Derek Coon

Person

Redwood City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Immersion lithography fluid control system regulating flow velocity...
- Patent number 9,618,852
- Issue date Apr 11, 2017
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method to control vacuum at porous material using mul...
- Patent number 9,329,492
- Issue date May 3, 2016
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for keeping immersion fluid adjacent to an op...
- Patent number 9,217,933
- Issue date Dec 22, 2015
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography apparatus and method having movable liquid di...
- Patent number 9,176,394
- Issue date Nov 3, 2015
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for recovering fluid in immersion lithography
- Patent number 8,934,080
- Issue date Jan 13, 2015
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography fluid control system changing flow velocity o...
- Patent number 8,797,500
- Issue date Aug 5, 2014
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for keeping immersion fluid adjacent to an op...
- Patent number 8,743,343
- Issue date Jun 3, 2014
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method to control vacuum at porous material using mul...
- Patent number 8,634,055
- Issue date Jan 21, 2014
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography apparatus and method having movable liquid di...
- Patent number 8,610,873
- Issue date Dec 17, 2013
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography fluid control system regulating gas velocity...
- Patent number 8,497,973
- Issue date Jul 30, 2013
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method to control vacuum at porous material using mul...
- Patent number 8,477,284
- Issue date Jul 2, 2013
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for keeping immersion fluid adjacent to an op...
- Patent number 8,400,610
- Issue date Mar 19, 2013
- Nikon Corporation
- Alex Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for recovering fluid in immersion lithography
- Patent number 8,289,497
- Issue date Oct 16, 2012
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and methods for keeping immersion fluid adjacent to an op...
- Patent number 8,237,911
- Issue date Aug 7, 2012
- Nikon Corporation
- Alex Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography fluid control system using an electric or mag...
- Patent number 8,102,501
- Issue date Jan 24, 2012
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Nozzle to help reduce the escape of immersion liquid from an immers...
- Patent number 8,068,209
- Issue date Nov 29, 2011
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Offset partial ring seal in immersion lithographic system
- Patent number 7,903,233
- Issue date Mar 8, 2011
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for and method of thermophoretic protection of an object...
- Patent number 7,745,079
- Issue date Jun 29, 2010
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid cooled mirror for use in extreme ultraviolet lithography
- Patent number 7,591,561
- Issue date Sep 22, 2009
- Nikon Corporation
- Alton H. Phillips
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Gas curtain type immersion lithography tool using porous material f...
- Patent number 7,576,833
- Issue date Aug 18, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography system and method having an immersion fluid c...
- Patent number 7,532,309
- Issue date May 12, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography fluid control system that applies force to co...
- Patent number 7,339,650
- Issue date Mar 4, 2008
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for controlling fluid flow in an optical assembly
- Patent number 6,847,431
- Issue date Jan 25, 2005
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
FLUID DISTRIBUTION NETWORK FOR LARGE STATOR MOTOR
- Publication number 20150075751
- Publication date Mar 19, 2015
- Nikon Corporation
- Michel Pharand
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OP...
- Publication number 20140232999
- Publication date Aug 21, 2014
- Nikon Corporation
- Alex Ka Tim POON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LITHOGRAPHY APPARATUS AND METHOD HAVING MOVABLE LIQUID DI...
- Publication number 20140071412
- Publication date Mar 13, 2014
- Nikon Corporation
- Alex Ka Tim POON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...
- Publication number 20130286366
- Publication date Oct 31, 2013
- Alex Ka Tim POON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OP...
- Publication number 20130141702
- Publication date Jun 6, 2013
- Nikon Corporation
- Alex Ka Tim POON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODULAR COIL ARRAYS FOR PLANAR AND LINEAR MOTORS
- Publication number 20130069449
- Publication date Mar 21, 2013
- Nikon Corporation
- Michel Pharand
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
APPARATUS AND METHODS FOR RECOVERING FLUID IN IMMERSION LITHOGRAPHY
- Publication number 20130010271
- Publication date Jan 10, 2013
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OP...
- Publication number 20120262687
- Publication date Oct 18, 2012
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHODS TO RECOVER LIQUID IN IMMERSION LITHOGRAPHY
- Publication number 20120257179
- Publication date Oct 11, 2012
- Nikon Corporation
- Derek COON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING R...
- Publication number 20120062866
- Publication date Mar 15, 2012
- NIKON CORPORATION
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electromagnetic Coil Design for Improved Thermal Performance
- Publication number 20100271159
- Publication date Oct 28, 2010
- NIKON CORPORATION
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD TO CONTROL LIQUID STAGNATION IN IMMERSION LIQU...
- Publication number 20100220301
- Publication date Sep 2, 2010
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...
- Publication number 20100134773
- Publication date Jun 3, 2010
- NIKON CORPORATION
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...
- Publication number 20100097585
- Publication date Apr 22, 2010
- Nikon Corporation
- Alex Ka Tim POON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for recovering fluid in immersion lithography
- Publication number 20090237631
- Publication date Sep 24, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography apparatus and method having movable liquid di...
- Publication number 20090231560
- Publication date Sep 17, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography fluid control system
- Publication number 20090075212
- Publication date Mar 19, 2009
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography fluid control system
- Publication number 20090075211
- Publication date Mar 19, 2009
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas curtain type immersion lithography tool using porous material f...
- Publication number 20090002648
- Publication date Jan 1, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Nozzle to help reduce the escape of immersion liquid from an immers...
- Publication number 20080231822
- Publication date Sep 25, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for reducing the escape of immersion liquid f...
- Publication number 20080231823
- Publication date Sep 25, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for keeping immersion fluid adjacent to an op...
- Publication number 20080225246
- Publication date Sep 18, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus, systems and methods for removing liquid from workpiece d...
- Publication number 20080225248
- Publication date Sep 18, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for removing immersion liquid from substrates...
- Publication number 20080212050
- Publication date Sep 4, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for minimizing force variation from immersion...
- Publication number 20080198348
- Publication date Aug 21, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography system and method having a wafer chuck made o...
- Publication number 20080100812
- Publication date May 1, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Offset Partial Ring Seal in Immersion Lithographic System
- Publication number 20080094590
- Publication date Apr 24, 2008
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for recovering fluid in immersion lithography
- Publication number 20080043211
- Publication date Feb 21, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography system and method having an immersion fluid c...
- Publication number 20070279608
- Publication date Dec 6, 2007
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography fluid control system
- Publication number 20070268468
- Publication date Nov 22, 2007
- Nikon Corporation
- Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Immersion lithography fluid control system regulating flow velocity...

Apparatus and method to control vacuum at porous material using mul...

Apparatus and methods for keeping immersion fluid adjacent to an op...

Immersion lithography apparatus and method having movable liquid di...

Apparatus and methods for recovering fluid in immersion lithography

Immersion lithography fluid control system changing flow velocity o...

Apparatus and methods for keeping immersion fluid adjacent to an op...

Apparatus and method to control vacuum at porous material using mul...

Immersion lithography apparatus and method having movable liquid di...

Immersion lithography fluid control system regulating gas velocity...

Apparatus and method to control vacuum at porous material using mul...

Apparatus and methods for keeping immersion fluid adjacent to an op...

Apparatus and methods for recovering fluid in immersion lithography

Apparatus and methods for keeping immersion fluid adjacent to an op...

Immersion lithography fluid control system using an electric or mag...

Nozzle to help reduce the escape of immersion liquid from an immers...

Offset partial ring seal in immersion lithographic system

Apparatus for and method of thermophoretic protection of an object...

Liquid cooled mirror for use in extreme ultraviolet lithography

Gas curtain type immersion lithography tool using porous material f...

Immersion lithography system and method having an immersion fluid c...

Immersion lithography fluid control system that applies force to co...

Method and device for controlling fluid flow in an optical assembly

Patents Applicationslast 30 patents

FLUID DISTRIBUTION NETWORK FOR LARGE STATOR MOTOR

APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OP...

IMMERSION LITHOGRAPHY APPARATUS AND METHOD HAVING MOVABLE LIQUID DI...

APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...

APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OP...

MODULAR COIL ARRAYS FOR PLANAR AND LINEAR MOTORS

APPARATUS AND METHODS FOR RECOVERING FLUID IN IMMERSION LITHOGRAPHY

APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OP...

APPARATUS AND METHODS TO RECOVER LIQUID IN IMMERSION LITHOGRAPHY

MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING R...

Electromagnetic Coil Design for Improved Thermal Performance

APPARATUS AND METHOD TO CONTROL LIQUID STAGNATION IN IMMERSION LIQU...

APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...

APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...

Apparatus and methods for recovering fluid in immersion lithography

Immersion lithography apparatus and method having movable liquid di...

Immersion lithography fluid control system

Immersion lithography fluid control system

Gas curtain type immersion lithography tool using porous material f...

Nozzle to help reduce the escape of immersion liquid from an immers...

Apparatus and methods for reducing the escape of immersion liquid f...

Apparatus and methods for keeping immersion fluid adjacent to an op...

Apparatus, systems and methods for removing liquid from workpiece d...

Apparatus and methods for removing immersion liquid from substrates...

Apparatus and methods for minimizing force variation from immersion...

Immersion lithography system and method having a wafer chuck made o...

Offset Partial Ring Seal in Immersion Lithographic System

Apparatus and methods for recovering fluid in immersion lithography

Immersion lithography system and method having an immersion fluid c...

Immersion lithography fluid control system