Eric Hill

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reactor system and method to reduce residue buildup during a film d...
- Patent number 12,043,899
- Issue date Jul 23, 2024
- ASM IP Holding B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 12,040,217
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 11,587,821
- Issue date Feb 21, 2023
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor system and method to reduce residue buildup during a film d...
- Patent number 11,390,950
- Issue date Jul 19, 2022
- ASM IP Holding B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-clean chamber and process with substrate tray for changing subs...
- Patent number 11,264,255
- Issue date Mar 1, 2022
- ASM IP Holding B.V.
- John Tolle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor system for sublimation of pre-clean byproducts and method t...
- Patent number 11,053,585
- Issue date Jul 6, 2021
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-phase reactor and system having exhaust plenum and components t...
- Patent number 11,015,245
- Issue date May 25, 2021
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid lift pin
- Patent number 11,018,047
- Issue date May 25, 2021
- ASM IP Holding B.V.
- Uday Kiran Rokkam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for in situ formation of gas-phase compounds
- Patent number 10,787,741
- Issue date Sep 29, 2020
- ASM IP Holding B.V.
- John Tolle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 10,770,336
- Issue date Sep 8, 2020
- ASM IP Holding B.V.
- Eric Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor system for sublimation of pre-clean byproducts and method t...
- Patent number 10,519,541
- Issue date Dec 31, 2019
- ASM IP Holdings, B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-clean chamber and process with substrate tray for changing subs...
- Patent number 10,373,850
- Issue date Aug 6, 2019
- ASM IP Holding B.V.
- John Tolle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor system for sublimation of pre-clean byproducts and method t...
- Patent number 10,053,774
- Issue date Aug 21, 2018
- ASM IP Holding B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for in situ formation of gas-phase compounds
- Patent number 9,890,456
- Issue date Feb 13, 2018
- ASM IP Holding B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma pre-clean module and process
- Patent number 9,514,927
- Issue date Dec 6, 2016
- ASM IP Holding B.V.
- John Tolle
- B08 - CLEANING
Information Patent Grant
Plasma pre-clean module and process
- Patent number 9,299,557
- Issue date Mar 29, 2016
- ASM IP Holding B.V.
- John Tolle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for mass flow controller verification
- Patent number 9,169,975
- Issue date Oct 27, 2015
- ASM IP Holding B.V.
- Michael Christopher Sarin
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Load lock having secondary isolation chamber
- Patent number 8,927,435
- Issue date Jan 6, 2015
- ASM America, Inc.
- Ravinder K. Aggarwal
- C30 - CRYSTAL GROWTH
Information Patent Grant
Load lock having secondary isolation chamber
- Patent number 8,440,048
- Issue date May 14, 2013
- ASM America, Inc.
- Ravinder Aggarwal
- C30 - CRYSTAL GROWTH
Information Patent Grant
Calibration of temperature control system for semiconductor process...
- Patent number 8,047,706
- Issue date Nov 1, 2011
- ASM America, Inc.
- Matthew G. Goodman
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME
- Publication number 20230163019
- Publication date May 25, 2023
- ASM IP HOLDING B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDU...
- Publication number 20220367175
- Publication date Nov 17, 2022
- ASM IP HOLDING B.V.
- Xing Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM D...
- Publication number 20220307139
- Publication date Sep 29, 2022
- ASM IP HOLDING B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME
- Publication number 20200365444
- Publication date Nov 19, 2020
- ASM IP HOLDING B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD T...
- Publication number 20200102648
- Publication date Apr 2, 2020
- ASM IP HOLDING B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-CLEAN CHAMBER AND PROCESS WITH SUBSTRATE TRAY FOR CHANGING SUBS...
- Publication number 20190333793
- Publication date Oct 31, 2019
- ASM IP HOLDING B.V.
- JOHN TOLLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID LIFT PIN
- Publication number 20190229008
- Publication date Jul 25, 2019
- ASM IP HOLDING B.V.
- Uday Kiran Rokkam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME
- Publication number 20190051555
- Publication date Feb 14, 2019
- ASM IP HOLDING B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDU...
- Publication number 20190019670
- Publication date Jan 17, 2019
- ASM IP HOLDING B.V.
- Xing Lin
- B08 - CLEANING
Information Patent Application
REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD T...
- Publication number 20180312968
- Publication date Nov 1, 2018
- ASM IP HOLDING B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM D...
- Publication number 20180195174
- Publication date Jul 12, 2018
- ASM IP HOLDING B.V.
- Hyeongeu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR IN SITU FORMATION OF GAS-PHASE COMPOUNDS
- Publication number 20180127876
- Publication date May 10, 2018
- ASM IP HOLDING B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD T...
- Publication number 20160362783
- Publication date Dec 15, 2016
- ASM IP HOLDING B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-CLEAN CHAMBER AND PROCESS WITH SUBSTRATE TRAY FOR CHANGING SUBS...
- Publication number 20160265112
- Publication date Sep 15, 2016
- ASM IP HOLDING B.V.
- JOHN TOLLE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PRE-CLEAN MODULE AND PROCESS
- Publication number 20160254137
- Publication date Sep 1, 2016
- ASM IP HOLDING B.V.
- John Tolle
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND SYSTEM FOR IN SITU FORMATION OF GAS-PHASE COMPOUNDS
- Publication number 20160051964
- Publication date Feb 25, 2016
- ASM IP HOLDING B.V.
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS-PHASE REACTOR AND SYSTEM HAVING EXHAUST PLENUM AND COMPONENTS T...
- Publication number 20150267301
- Publication date Sep 24, 2015
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVABLE SUBSTRATE TRAY AND ASSEMBLY AND REACTOR INCLUDING SAME
- Publication number 20150267295
- Publication date Sep 24, 2015
- ASM IP HOLDING B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PRE-CLEAN MODULE AND PROCESS
- Publication number 20150270122
- Publication date Sep 24, 2015
- ASM IP HOLDING B.V.
- John Tolle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR MASS FLOW CONTROLLER VERIFICATION
- Publication number 20140060147
- Publication date Mar 6, 2014
- ASM IP HOLDING B.V.
- Michael Christopher Sarin
- G01 - MEASURING TESTING
Information Patent Application
LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER
- Publication number 20130239879
- Publication date Sep 19, 2013
- ASM AMERICA, INC
- Ravinder K. Aggarwal
- C30 - CRYSTAL GROWTH
Information Patent Application
LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER
- Publication number 20100190343
- Publication date Jul 29, 2010
- ASM AMERICA, INC
- Ravinder Aggarwal
- C30 - CRYSTAL GROWTH
Information Patent Application
CALIBRATION OF TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR PROCESS...
- Publication number 20090147819
- Publication date Jun 11, 2009
- ASM AMERICA, INC
- MATTHEW G. GOODMAN
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Reactor system and method to reduce residue buildup during a film d...

Substrate lift mechanism and reactor including same

Substrate lift mechanism and reactor including same

Reactor system and method to reduce residue buildup during a film d...

Pre-clean chamber and process with substrate tray for changing subs...

Reactor system for sublimation of pre-clean byproducts and method t...

Gas-phase reactor and system having exhaust plenum and components t...

Hybrid lift pin

Method and system for in situ formation of gas-phase compounds

Substrate lift mechanism and reactor including same

Reactor system for sublimation of pre-clean byproducts and method t...

Pre-clean chamber and process with substrate tray for changing subs...

Reactor system for sublimation of pre-clean byproducts and method t...

Method and system for in situ formation of gas-phase compounds

Plasma pre-clean module and process

Plasma pre-clean module and process

Systems and methods for mass flow controller verification

Load lock having secondary isolation chamber

Load lock having secondary isolation chamber

Calibration of temperature control system for semiconductor process...

Patents Applicationslast 30 patents

SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME

APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDU...

REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM D...

SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME

REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD T...

PRE-CLEAN CHAMBER AND PROCESS WITH SUBSTRATE TRAY FOR CHANGING SUBS...

HYBRID LIFT PIN

SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME

APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDU...

REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD T...

REACTOR SYSTEM AND METHOD TO REDUCE RESIDUE BUILDUP DURING A FILM D...

METHOD AND SYSTEM FOR IN SITU FORMATION OF GAS-PHASE COMPOUNDS

REACTOR SYSTEM FOR SUBLIMATION OF PRE-CLEAN BYPRODUCTS AND METHOD T...

PRE-CLEAN CHAMBER AND PROCESS WITH SUBSTRATE TRAY FOR CHANGING SUBS...

PLASMA PRE-CLEAN MODULE AND PROCESS

METHOD AND SYSTEM FOR IN SITU FORMATION OF GAS-PHASE COMPOUNDS

GAS-PHASE REACTOR AND SYSTEM HAVING EXHAUST PLENUM AND COMPONENTS T...

REMOVABLE SUBSTRATE TRAY AND ASSEMBLY AND REACTOR INCLUDING SAME

PLASMA PRE-CLEAN MODULE AND PROCESS

SYSTEMS AND METHODS FOR MASS FLOW CONTROLLER VERIFICATION

LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER

LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER

CALIBRATION OF TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR PROCESS...