Dien-Yeh Wu

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Gas distribution ceramic heater for deposition chamber
- Patent number 12,016,092
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber with multiple plasma units
- Patent number 11,955,319
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-temperature plasma pre-clean for selective gap fill
- Patent number 11,955,381
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual plasma pre-clean for selective gap fill
- Patent number 11,721,542
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Yi Xu
- B08 - CLEANING
Information Patent Grant
Thermal process chamber lid with backside pumping
- Patent number 11,715,667
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and methods of protecting nickel and nickel containing...
- Patent number 11,658,014
- Issue date May 23, 2023
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing chamber having heated showerhead assembly
- Patent number 11,598,003
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Faruk Gungor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature dual chamber showerhead
- Patent number 11,555,244
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Blocker plate for use in a substrate process chamber
- Patent number 11,421,322
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Xiaoxiong Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal process chamber lid with backside pumping
- Patent number 11,335,591
- Issue date May 17, 2022
- Applied Materials, Inc.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number RE48994
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
Information Patent Grant
Apparatus for depositing metal films with plasma treatment
- Patent number 11,133,155
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Daping Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Counter-flow multi inject for atomic layer deposition chamber
- Patent number 10,982,326
- Issue date Apr 20, 2021
- Applied Materials, Inc.
- Dien-Yeh Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature process chamber lid
- Patent number 10,879,090
- Issue date Dec 29, 2020
- Applied Materials, Inc.
- Ilker Durukan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas feedthrough assembly
- Patent number 10,640,870
- Issue date May 5, 2020
- Applied Materials, Inc.
- Daping Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Blocker plate for use in a substrate process chamber
- Patent number 10,508,339
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Xiaoxiong Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition chamber with counter-flow multi inject
- Patent number 10,487,399
- Issue date Nov 26, 2019
- Applied Materials, Inc.
- Dien-Yeh Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for depositing metal films with plasma treatment
- Patent number 10,453,657
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Daping Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition chamber with thermal lid
- Patent number 10,407,771
- Issue date Sep 10, 2019
- Applied Materials, Inc.
- Anqing Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number RE47440
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
Information Patent Grant
Methods for forming low-resistance contacts through integrated proc...
- Patent number 9,947,578
- Issue date Apr 17, 2018
- Applied Materials, Inc.
- Yu Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature process chamber lid
- Patent number 9,831,109
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Ilker Durukan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of films comprising aluminum alloys with high aluminum c...
- Patent number 9,683,287
- Issue date Jun 20, 2017
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing metals using high frequency plasma
- Patent number 9,466,524
- Issue date Oct 11, 2016
- Applied Materials, Inc.
- Paul F. Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing chamber gas delivery system with hot-swappable ampoule
- Patent number 9,447,497
- Issue date Sep 20, 2016
- Applied Materials, Inc.
- Dien-Yeh Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of N-metal films comprising aluminum alloys
- Patent number 9,145,612
- Issue date Sep 29, 2015
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number 9,109,754
- Issue date Aug 18, 2015
- Applied Materials, Inc.
- Joseph Yudovsky
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Apparatus and process for plasma-enhanced atomic layer deposition
- Patent number 9,032,906
- Issue date May 19, 2015
- Applied Materials, Inc.
- Paul Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number 8,955,547
- Issue date Feb 17, 2015
- Applied Materials, Inc.
- Faruk Gungor
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Ampoule with a thermally conductive coating
- Patent number 8,951,478
- Issue date Feb 10, 2015
- Applied Materials, Inc.
- Schubert S. Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Processing Chamber With Multiple Plasma Units
- Publication number 20240249918
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Selective Metal Deposition Using Separated Reactant Activ...
- Publication number 20240191354
- Publication date Jun 13, 2024
- Ying-Bing JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING METAL GAPFILL WITH LOW RESISTIVITY
- Publication number 20240088071
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Yi XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED PVD TUNGSTEN LINER AND SEAMLESS CVD TUNGSTEN FILL
- Publication number 20240087955
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Yi XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Purge Ring for Reduced Substrate Backside Deposition
- Publication number 20240018648
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Geraldine VASQUEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230377892
- Publication date Nov 23, 2023
- Yiyang WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING
- Publication number 20230335434
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Anqing Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF FIELD-SUPPRESSION CVD TUNGSTEN (W) FILL ON PVD W LINER
- Publication number 20230326791
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Zhimin QI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing Chamber With Multiple Plasma Units
- Publication number 20220319813
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL
- Publication number 20220319837
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING
- Publication number 20220246471
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Anqing Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-TEMPERATURE PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL
- Publication number 20210398850
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS OF PROTECTING NICKEL AND NICKEL CONTAINING...
- Publication number 20210319983
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Pingyan LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION CERAMIC HEATER FOR DEPOSITION CHAMBER
- Publication number 20210176831
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Pingyan LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL
- Publication number 20210159070
- Publication date May 27, 2021
- Applied Materials, Inc.
- Yi Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing Chamber With Multiple Plasma Units
- Publication number 20210159052
- Publication date May 27, 2021
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE DUAL CHAMBER SHOWERHEAD
- Publication number 20210130956
- Publication date May 6, 2021
- Applied Materials, Inc.
- Pingyan LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR DUAL CHANNEL SHOWERHEADS
- Publication number 20210032753
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Jallepally RAVI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING
- Publication number 20200381295
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Anqing Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION CHAMBER WITH COUNTER-FLOW MULTI INJECT
- Publication number 20200087784
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Dien-Yeh WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR DEPOSITING METAL FILMS WITH PLASMA TREATMENT
- Publication number 20200020509
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- DAPING YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER
- Publication number 20190382895
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- XIAOXIONG YUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY
- Publication number 20190078210
- Publication date Mar 14, 2019
- FARUK GUNGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER
- Publication number 20180347043
- Publication date Dec 6, 2018
- Applied Materials, Inc.
- XIAOXIONG YUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Temperature Process Chamber Lid
- Publication number 20180053667
- Publication date Feb 22, 2018
- Applied Materials, Inc.
- Ilker Durukan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DEPOSITING METAL FILMS WITH PLASMA TREATMENT
- Publication number 20180012732
- Publication date Jan 11, 2018
- DAPING YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FEEDTHROUGH ASSEMBLY
- Publication number 20170306488
- Publication date Oct 26, 2017
- Applied Materials, Inc.
- Daping YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING LOW-RESISTANCE CONTACTS THROUGH INTEGRATED PROC...
- Publication number 20170148670
- Publication date May 25, 2017
- Applied Materials, Inc.
- YU LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR SELECTIVELY SEALING A GAS FEEDTHROUGH
- Publication number 20160326648
- Publication date Nov 10, 2016
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
- Publication number 20160097119
- Publication date Apr 7, 2016
- Applied Materials, Inc.
- ANQING CUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Dien-Yeh Wu

Person

Patents Grantslast 30 patents

Gas distribution ceramic heater for deposition chamber

Processing chamber with multiple plasma units

Low-temperature plasma pre-clean for selective gap fill

Dual plasma pre-clean for selective gap fill

Thermal process chamber lid with backside pumping

Apparatuses and methods of protecting nickel and nickel containing...

Substrate processing chamber having heated showerhead assembly

High temperature dual chamber showerhead

Blocker plate for use in a substrate process chamber

Thermal process chamber lid with backside pumping

Apparatus and method for providing uniform flow of gas

Apparatus for depositing metal films with plasma treatment

Counter-flow multi inject for atomic layer deposition chamber

High temperature process chamber lid

Gas feedthrough assembly

Blocker plate for use in a substrate process chamber

Atomic layer deposition chamber with counter-flow multi inject

Apparatus for depositing metal films with plasma treatment

Atomic layer deposition chamber with thermal lid

Apparatus and method for providing uniform flow of gas

Methods for forming low-resistance contacts through integrated proc...

High temperature process chamber lid

Deposition of films comprising aluminum alloys with high aluminum c...

Method of depositing metals using high frequency plasma

Processing chamber gas delivery system with hot-swappable ampoule

Deposition of N-metal films comprising aluminum alloys

Apparatus and method for providing uniform flow of gas

Apparatus and process for plasma-enhanced atomic layer deposition

Apparatus and method for providing uniform flow of gas

Ampoule with a thermally conductive coating

Patents Applicationslast 30 patents

Processing Chamber With Multiple Plasma Units

Method of Selective Metal Deposition Using Separated Reactant Activ...

METHODS FOR FORMING METAL GAPFILL WITH LOW RESISTIVITY

INTEGRATED PVD TUNGSTEN LINER AND SEAMLESS CVD TUNGSTEN FILL

Purge Ring for Reduced Substrate Backside Deposition

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING

SELF FIELD-SUPPRESSION CVD TUNGSTEN (W) FILL ON PVD W LINER

Processing Chamber With Multiple Plasma Units

DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL

THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING

LOW-TEMPERATURE PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL

APPARATUSES AND METHODS OF PROTECTING NICKEL AND NICKEL CONTAINING...

GAS DISTRIBUTION CERAMIC HEATER FOR DEPOSITION CHAMBER

DUAL PLASMA PRE-CLEAN FOR SELECTIVE GAP FILL

Processing Chamber With Multiple Plasma Units

HIGH TEMPERATURE DUAL CHAMBER SHOWERHEAD

METHODS AND APPARATUS FOR DUAL CHANNEL SHOWERHEADS

THERMAL PROCESS CHAMBER LID WITH BACKSIDE PUMPING

ATOMIC LAYER DEPOSITION CHAMBER WITH COUNTER-FLOW MULTI INJECT

APPARATUS FOR DEPOSITING METAL FILMS WITH PLASMA TREATMENT

BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER

SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY

BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER

High Temperature Process Chamber Lid

APPARATUS FOR DEPOSITING METAL FILMS WITH PLASMA TREATMENT

GAS FEEDTHROUGH ASSEMBLY

METHODS FOR FORMING LOW-RESISTANCE CONTACTS THROUGH INTEGRATED PROC...

APPARATUS FOR SELECTIVELY SEALING A GAS FEEDTHROUGH

ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID