CLIFFORD C. STOW

Person

Boulder Creek, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process chamber component with layered coating and method
- Patent number 8,021,743
- Issue date Sep 20, 2011
- Applied Materials, Inc.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning and refurbishing chamber components having metal coatings
- Patent number 7,910,218
- Issue date Mar 22, 2011
- Applied Materials, Inc.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber component with layered coating and method
- Patent number 7,579,067
- Issue date Aug 25, 2009
- Applied Materials, Inc.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus including plasma-resistant, weld...
- Patent number 7,055,732
- Issue date Jun 6, 2006
- Applied Materials, Inc.
- Senh Thach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Halogen-resistant, anodized aluminum for use in semiconductor proce...
- Patent number 7,048,814
- Issue date May 23, 2006
- Applied Materials, Inc.
- Yixing Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Halogen-resistant, anodized aluminum for use in semiconductor proce...
- Patent number 7,033,447
- Issue date Apr 25, 2006
- Applied Materials, Inc.
- Yixing Lin
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Method of cleaning a coated process chamber component
- Patent number 6,902,628
- Issue date Jun 7, 2005
- Applied Materials, Inc.
- Hong Wang
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Reusable ceramic-comprising component which includes a scrificial s...
- Patent number 6,899,798
- Issue date May 31, 2005
- Applied Materials, Inc.
- Edwin Charles Weldon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Yttrium oxide based surface coating for semiconductor IC processing...
- Patent number 6,776,873
- Issue date Aug 17, 2004
- Jennifer Y Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clean aluminum alloy for semiconductor processing equipment
- Patent number 6,713,188
- Issue date Mar 30, 2004
- Applied Materials, Inc.
- Shun Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-resistant, welded aluminum structures for use in semiconduct...
- Patent number 6,659,331
- Issue date Dec 9, 2003
- Applied Materials, Inc.
- Senh Thach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of fabricating a coated process chamber component
- Patent number 6,656,535
- Issue date Dec 2, 2003
- Applied Materials, Inc.
- Yongxiang He
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clean aluminum alloy for semiconductor processing equipment
- Patent number 6,565,984
- Issue date May 20, 2003
- Applied Materials Inc.
- Shun Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
POINT OF USE RECYCLING SYSTEM FOR CMP SLURRY
- Publication number 20110070811
- Publication date Mar 24, 2011
- Applied Materials, Inc.
- Andreas Neuber
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR PROCESS ABATEMENT WITH RECOVERY AND REUSE...
- Publication number 20110023908
- Publication date Feb 3, 2011
- Applied Materials, Inc.
- ANDREAS NEUBER
- B08 - CLEANING
Information Patent Application
PROCESS CHAMBER COMPONENT WITH LAYERED COATING AND METHOD
- Publication number 20100086805
- Publication date Apr 8, 2010
- Applied Materials, Inc.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of coating semiconductor processing apparatus with protectiv...
- Publication number 20080213496
- Publication date Sep 4, 2008
- APPLIED MATERIALS, INC.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process chamber component with layered coating and method
- Publication number 20060110620
- Publication date May 25, 2006
- APPLIED MATERIALS, INC.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Refurbishment of a coated chamber component
- Publication number 20050238807
- Publication date Oct 27, 2005
- APPLIED MATERIALS, INC.
- Yixing Lin
- B08 - CLEANING
Information Patent Application
Cleaning and refurbishing chamber components having metal coatings
- Publication number 20050089699
- Publication date Apr 28, 2005
- APPLIED MATERIALS, INC.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrochemically roughened aluminum semiconductor chamber surfaces
- Publication number 20040224171
- Publication date Nov 11, 2004
- Jennifer Y. Sun
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method of cleaning a coated process chamber component
- Publication number 20040099285
- Publication date May 27, 2004
- APPLIED MATERIALS, INC.
- Hong Wang
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Semiconductor processing apparatus including plasma-resistant, weld...
- Publication number 20040041004
- Publication date Mar 4, 2004
- Applied Materials, Inc.
- Senh Thach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CLEAN ALUMINUM ALLOY FOR SEMICONDUCTOR PROCESSING EQUIPMENT
- Publication number 20030224188
- Publication date Dec 4, 2003
- Shun Wu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Halogen-resistant, anodized aluminium for use in semiconductor proc...
- Publication number 20030205479
- Publication date Nov 6, 2003
- Yixing Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Laser drilled surfaces for substrate processing chambers
- Publication number 20030188685
- Publication date Oct 9, 2003
- APPLIED MATERIALS, INC.
- Hong Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma-resistant, welded aluminum structures for use in semiconduct...
- Publication number 20030160085
- Publication date Aug 28, 2003
- APPLIED MATERIALS, INC.
- Senh Thach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Halogen-resistant, anodized aluminum for use in semiconductor proce...
- Publication number 20030150530
- Publication date Aug 14, 2003
- APPLIED MATERIALS, INC.
- Yixing Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods of roughening a ceramic surface
- Publication number 20030116276
- Publication date Jun 26, 2003
- Edwin Charles Weldon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method of fabricating a coated process chamber component
- Publication number 20030118731
- Publication date Jun 26, 2003
- APPLIED MATERIALS, INC.
- Yongxiang He
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrochemically roughened aluminum semiconductor processing appar...
- Publication number 20030047464
- Publication date Mar 13, 2003
- APPLIED MATERIALS, INC.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

CLIFFORD C. STOW

Person

Patents Grantslast 30 patents

Process chamber component with layered coating and method

Cleaning and refurbishing chamber components having metal coatings

Process chamber component with layered coating and method

Semiconductor processing apparatus including plasma-resistant, weld...

Halogen-resistant, anodized aluminum for use in semiconductor proce...

Halogen-resistant, anodized aluminum for use in semiconductor proce...

Method of cleaning a coated process chamber component

Reusable ceramic-comprising component which includes a scrificial s...

Yttrium oxide based surface coating for semiconductor IC processing...

Clean aluminum alloy for semiconductor processing equipment

Plasma-resistant, welded aluminum structures for use in semiconduct...

Method of fabricating a coated process chamber component

Clean aluminum alloy for semiconductor processing equipment

Patents Applicationslast 30 patents

POINT OF USE RECYCLING SYSTEM FOR CMP SLURRY

METHODS AND APPARATUS FOR PROCESS ABATEMENT WITH RECOVERY AND REUSE...

PROCESS CHAMBER COMPONENT WITH LAYERED COATING AND METHOD

Method of coating semiconductor processing apparatus with protectiv...

Process chamber component with layered coating and method

Refurbishment of a coated chamber component

Cleaning and refurbishing chamber components having metal coatings

Electrochemically roughened aluminum semiconductor chamber surfaces

Method of cleaning a coated process chamber component

Semiconductor processing apparatus including plasma-resistant, weld...

CLEAN ALUMINUM ALLOY FOR SEMICONDUCTOR PROCESSING EQUIPMENT

Halogen-resistant, anodized aluminium for use in semiconductor proc...

Laser drilled surfaces for substrate processing chambers

Plasma-resistant, welded aluminum structures for use in semiconduct...

Halogen-resistant, anodized aluminum for use in semiconductor proce...

Methods of roughening a ceramic surface

Method of fabricating a coated process chamber component

Electrochemically roughened aluminum semiconductor processing appar...