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Deqi Wang

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  • San Jose, CA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    IN-LINE MACHINE VISION SYSTEM FOR PART TRACKING OF SUBSTRATE PROCES...
    • Publication number 20240278991
    • Publication date Aug 22, 2024
    • LAM RESEARCH CORPORATION
    • Hossein Sadeghi
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20230041794
    • Publication date Feb 9, 2023
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20220102208
    • Publication date Mar 31, 2022
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20210327754
    • Publication date Oct 21, 2021
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FEATURE FILL WITH MULTI-STAGE NUCLEATION INHIBITION
    • Publication number 20200185225
    • Publication date Jun 11, 2020
    • LAM RESEARCH CORPORATION
    • Deqi Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20200185273
    • Publication date Jun 11, 2020
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20190326168
    • Publication date Oct 24, 2019
    • Novellus Systems, Inc.
    • Tsung-Han Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20190206731
    • Publication date Jul 4, 2019
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FEATURE FILL WITH MULTI-STAGE NUCLEATION INHIBITION
    • Publication number 20190080914
    • Publication date Mar 14, 2019
    • LAM RESEARCH CORPORATION
    • Deqi Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20190019725
    • Publication date Jan 17, 2019
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20180277431
    • Publication date Sep 27, 2018
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CHAMBER CONDITIONING FOR REMOTE PLASMA PROCESS
    • Publication number 20180174901
    • Publication date Jun 21, 2018
    • LAM RESEARCH CORPORATION
    • Deqi Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20170365513
    • Publication date Dec 21, 2017
    • LAM RESEARCH CORPORATION
    • Tsung-Han Yang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20170278749
    • Publication date Sep 28, 2017
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR DEPOSITING EXTREMELY LOW RESISTIVITY TUNGSTEN
    • Publication number 20170133231
    • Publication date May 11, 2017
    • LAM RESEARCH CORPORATION
    • Hanna Bamnolker
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FEATURE FILL WITH MULTI-STAGE NUCLEATION INHIBITION
    • Publication number 20160343612
    • Publication date Nov 24, 2016
    • LAM RESEARCH CORPORATION
    • Deqi Wang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20160190008
    • Publication date Jun 30, 2016
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20160093528
    • Publication date Mar 31, 2016
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20160071764
    • Publication date Mar 10, 2016
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR DEPOSITING EXTREMELY LOW RESISTIVITY TUNGSTEN
    • Publication number 20150179461
    • Publication date Jun 25, 2015
    • LAM RESEARCH CORPORATION
    • Hanna Bamnolker
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20150056803
    • Publication date Feb 26, 2015
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR DEPOSITING TUNGSTEN FILM WITH LOW ROUGHNESS AND LOW RESI...
    • Publication number 20140073135
    • Publication date Mar 13, 2014
    • Yan Guan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS OF FORMING TENSILE TUNGSTEN FILMS AND COMPRESSIVE TUNGSTEN...
    • Publication number 20140011358
    • Publication date Jan 9, 2014
    • Feng Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20130302980
    • Publication date Nov 14, 2013
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20130171822
    • Publication date Jul 4, 2013
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...