David J. Kubista

Person

Nampa, ID, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for controlling temperature during microfeature...
- Patent number 8,518,184
- Issue date Aug 27, 2013
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming small-scale capacitor structures
- Patent number 8,384,192
- Issue date Feb 26, 2013
- Micron Technology, Inc.
- Lingyi A. Zheng
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods for forming small-scale capacitor structures
- Patent number 7,906,393
- Issue date Mar 15, 2011
- Micron Technology, Inc.
- Lingyi A. Zheng
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and systems for controlling temperature during microfeature...
- Patent number 7,771,537
- Issue date Aug 10, 2010
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems for depositing material onto workpieces in reaction chamber...
- Patent number 7,647,886
- Issue date Jan 19, 2010
- Micron Technology, Inc.
- David J. Kubista
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing microfeature workpieces, e.g.,...
- Patent number 7,422,635
- Issue date Sep 9, 2008
- Micron Technology, Inc.
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing microfeature workpieces; metho...
- Patent number 7,344,755
- Issue date Mar 18, 2008
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microfeature workpiece processing apparatus and methods for control...
- Patent number 7,279,398
- Issue date Oct 9, 2007
- Micron Technology, Inc.
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for controlling temperature during microfeature...
- Patent number 7,258,892
- Issue date Aug 21, 2007
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microfeature workpiece processing apparatus and methods for batch d...
- Patent number 7,235,138
- Issue date Jun 26, 2007
- Micron Technology, Inc.
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microfeature workpiece processing apparatus and methods for control...
- Patent number 7,056,806
- Issue date Jun 6, 2006
- Micron Technology, Inc.
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and process of improving atomic layer deposition chamber...
- Patent number 6,758,911
- Issue date Jul 6, 2004
- Micron Technology, Inc.
- Philip H. Campbell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and process of improving atomic layer deposition chamber...
- Patent number 6,716,284
- Issue date Apr 6, 2004
- Micron Technology, Inc.
- Philip H. Campbell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and process of improving atomic layer deposition chamber...
- Patent number 6,461,436
- Issue date Oct 8, 2002
- Micron Technology, Inc.
- Philip H. Campbell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of selective oxidation in semiconductor manufacture
- Patent number 6,458,714
- Issue date Oct 1, 2002
- Micron Technology, Inc.
- Don Carl Powell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering with collinator cleaning within the sputtering chamber
- Patent number 5,409,587
- Issue date Apr 25, 1995
- Micron Technology, Inc.
- Gurtej S. Sandhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR FORMING SMALL-SCALE CAPACITOR STRUCTURES
- Publication number 20130166057
- Publication date Jun 27, 2013
- Micron Technology, Inc.
- Lingyi A. Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING SMALL-SCALE CAPACITOR STRUCTURES
- Publication number 20110163416
- Publication date Jul 7, 2011
- Micron Technology, Inc.
- Lingyi A. Zheng
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND SYSTEMS FOR CONTROLLING TEMPERATURE DURING MICROFEATURE...
- Publication number 20100282164
- Publication date Nov 11, 2010
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for processing microfeature workpieces, e.g.,...
- Publication number 20060213440
- Publication date Sep 28, 2006
- Micron Technology, Inc.
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and systems for controlling temperature during microfeature...
- Publication number 20060204649
- Publication date Sep 14, 2006
- Micron Technology, Inc.
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for processing microfeature workpieces, e.g.,...
- Publication number 20060205187
- Publication date Sep 14, 2006
- Micron Technology, Inc.
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems for depositing material onto workpieces in reaction chamber...
- Publication number 20060196538
- Publication date Sep 7, 2006
- Micron Technology, Inc.
- David J. Kubista
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for batch d...
- Publication number 20060198955
- Publication date Sep 7, 2006
- Micron Technology, Inc.
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for control...
- Publication number 20060121689
- Publication date Jun 8, 2006
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for control...
- Publication number 20060115957
- Publication date Jun 1, 2006
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for forming small-scale capacitor structures
- Publication number 20050164466
- Publication date Jul 28, 2005
- Lingyi A. Zheng
- G05 - CONTROLLING REGULATING
Information Patent Application
Methods and systems for controlling temperature during microfeature...
- Publication number 20050126489
- Publication date Jun 16, 2005
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems for depositing material onto workpieces in reaction chamber...
- Publication number 20050081786
- Publication date Apr 21, 2005
- David J. Kubista
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for control...
- Publication number 20050059261
- Publication date Mar 17, 2005
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for processing microfeature workpieces, e.g.,...
- Publication number 20050045102
- Publication date Mar 3, 2005
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for batch d...
- Publication number 20050039686
- Publication date Feb 24, 2005
- Lingyi A. Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for processing microfeature workpieces; metho...
- Publication number 20050039680
- Publication date Feb 24, 2005
- Kevin L. Beaman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and process of improving atomic layer deposition chamber...
- Publication number 20030070618
- Publication date Apr 17, 2003
- Philip H. Campbell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and process of improving atomic layer deposition chamber...
- Publication number 20030070609
- Publication date Apr 17, 2003
- Philip H. Campbell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

David J. Kubista

Person

Patents Grantslast 30 patents

Methods and systems for controlling temperature during microfeature...

Methods for forming small-scale capacitor structures

Methods for forming small-scale capacitor structures

Methods and systems for controlling temperature during microfeature...

Systems for depositing material onto workpieces in reaction chamber...

Methods and apparatus for processing microfeature workpieces, e.g.,...

Methods and apparatus for processing microfeature workpieces; metho...

Microfeature workpiece processing apparatus and methods for control...

Methods and systems for controlling temperature during microfeature...

Microfeature workpiece processing apparatus and methods for batch d...

Microfeature workpiece processing apparatus and methods for control...

Apparatus and process of improving atomic layer deposition chamber...

Apparatus and process of improving atomic layer deposition chamber...

Apparatus and process of improving atomic layer deposition chamber...

Method of selective oxidation in semiconductor manufacture

Sputtering with collinator cleaning within the sputtering chamber

Patents Applicationslast 30 patents

METHODS FOR FORMING SMALL-SCALE CAPACITOR STRUCTURES

METHODS FOR FORMING SMALL-SCALE CAPACITOR STRUCTURES

METHODS AND SYSTEMS FOR CONTROLLING TEMPERATURE DURING MICROFEATURE...

Methods and apparatus for processing microfeature workpieces, e.g.,...

Methods and systems for controlling temperature during microfeature...

Methods and apparatus for processing microfeature workpieces, e.g.,...

Systems for depositing material onto workpieces in reaction chamber...

Microfeature workpiece processing apparatus and methods for batch d...

Microfeature workpiece processing apparatus and methods for control...

Microfeature workpiece processing apparatus and methods for control...

Methods for forming small-scale capacitor structures

Methods and systems for controlling temperature during microfeature...

Systems for depositing material onto workpieces in reaction chamber...

Microfeature workpiece processing apparatus and methods for control...

Methods and apparatus for processing microfeature workpieces, e.g.,...

Microfeature workpiece processing apparatus and methods for batch d...

Methods and apparatus for processing microfeature workpieces; metho...

Apparatus and process of improving atomic layer deposition chamber...

Apparatus and process of improving atomic layer deposition chamber...