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Plasma and plasma UV deposition of SiO.sub.2
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Patent number 4,916,091
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Issue date Apr 10, 1990
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Texas Instruments Incorporated
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Dean W. Freeman
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Processing apparatus and method
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Patent number 4,910,043
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Issue date Mar 20, 1990
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Texas Instruments Incorporated
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Dean W. Freeman
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method for wafer treating
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Patent number 4,906,328
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Issue date Mar 6, 1990
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Texas Instruments Incorporated
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Dean W. Freeman
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A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
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Processing apparatus and method
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Patent number 4,822,450
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Issue date Apr 18, 1989
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Texas Instruments Incorporated
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Cecil J. Davis
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Oxide deposition method
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Patent number 4,810,673
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Issue date Mar 7, 1989
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Texas Instruments Incorporated
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Dean W. Freeman
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...