Eric H. Lenz

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metal deposition
- Patent number 12,203,168
- Issue date Jan 21, 2025
- Lam Research Corporation
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer support pedestal with wafer anti-slip and anti-rotation features
- Patent number 10,186,448
- Issue date Jan 22, 2019
- Lam Research Corporation
- Peter Krotov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor delivery method and apparatus for solid and liquid precursors
- Patent number 10,087,523
- Issue date Oct 2, 2018
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for measuring entrained vapor
- Patent number 9,951,423
- Issue date Apr 24, 2018
- Lam Research Corporation
- Eric H. Lenz
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for physical confinement of a liquid meniscus...
- Patent number 9,694,453
- Issue date Jul 4, 2017
- Lam Research Corporation
- Enrico Magni
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Airflow management for low particulate count in a process tool
- Patent number 9,321,000
- Issue date Apr 26, 2016
- Lam Research Corporation
- Eric H. Lenz
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods for verifying gas flow rates from a gas supply system into...
- Patent number 9,234,775
- Issue date Jan 12, 2016
- Lam Research Corporation
- Dean J. Larson
- G05 - CONTROLLING REGULATING
Information Patent Grant
High throughput cleaner chamber
- Patent number 9,117,870
- Issue date Aug 25, 2015
- Lam Research Corporation
- Eric H. Lenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlling plasma potential
- Patent number 9,111,724
- Issue date Aug 18, 2015
- Lam Research Corporation
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of particle adders when contacting a liquid meniscus ove...
- Patent number 8,997,684
- Issue date Apr 7, 2015
- Lam Research Corporation
- Enrico Magni
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Airflow management for low particulate count in a process tool
- Patent number 8,893,642
- Issue date Nov 25, 2014
- Lam Research Corporation
- Eric H. Lenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus including showerhead electrode and heater for plasma proc...
- Patent number 8,846,539
- Issue date Sep 30, 2014
- Lam Research Corporation
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus including gas distribution member supplying process gas a...
- Patent number 8,822,345
- Issue date Sep 2, 2014
- Lam Research Corporation
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for physical confinement of a liquid meniscus...
- Patent number 8,813,764
- Issue date Aug 26, 2014
- Lam Research Corporation
- Enrico Magni
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Sealed elastomer bonded Si electrodes and the like for reduced part...
- Patent number 8,789,493
- Issue date Jul 29, 2014
- Lam Research Corporation
- Daxing Ren
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Techniques for reducing arcing-related damage in a clamping ring of...
- Patent number 8,703,249
- Issue date Apr 22, 2014
- Lam Research Corporation
- Jose Tong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlling etch uniformity
- Patent number 8,674,255
- Issue date Mar 18, 2014
- Lam Research Corporation
- Eric Lenz
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas distribution system having fast gas switching capabilities
- Patent number 8,673,785
- Issue date Mar 18, 2014
- Lam Research Corporation
- Zhisong Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for physical confinement of a liquid meniscus...
- Patent number 8,580,045
- Issue date Nov 12, 2013
- Lam Research Corporation
- Enrico Magni
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate load and unload mechanisms for high throughput
- Patent number 8,562,272
- Issue date Oct 22, 2013
- Lam Research Corporation
- Eric H. Lenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier for reducing entrance and/or exit marks left by a substrate...
- Patent number 8,534,303
- Issue date Sep 17, 2013
- Lam Research Corporation
- Robert O'Donnell
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Reclaim chemistry
- Patent number 8,464,736
- Issue date Jun 18, 2013
- Lam Research Corporation
- Eric Lenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast gas switching plasma processing apparatus
- Patent number 8,343,876
- Issue date Jan 1, 2013
- Lam Research Corporation
- S. M. Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus including gas distribution member supplying process gas a...
- Patent number 8,317,968
- Issue date Nov 27, 2012
- Lam Research Corporation
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction of particle contamination produced by moving mechanisms i...
- Patent number 8,282,698
- Issue date Oct 9, 2012
- Lam Research Corporation
- Eric H. Lenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma confinement by use of preferred RF return path
- Patent number RE43508
- Issue date Jul 17, 2012
- Lam Research Corporation
- Eric H. Lenz
- 156 - Adhesive bonding and miscellaneous chemical manufacture
Information Patent Grant
Carrier for reducing entrance and/or exit marks left by a substrate...
- Patent number 8,105,441
- Issue date Jan 31, 2012
- Lam Research Corporation
- Robert O'Donnell
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatuses for adjusting electrode gap in capacitively-coupled RF...
- Patent number 8,080,760
- Issue date Dec 20, 2011
- Lam Research Corporation
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly with dielectric material and/or cavity...
- Patent number 8,000,082
- Issue date Aug 16, 2011
- Lam Research Corporation
- Rajinder Dhindsa
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Carrier for reducing entrance and/or exit marks left by a substrate...
- Patent number 7,946,303
- Issue date May 24, 2011
- Lam Research Corporation
- Robert O'Donnell
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
BACKSIDE DEPOSITION PREVENTION ON SUBSTRATES
- Publication number 20240200191
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Christopher GAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVABLE SHOWERHEAD FACEPLATE FOR SEMICONDUCTOR PROCESSING TOOLS
- Publication number 20230279547
- Publication date Sep 7, 2023
- LAM RESEARCH CORPORATION
- Manjesh Shankarnarayana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXCLUSION RING WITH FLOW PATHS FOR EXHAUSTING WAFER EDGE GAS
- Publication number 20230040885
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Vinayakaraddy Gulabal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING CHUCKS FEATURING RECESSED REGIONS NEAR OUT...
- Publication number 20230010049
- Publication date Jan 12, 2023
- LAM RESEARCH CORPORATION
- Ravi Vellanki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BACKSIDE REACTIVE INHIBITION GAS
- Publication number 20220415711
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Gang LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTANTIALLY CARBON-FREE MOLYBDENUM-CONTAINING AND TUNGSTEN-CONTAI...
- Publication number 20220298624
- Publication date Sep 22, 2022
- Kyle Jordan Blakeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL DEPOSITION
- Publication number 20220290300
- Publication date Sep 15, 2022
- LAM RESEARCH CORPORATION
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE EXCLUSION CONTROL
- Publication number 20210375591
- Publication date Dec 2, 2021
- LAM RESEARCH CORPORATION
- Anand Chandrashekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR MANIFOLD WITH INTEGRATED VAPOR CONCENTRATION SENSOR
- Publication number 20170342562
- Publication date Nov 30, 2017
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DELIVERY METHOD AND APPARATUS FOR SOLID AND LIQUID PRECURSORS
- Publication number 20170335450
- Publication date Nov 23, 2017
- LAM RESEARCH CORPORATION
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SUPPORT PEDESTAL WITH WAFER ANTI-SLIP AND ANTI-ROTATION FEATURES
- Publication number 20170170051
- Publication date Jun 15, 2017
- LAM RESEARCH CORPORATION
- Peter Krotov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORROSION RESISTANT GAS DISTRIBUTION MANIFOLD WITH THERMALLY CONTRO...
- Publication number 20160343595
- Publication date Nov 24, 2016
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR MEASURING ENTRAINED VAPOR
- Publication number 20160097127
- Publication date Apr 7, 2016
- LAM RESEARCH CORPORATION
- Eric H. Lenz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AIRFLOW MANAGEMENT FOR LOW PARTICULATE COUNT IN A PROCESS TOOL
- Publication number 20150040757
- Publication date Feb 12, 2015
- LAM RESEARCH CORPORATION
- Eric H. Lenz
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method and Apparatus for Physical Confinement of a Liquid Meniscus...
- Publication number 20140041226
- Publication date Feb 13, 2014
- LAM RESEARCH CORPORATION
- Enrico Magni
- B08 - CLEANING
Information Patent Application
METHODS FOR VERIFYING GAS FLOW RATES FROM A GAS SUPPLY SYSTEM INTO...
- Publication number 20140033828
- Publication date Feb 6, 2014
- LAM RESEARCH CORPORATION
- Dean J. Larson
- G01 - MEASURING TESTING
Information Patent Application
Techniques for reducing arcing-related damage in a clamping ring of...
- Publication number 20130342951
- Publication date Dec 26, 2013
- Jose Tong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PREVENTION OF PARTICLE ADDERS WHEN CONTACTING A LIQUID MENISCUS OVE...
- Publication number 20130084392
- Publication date Apr 4, 2013
- Lam Research Corp.
- Enrico Magni
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS INCLUDING GAS DISTRIBUTION MEMBER SUPPLYING PROCESS GAS A...
- Publication number 20130065396
- Publication date Mar 14, 2013
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Reducing Substrate Pattern Collapse During...
- Publication number 20120260517
- Publication date Oct 18, 2012
- LAM RESEARCH CORPORATION
- Eric Lenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PHYSICAL CONFINEMENT OF A LIQUID MENISCUS...
- Publication number 20120240963
- Publication date Sep 27, 2012
- Lam Research Corp.
- Enrico Magni
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Carrier for Reducing Entrance and/or Exit Marks Left by a Substrate...
- Publication number 20120079698
- Publication date Apr 5, 2012
- LAM RESEARCH CORPORATION
- Robert O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST GAS SWITCHING PLASMA PROCESSING APPARATUS
- Publication number 20110281435
- Publication date Nov 17, 2011
- LAM RESEARCH CORPORATION
- S. M. Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCTION OF PARTICLE CONTAMINATION PRODUCED BY MOVING MECHANISMS I...
- Publication number 20110236159
- Publication date Sep 29, 2011
- LAM RESEARCH CORPORATION
- Eric H. Lenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRFLOW MANAGEMENT FOR LOW PARTICULATE COUNT IN A PROCESS TOOL
- Publication number 20110232771
- Publication date Sep 29, 2011
- LAM RESEARCH CORPORATION
- Eric H. Lenz
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE LOAD AND UNLOAD MECHANISMS FOR HIGH THROUGHPUT
- Publication number 20110200415
- Publication date Aug 18, 2011
- LAM RESEARCH CORPORATION
- Eric H. Lenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carrier for Reducing Entrance and/or Exit Marks Left by a Substrate...
- Publication number 20110197928
- Publication date Aug 18, 2011
- LAM RESEARCH CORPORATION
- Robert O'Donnell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Controlling Plasma Potential
- Publication number 20110024046
- Publication date Feb 3, 2011
- LAM RESEARCH CORPORATION
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Controlling Plasma Potential
- Publication number 20110024045
- Publication date Feb 3, 2011
- LAM RESEARCH CORPORATION
- Douglas Keil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Physical Confinement of a Liquid Meniscus...
- Publication number 20100300492
- Publication date Dec 2, 2010
- Lam Research Corp.
- Enrico Magni
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Eric H. Lenz

Person

Patents Grantslast 30 patents

Metal deposition

Wafer support pedestal with wafer anti-slip and anti-rotation features

Vapor delivery method and apparatus for solid and liquid precursors

Systems and methods for measuring entrained vapor

Method and apparatus for physical confinement of a liquid meniscus...

Airflow management for low particulate count in a process tool

Methods for verifying gas flow rates from a gas supply system into...

High throughput cleaner chamber

Apparatus and method for controlling plasma potential

Prevention of particle adders when contacting a liquid meniscus ove...

Airflow management for low particulate count in a process tool

Apparatus including showerhead electrode and heater for plasma proc...

Apparatus including gas distribution member supplying process gas a...

Method and apparatus for physical confinement of a liquid meniscus...

Sealed elastomer bonded Si electrodes and the like for reduced part...

Techniques for reducing arcing-related damage in a clamping ring of...

Apparatus and method for controlling etch uniformity

Gas distribution system having fast gas switching capabilities

Method and apparatus for physical confinement of a liquid meniscus...

Substrate load and unload mechanisms for high throughput

Carrier for reducing entrance and/or exit marks left by a substrate...

Reclaim chemistry

Fast gas switching plasma processing apparatus

Apparatus including gas distribution member supplying process gas a...

Reduction of particle contamination produced by moving mechanisms i...

Plasma confinement by use of preferred RF return path

Carrier for reducing entrance and/or exit marks left by a substrate...

Apparatuses for adjusting electrode gap in capacitively-coupled RF...

Electrostatic chuck assembly with dielectric material and/or cavity...

Carrier for reducing entrance and/or exit marks left by a substrate...

Patents Applicationslast 30 patents

BACKSIDE DEPOSITION PREVENTION ON SUBSTRATES

REMOVABLE SHOWERHEAD FACEPLATE FOR SEMICONDUCTOR PROCESSING TOOLS

EXCLUSION RING WITH FLOW PATHS FOR EXHAUSTING WAFER EDGE GAS

SEMICONDUCTOR PROCESSING CHUCKS FEATURING RECESSED REGIONS NEAR OUT...

BACKSIDE REACTIVE INHIBITION GAS

SUBSTANTIALLY CARBON-FREE MOLYBDENUM-CONTAINING AND TUNGSTEN-CONTAI...

METAL DEPOSITION

EDGE EXCLUSION CONTROL

VAPOR MANIFOLD WITH INTEGRATED VAPOR CONCENTRATION SENSOR

VAPOR DELIVERY METHOD AND APPARATUS FOR SOLID AND LIQUID PRECURSORS

WAFER SUPPORT PEDESTAL WITH WAFER ANTI-SLIP AND ANTI-ROTATION FEATURES

CORROSION RESISTANT GAS DISTRIBUTION MANIFOLD WITH THERMALLY CONTRO...

SYSTEMS AND METHODS FOR MEASURING ENTRAINED VAPOR

AIRFLOW MANAGEMENT FOR LOW PARTICULATE COUNT IN A PROCESS TOOL

Method and Apparatus for Physical Confinement of a Liquid Meniscus...

METHODS FOR VERIFYING GAS FLOW RATES FROM A GAS SUPPLY SYSTEM INTO...

Techniques for reducing arcing-related damage in a clamping ring of...

PREVENTION OF PARTICLE ADDERS WHEN CONTACTING A LIQUID MENISCUS OVE...

APPARATUS INCLUDING GAS DISTRIBUTION MEMBER SUPPLYING PROCESS GAS A...

Apparatus and Method for Reducing Substrate Pattern Collapse During...

METHOD AND APPARATUS FOR PHYSICAL CONFINEMENT OF A LIQUID MENISCUS...

Carrier for Reducing Entrance and/or Exit Marks Left by a Substrate...

FAST GAS SWITCHING PLASMA PROCESSING APPARATUS

REDUCTION OF PARTICLE CONTAMINATION PRODUCED BY MOVING MECHANISMS I...

AIRFLOW MANAGEMENT FOR LOW PARTICULATE COUNT IN A PROCESS TOOL

SUBSTRATE LOAD AND UNLOAD MECHANISMS FOR HIGH THROUGHPUT

Carrier for Reducing Entrance and/or Exit Marks Left by a Substrate...

Apparatus and Method for Controlling Plasma Potential

Apparatus and Method for Controlling Plasma Potential

Method and Apparatus for Physical Confinement of a Liquid Meniscus...