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David W. Porter
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Sherwood, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Electroplating apparatus for tailored uniformity profile
Patent number
11,549,192
Issue date
Jan 10, 2023
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Selective deposition with atomic layer etch reset
Patent number
10,998,187
Issue date
May 4, 2021
Lam Research Corporation
Kapu Sirish Reddy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Protecting anodes from passivation in alloy plating systems
Patent number
10,954,605
Issue date
Mar 23, 2021
Novellus Systems, Inc.
Lee Peng Chua
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electroplating apparatus for tailored uniformity profile
Patent number
10,920,335
Issue date
Feb 16, 2021
Novellus Systems, Inc.
Steven T. Mayer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wetting pretreatment for enhanced damascene metal filling
Patent number
10,840,101
Issue date
Nov 17, 2020
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Enhancement of electrolyte hydrodynamics for efficient mass transfe...
Patent number
10,662,545
Issue date
May 26, 2020
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Selective deposition with atomic layer etch reset
Patent number
10,559,461
Issue date
Feb 11, 2020
Lam Research Corporation
Kapu Sirish Reddy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
TSV bath evaluation using field versus feature contrast
Patent number
10,508,359
Issue date
Dec 17, 2019
Lam Research Corporation
Lee Brogan
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electroplating apparatus and process for wafer level packaging
Patent number
10,309,024
Issue date
Jun 4, 2019
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Bubble and foam solutions using a completely immersed air-free feed...
Patent number
10,208,395
Issue date
Feb 19, 2019
Lam Research Corporation
Richard Abraham
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Protecting anodes from passivation in alloy plating systems
Patent number
10,106,907
Issue date
Oct 23, 2018
Novellus Systems, Inc.
Lee Peng Chua
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Methods and apparatuses for cleaning electroplating substrate holders
Patent number
10,092,933
Issue date
Oct 9, 2018
Novellus Systems, Inc.
Santosh Kumar
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Dynamic current distribution control apparatus and method for wafer...
Patent number
10,023,970
Issue date
Jul 17, 2018
Novellus Systems, Inc.
Zhian He
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electroplating apparatus for tailored uniformity profile
Patent number
10,017,869
Issue date
Jul 10, 2018
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electroplating apparatus and process for wafer level packaging
Patent number
9,982,357
Issue date
May 29, 2018
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Apparatus for advanced packaging applications
Patent number
9,899,230
Issue date
Feb 20, 2018
Novellus Systems, Inc.
Bryan L. Buckalew
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Method and apparatus for remote plasma treatment for reducing metal...
Patent number
9,865,501
Issue date
Jan 9, 2018
Lam Research Corporation
Tighe A. Spurlin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wetting pretreatment for enhanced damascene metal filling
Patent number
9,852,913
Issue date
Dec 26, 2017
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Enhancement of electrolyte hydrodynamics for efficient mass transfe...
Patent number
9,834,852
Issue date
Dec 5, 2017
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Dynamic current distribution control apparatus and method for wafer...
Patent number
9,822,461
Issue date
Nov 21, 2017
Novellus Systems, Inc.
Zhian He
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Method and apparatus for electroplating semiconductor wafer when co...
Patent number
9,816,196
Issue date
Nov 14, 2017
Novellus Systems, Inc.
Tighe A. Spurlin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Apparatus for wetting pretreatment for enhanced damascene metal fil...
Patent number
9,721,800
Issue date
Aug 1, 2017
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
TSV bath evaluation using field versus feature contrast
Patent number
9,689,083
Issue date
Jun 27, 2017
Lam Research Corporation
Lee Brogan
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electrofill vacuum plating cell
Patent number
9,677,188
Issue date
Jun 13, 2017
Novellus Systems, Inc.
R. Marshall Stowell
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Bubble and foam solutions using a completely immersed air-free feed...
Patent number
9,617,652
Issue date
Apr 11, 2017
Lam Research Corporation
Richard Abraham
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Protecting anodes from passivation in alloy plating systems
Patent number
9,534,308
Issue date
Jan 3, 2017
Novellus Systems, Inc.
Lee Peng Chua
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Enhancement of electrolyte hydrodynamics for efficient mass transfe...
Patent number
9,523,155
Issue date
Dec 20, 2016
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Control of electrolyte hydrodynamics for efficient mass transfer du...
Patent number
9,464,361
Issue date
Oct 11, 2016
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Wet etching methods for copper removal and planarization in semicon...
Patent number
9,447,505
Issue date
Sep 20, 2016
Novellus Systems, Inc.
Steven T. Mayer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for advanced packaging applications
Patent number
9,449,808
Issue date
Sep 20, 2016
Novellus Systems, Inc.
Bryan L. Buckalew
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
CONTROL OF WAFER BOW DURING INTEGRATED CIRCUIT PROCESSING
Publication number
20230136819
Publication date
May 4, 2023
LAM RESEARCH CORPORATION
David W. Porter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROPLATING APPARATUS FOR TAILORED UNIFORMITY PROFILE
Publication number
20210148001
Publication date
May 20, 2021
Novellus Systems, Inc.
Steven T. Mayer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET
Publication number
20200118809
Publication date
Apr 16, 2020
LAM RESEARCH CORPORATION
Kapu Sirish Reddy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROTECTING ANODES FROM PASSIVATION IN ALLOY PLATING SYSTEMS
Publication number
20180371637
Publication date
Dec 27, 2018
Novellus Systems, Inc.
Lee Peng Chua
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL...
Publication number
20180350670
Publication date
Dec 6, 2018
LAM RESEARCH CORPORATION
Tighe A. Spurlin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET
Publication number
20180308680
Publication date
Oct 25, 2018
LAM RESEARCH CORPORATION
Kapu Sirish Reddy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTROPLATING APPARATUS FOR TAILORED UNIFORMITY PROFILE
Publication number
20180291517
Publication date
Oct 11, 2018
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ELECTROPLATING APPARATUS AND PROCESS FOR WAFER LEVEL PACKAGING
Publication number
20180237933
Publication date
Aug 23, 2018
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
WETTING PRETREATMENT FOR ENHANCED DAMASCENE METAL FILLING
Publication number
20180138044
Publication date
May 17, 2018
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ENHANCEMENT OF ELECTROLYTE HYDRODYNAMICS FOR EFFICIENT MASS TRANSFE...
Publication number
20180105949
Publication date
Apr 19, 2018
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
DYNAMIC CURRENT DISTRIBUTION CONTROL APPARATUS AND METHOD FOR WAFER...
Publication number
20180057955
Publication date
Mar 1, 2018
Novellus Systems, Inc.
Zhian HE
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR ELECTROPLATING SEMICONDUCTOR WAFER WHEN CO...
Publication number
20180030611
Publication date
Feb 1, 2018
Novellus Systems, Inc.
Tighe A. Spurlin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
TSV BATH EVALUATION USING FIELD VERSUS FEATURE CONTRAST
Publication number
20170241041
Publication date
Aug 24, 2017
LAM RESEARCH CORPORATION
Lee Brogan
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
BUBBLE AND FOAM SOLUTIONS USING A COMPLETELY IMMERSED AIR-FREE FEED...
Publication number
20170167045
Publication date
Jun 15, 2017
LAM RESEARCH CORPORATION
Richard Abraham
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
PROTECTING ANODES FROM PASSIVATION IN ALLOY PLATING SYSTEMS
Publication number
20170137960
Publication date
May 18, 2017
Novellus Systems, Inc.
Lee Peng Chua
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
DYNAMIC CURRENT DISTRIBUTION CONTROL APPARATUS AND METHOD FOR WAFER...
Publication number
20170096745
Publication date
Apr 6, 2017
Novellus Systems, Inc.
Zhian HE
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ENHANCEMENT OF ELECTROLYTE HYDRODYNAMICS FOR EFFICIENT MASS TRANSFE...
Publication number
20170029973
Publication date
Feb 2, 2017
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
CONTROL OF ELECTROLYTE HYDRODYNAMICS FOR EFFICIENT MASS TRANSFER DU...
Publication number
20160376722
Publication date
Dec 29, 2016
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
APPARATUS FOR ADVANCED PACKAGING APPLICATIONS
Publication number
20160343582
Publication date
Nov 24, 2016
Novellus Systems, Inc.
Bryan L. BUCKALEW
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROPLATING APPARATUS AND PROCESS FOR WAFER LEVEL PACKAGING
Publication number
20160312373
Publication date
Oct 27, 2016
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ELECTROPLATING APPARATUS FOR TAILORED UNIFORMITY PROFILE
Publication number
20160115611
Publication date
Apr 28, 2016
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING
Publication number
20150376792
Publication date
Dec 31, 2015
LAM RESEARCH CORPORATION
Tighe A. Spurlin
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR PREPARING A SUBSTRATE WITH A SEMI-NOBLE ME...
Publication number
20150299886
Publication date
Oct 22, 2015
LAM RESEARCH CORPORATION
Natalia V. Doubina
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
WET ETCHING METHODS FOR COPPER REMOVAL AND PLANARIZATION IN SEMICON...
Publication number
20150267306
Publication date
Sep 24, 2015
Novellus Systems, Inc.
Steven T. Mayer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WETTING PRETREATMENT FOR ENHANCED DAMASCENE METAL FILLING
Publication number
20150179458
Publication date
Jun 25, 2015
Novellus Systems, Inc.
Steven T. Mayer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR WETTING PRETREATMENT FOR ENHANCED DAMASCENE METAL FIL...
Publication number
20150096883
Publication date
Apr 9, 2015
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL...
Publication number
20150072538
Publication date
Mar 12, 2015
LAM RESEARCH CORPORATION
Tighe A. Spurlin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROPLATING APPARATUS FOR TAILORED UNIFORMITY PROFILE
Publication number
20150060291
Publication date
Mar 5, 2015
Novellus Systems, Inc.
Steven T. Mayer
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
TSV BATH EVALUATION USING FIELD VERSUS FEATURE CONTRAST
Publication number
20140367279
Publication date
Dec 18, 2014
LAM RESEARCH CORPORATION
Lee Brogan
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
APPARATUS FOR ADVANCED PACKAGING APPLICATIONS
Publication number
20140357089
Publication date
Dec 4, 2014
Novellus Systems, Inc.
Bryan L. BUCKALEW
H01 - BASIC ELECTRIC ELEMENTS