2018
- Nova Measuring Instruments Inc.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for aberration correction in electron beam ba...
- Patent number 9,607,802
- Issue date Mar 28, 2017
- KLA-Tencor Corporation
- Christopher F. Bevis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for aberration correction in electron beam ba...
- Patent number 8,933,425
- Issue date Jan 13, 2015
- KLA-Tencor Corporation
- Christopher F. Bevis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for monitoring a parameter of a measurement dev...
- Patent number 8,831,767
- Issue date Sep 9, 2014
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and methods for electron beam detection
- Patent number 8,692,204
- Issue date Apr 8, 2014
- KLA-Tencor Corporation
- Shinichi Kojima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods and systems for determining a characteristic of a wafer
- Patent number 8,422,010
- Issue date Apr 16, 2013
- KLA-Tencor Technologies Corp.
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a characteristic of a wafer
- Patent number 8,284,394
- Issue date Oct 9, 2012
- KLA-Tencor Technologies Corp.
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for monitoring a parameter of a measurement dev...
- Patent number 8,010,222
- Issue date Aug 30, 2011
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Grant
Scatterometry target employing non-periodic defect features to enha...
- Patent number 7,940,386
- Issue date May 10, 2011
- KLA-Tencor Corporation
- Christopher F. Bevis
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,933,016
- Issue date Apr 26, 2011
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods, carrier media, and systems for creati...
- Patent number 7,873,504
- Issue date Jan 18, 2011
- KLA-Tencor Technologies Corp.
- Christopher F. Bevis
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical measurment systems and methods
- Patent number 7,847,937
- Issue date Dec 7, 2010
- KLA-Tencor Technologies Corporation
- Christopher F. Bevis
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry target and method
- Patent number 7,808,638
- Issue date Oct 5, 2010
- KLA-Tencor Corporation
- Christopher F. Bevis
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for near-field heterodyne spectroscopy
- Patent number 7,760,364
- Issue date Jul 20, 2010
- KLA-Tencor Corporation
- Guorong V. Zhuang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching and damping measuremen...
- Patent number 7,663,746
- Issue date Feb 16, 2010
- KLA-Tencor Techologies Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,663,753
- Issue date Feb 16, 2010
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Grant
Electrical test method and apparatus
- Patent number 7,659,126
- Issue date Feb 9, 2010
- KLA-Tencor Technologies Corporation
- Ian Robert Smith
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for optically monitoring the fidelity of patt...
- Patent number 7,557,921
- Issue date Jul 7, 2009
- KLA-Tencor Technologies Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for conducting adaptive fourier filtering to dete...
- Patent number 7,505,619
- Issue date Mar 17, 2009
- KLA-Tencor Technologies Corporation
- Evan R. Mapoles
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching, and damping measureme...
- Patent number 7,436,506
- Issue date Oct 14, 2008
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for detecting overlay errors using scatterometry
- Patent number 7,433,040
- Issue date Oct 7, 2008
- KLA-Tencor Technologies Corp.
- Walter D. Mieher
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20240087869
- Publication date Mar 14, 2024
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20230091625
- Publication date Mar 23, 2023
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME
- Publication number 20220223395
- Publication date Jul 14, 2022
- NOVA MEASURING INSTRUMENTS, INC.
- Christopher F. BEVIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20210305037
- Publication date Sep 30, 2021
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20200258733
- Publication date Aug 13, 2020
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME
- Publication number 20200066502
- Publication date Feb 27, 2020
- Nova Measuring Instruments, Inc.
- Christopher F. BEVIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20190385831
- Publication date Dec 19, 2019
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20180330935
- Publication date Nov 15, 2018
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20180025897
- Publication date Jan 25, 2018
- ReVera, Incorporated
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR ABERRATION CORRECTION IN ELECTRON BEAM BA...
- Publication number 20160172151
- Publication date Jun 16, 2016
- KLA-Tencor Corporation
- Christopher F. BEVIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Determining a Characteristic of a Wafer
- Publication number 20130035877
- Publication date Feb 7, 2013
- KLA-Tencor Technologies Corporation
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Determining One or More Characteristics of...
- Publication number 20120281275
- Publication date Nov 8, 2012
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR ELECTRON BEAM DETECTION
- Publication number 20120273686
- Publication date Nov 1, 2012
- Shinichi KOJIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHODS FOR PATTERN GENERATION
- Publication number 20120085919
- Publication date Apr 12, 2012
- Shinichi KOJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEV...
- Publication number 20110313558
- Publication date Dec 22, 2011
- KLA-Tencor Technologies Corporation
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus and Method for Measuring Position and/or Motion Using Sur...
- Publication number 20110172952
- Publication date Jul 14, 2011
- Upendra UMMETHALA
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR CONTROLLING VARIATION IN DIMENSIONS OF PATT...
- Publication number 20100279213
- Publication date Nov 4, 2010
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING ONE OR MORE CHARACTERISTICS OF...
- Publication number 20100235114
- Publication date Sep 16, 2010
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20100091284
- Publication date Apr 15, 2010
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching and damping measuremen...
- Publication number 20090040514
- Publication date Feb 12, 2009
- KLA-Tencor Technologies Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
SCATTEROMETRY TARGET AND METHOD
- Publication number 20090015821
- Publication date Jan 15, 2009
- KLA-Tencor Corporation
- Christopher F. Bevis
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEV...
- Publication number 20080207089
- Publication date Aug 28, 2008
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20080094630
- Publication date Apr 24, 2008
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
- Publication number 20080024766
- Publication date Jan 31, 2008
- KLA-Tencor Technologies Corporation
- Walter D. Mieher
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A CHARACTERISTIC OF A WAFER
- Publication number 20080013083
- Publication date Jan 17, 2008
- Michael D. Kirk
- G01 - MEASURING TESTING
Information Patent Application
System and method for conducting adaptive fourier filtering to dete...
- Publication number 20070081154
- Publication date Apr 12, 2007
- KLA-Tencor Technologies Corporation
- Evan R. Mapoles
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching, and damping measureme...
- Publication number 20060232770
- Publication date Oct 19, 2006
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for detecting a presence of blobs on a specimen...
- Publication number 20060148383
- Publication date Jul 6, 2006
- KLA-Tencor Technologies.
- Kurt Lehman
- B24 - GRINDING POLISHING
Information Patent Application
Methods and systems for controlling variation in dimensions of patt...
- Publication number 20060141376
- Publication date Jun 29, 2006
- Ady Levy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and systems for monitoring a parameter of a measurement dev...
- Publication number 20060131273
- Publication date Jun 22, 2006
- KLA-Tencor Technologies Corp.
- Kurt Lehman
- B24 - GRINDING POLISHING

Christopher F. Bevis

Person

Patents Grantslast 30 patents

Systems and approaches for semiconductor metrology and surface anal...

Mass spectrometer detector and system and method using the same

Systems and approaches for semiconductor metrology and surface anal...

Hyper-spectral imaging of airborne biological particles

Systems and approaches for semiconductor metrology and surface anal...

Mass spectrometer detector and system and method using the same

Systems and approaches for semiconductor metrology and surface anal...

Systems and approaches for semiconductor metrology and surface anal...

Systems and approaches for semiconductor metrology and surface anal...

Systems and approaches for semiconductor metrology and surface anal...

Apparatus and methods for aberration correction in electron beam ba...

Apparatus and methods for aberration correction in electron beam ba...

Methods and systems for monitoring a parameter of a measurement dev...

Apparatus and methods for electron beam detection

Methods and systems for determining a characteristic of a wafer

Methods and systems for determining a characteristic of a wafer

Methods and systems for monitoring a parameter of a measurement dev...

Scatterometry target employing non-periodic defect features to enha...

Apparatus and methods for detecting overlay errors using scatterometry

Computer-implemented methods, carrier media, and systems for creati...

Optical measurment systems and methods

Scatterometry target and method

Systems and methods for near-field heterodyne spectroscopy

Method and apparatus for scanning, stitching and damping measuremen...

Apparatus and methods for detecting overlay errors using scatterometry

Electrical test method and apparatus

Apparatus and methods for optically monitoring the fidelity of patt...

System and method for conducting adaptive fourier filtering to dete...

Method and apparatus for scanning, stitching, and damping measureme...

Apparatus and methods for detecting overlay errors using scatterometry

Patents Applicationslast 30 patents

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

APPARATUS AND METHODS FOR ABERRATION CORRECTION IN ELECTRON BEAM BA...

Methods and Systems for Determining a Characteristic of a Wafer

Systems and Methods for Determining One or More Characteristics of...

APPARATUS AND METHODS FOR ELECTRON BEAM DETECTION

APPARATUS AND METHODS FOR PATTERN GENERATION

METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEV...

Apparatus and Method for Measuring Position and/or Motion Using Sur...

METHODS AND SYSTEMS FOR CONTROLLING VARIATION IN DIMENSIONS OF PATT...

SYSTEMS AND METHODS FOR DETERMINING ONE OR MORE CHARACTERISTICS OF...

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

Method and apparatus for scanning, stitching and damping measuremen...

SCATTEROMETRY TARGET AND METHOD

METHODS AND SYSTEMS FOR MONITORING A PARAMETER OF A MEASUREMENT DEV...

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

METHODS AND SYSTEMS FOR DETERMINING A CHARACTERISTIC OF A WAFER

System and method for conducting adaptive fourier filtering to dete...

Method and apparatus for scanning, stitching, and damping measureme...

Methods and systems for detecting a presence of blobs on a specimen...

Methods and systems for controlling variation in dimensions of patt...

Methods and systems for monitoring a parameter of a measurement dev...