Eric P. Solecky

Person

Hyde Park, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology management
- Patent number 9,652,729
- Issue date May 16, 2017
- International Business Machines Corporation
- William K. Hoffman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems involving measuring complex dimensions of silic...
- Patent number 8,855,401
- Issue date Oct 7, 2014
- International Business Machines Corporation
- Charles N. Archie
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement tool monitoring using fleet measurement precision and t...
- Patent number 8,467,993
- Issue date Jun 18, 2013
- International Business Machines Corporation
- Charles Archie
- G05 - CONTROLLING REGULATING
Information Patent Grant
SEM repair for sub-optimal features
- Patent number 8,450,120
- Issue date May 28, 2013
- International Business Machines Corporation
- Stuart A. Sieg
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
SEM repair for sub-optimal features
- Patent number 8,211,717
- Issue date Jul 3, 2012
- International Business Machines Corporation
- Stuart A. Sieg
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Automated dynamic metrology sampling system and method for process...
- Patent number 7,881,891
- Issue date Feb 1, 2011
- International Business Machines Corporation
- Javier A. Ayala
- G05 - CONTROLLING REGULATING
Information Patent Grant
Quantification of adsorbed molecular contaminant using thin film me...
- Patent number 7,831,395
- Issue date Nov 9, 2010
- International Business Machines Corporation
- Lin Zhou
- G01 - MEASURING TESTING
Information Patent Grant
Metrology tool recipe validator using best known methods
- Patent number 7,716,009
- Issue date May 11, 2010
- International Business Machines Corporation
- Ejaj Ahmed
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Structure for reducing prior level edge interference with critical...
- Patent number 7,700,946
- Issue date Apr 20, 2010
- International Business Machines Corporation
- Alexander L. Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and structure for reducing prior level edge interference wit...
- Patent number 7,645,620
- Issue date Jan 12, 2010
- International Business Machines Corporation
- Alexander L. Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement system fleet optimization
- Patent number 7,571,070
- Issue date Aug 4, 2009
- International Business Machines Corporation
- Eric P. Solecky
- G01 - MEASURING TESTING
Information Patent Grant
Determining root cause of matching problem and/or fleet measurement...
- Patent number 7,532,999
- Issue date May 12, 2009
- International Business Machines Corporation
- Charles N. Archie
- G01 - MEASURING TESTING
Information Patent Grant
Automated dynamic metrology sampling system and method for process...
- Patent number 7,487,054
- Issue date Feb 3, 2009
- International Business Machines Corporation
- Javier A. Ayala
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Charged beam apparatus and method that provide charged beam aerial...
- Patent number 7,485,859
- Issue date Feb 3, 2009
- International Business Machines Corporation
- Lin Zhou
- G01 - MEASURING TESTING
Information Patent Grant
Structure, system and method for dimensionally unstable layer dimen...
- Patent number 7,479,396
- Issue date Jan 20, 2009
- International Business Machines Corporation
- Lin Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determining fleet matching problem and root cause issue for measure...
- Patent number 7,467,063
- Issue date Dec 16, 2008
- International Business Machines Corporation
- Charles N. Archie
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of critical dimension and quantification of electron be...
- Patent number 7,397,252
- Issue date Jul 8, 2008
- International Business Machines Corporation
- Lin Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantification of adsorbed molecular contaminant using thin film me...
- Patent number 7,369,947
- Issue date May 6, 2008
- International Business Machines, Corporation
- Lin Zhou
- G01 - MEASURING TESTING
Information Patent Grant
Method for monitoring lateral encroachment of spacer process on a C...
- Patent number 7,358,130
- Issue date Apr 15, 2008
- International Business Machines Corporation
- Bachir Dirahoui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement system optimization
- Patent number 7,353,128
- Issue date Apr 1, 2008
- International Business Machines Corporation
- Charles N. Archie
- G01 - MEASURING TESTING
Information Patent Grant
Determining fleet matching problem and root cause issue for measure...
- Patent number 7,340,374
- Issue date Mar 4, 2008
- International Business Machines Corporation
- Charles N. Archie
- G01 - MEASURING TESTING
Information Patent Grant
Metrology tool recipe validator using best known methods
- Patent number 7,305,320
- Issue date Dec 4, 2007
- International Business Machines Corporation
- Ejaj Ahmed
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Metrology tool error log analysis methodology and system
- Patent number 7,187,993
- Issue date Mar 6, 2007
- International Business Machines Corporation
- Sarah A. Kay
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method for monitoring lateral encroachment of spacer process on a C...
- Patent number 7,105,398
- Issue date Sep 12, 2006
- International Business Machines Corporation
- Bachir Dirahoui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology tool error log analysis methodology and system
- Patent number 7,065,425
- Issue date Jun 20, 2006
- Internaitonal Business Machines Corporation
- Sarah A. Kay
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus and method for characterizing features at small dimensions
- Patent number 6,789,033
- Issue date Sep 7, 2004
- International Business Machines Corporation
- Eric P. Solecky
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Wafer metrology structure
- Patent number 6,407,396
- Issue date Jun 18, 2002
- International Business Machines Corporation
- Rebecca D. Mih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method characterizing a feature using measurement imaging tool
- Patent number 6,185,323
- Issue date Feb 6, 2001
- International Business Machines Corporation
- Charles N. Archie
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for astigmatism correction in charged particle beam systems
- Patent number 6,025,600
- Issue date Feb 15, 2000
- International Business Machines Corporation
- Charles N. Archie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for critical dimension and tool resolution det...
- Patent number 5,969,273
- Issue date Oct 19, 1999
- International Business Machines Corporation
- Charles N. Archie
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Metrology Management
- Publication number 20130110448
- Publication date May 2, 2013
- International Business Machines Corporation
- William K. Hoffman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEM REPAIR FOR SUB-OPTIMAL FEATURES
- Publication number 20120187294
- Publication date Jul 26, 2012
- International Business Machines Corporation
- Stuart A. Sieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEM REPAIR FOR SUB-OPTIMAL FEATURES
- Publication number 20120190134
- Publication date Jul 26, 2012
- International Business Machines Corporation
- Stuart A. Sieg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Systems Involving Measuring Complex Dimensions of Silic...
- Publication number 20120106824
- Publication date May 3, 2012
- International Business Machines Corporation
- Charles N. Archie
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Measurement Tool Monitoring Using Fleet Measurement Precision and T...
- Publication number 20110172958
- Publication date Jul 14, 2011
- International Business Machines Corporation
- Charles Archie
- G05 - CONTROLLING REGULATING
Information Patent Application
AUTOMATED DYNAMIC METROLOGY SAMPLING SYSTEM AND METHOD FOR PROCESS...
- Publication number 20090119049
- Publication date May 7, 2009
- Javier A. Ayala
- G05 - CONTROLLING REGULATING
Information Patent Application
CHARGED BEAM APPARATUS AND METHOD THAT PROVIDE CHARGED BEAM AERIAL...
- Publication number 20080258055
- Publication date Oct 23, 2008
- International Business Machines Corporation
- Lin Zhou
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND STRUCTURE FOR REDUCING PRIOR LEVEL EDGE INTERFERENCE WIT...
- Publication number 20080173869
- Publication date Jul 24, 2008
- International Business Machines Corporation
- Alexander L. Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
QUANTIFICATION OF ADSORBED MOLECULAR CONTAMINANT USING THIN FILM ME...
- Publication number 20080154519
- Publication date Jun 26, 2008
- International Business Machines Corporation
- Lin Zhou
- G01 - MEASURING TESTING
Information Patent Application
MASK LAYER TRIM METHOD USING CHARGED PARTICLE BEAM EXPOSURE
- Publication number 20080138986
- Publication date Jun 12, 2008
- International Business Machines Corporation
- Lin Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT SYSTEM FLEET OPTIMIZATION
- Publication number 20080114566
- Publication date May 15, 2008
- International Business Machines Corporation
- Eric P. Solecky
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT OF CRITICAL DIMENSION AND QUANTIFICATION OF ELECTRON BE...
- Publication number 20080067373
- Publication date Mar 20, 2008
- International Business Machines Corporation
- Lin Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY TOOL RECIPE VALIDATOR USING BEST KNOWN METHODS
- Publication number 20080065696
- Publication date Mar 13, 2008
- International Business Machines Corporation
- Ejaj Ahmed
- G05 - CONTROLLING REGULATING
Information Patent Application
DETERMINING FLEET MATCHING PROBLEM AND ROOT CAUSE ISSUE FOR MEASURE...
- Publication number 20080033692
- Publication date Feb 7, 2008
- Charles N. Archie
- G01 - MEASURING TESTING
Information Patent Application
QUANTIFICATION OF ADSORBED MOLECULAR CONTAMINANT USING THIN FILM ME...
- Publication number 20070283757
- Publication date Dec 13, 2007
- International Business Machines Corporation
- Lin Zhou
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY TOOL RECIPE VALIDATOR USING BEST KNOWN METHODS
- Publication number 20070192056
- Publication date Aug 16, 2007
- International Business Machines Corporation
- Ejaj Ahmed
- G05 - CONTROLLING REGULATING
Information Patent Application
MEASUREMENT SYSTEM OPTIMIZATION
- Publication number 20070192049
- Publication date Aug 16, 2007
- International Business Machines Corporation
- Charles N. Archie
- G01 - MEASURING TESTING
Information Patent Application
Structure, system and method for dimensionally unstable layer dimen...
- Publication number 20070124108
- Publication date May 31, 2007
- International Business Machines Corporation
- Lin Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND STRUCTURE FOR REDUCING PRIOR LEVEL EDGE INTERFERENCE WIT...
- Publication number 20070082417
- Publication date Apr 12, 2007
- International Business Machines Corporation
- Alexander L. Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metrology tool error log analysis methodology and system
- Publication number 20060293778
- Publication date Dec 28, 2006
- International Business Machines Corporation
- Sarah A. Kay
- G05 - CONTROLLING REGULATING
Information Patent Application
AUTOMATED DYNAMIC METROLOGY SAMPLING SYSTEM ADN METHOD FOR PROCESS...
- Publication number 20060259279
- Publication date Nov 16, 2006
- International Business Machines Corporation
- Javier A. Ayala
- G05 - CONTROLLING REGULATING
Information Patent Application
Method for monitoring lateral encroachment of spacer process on a C...
- Publication number 20060252197
- Publication date Nov 9, 2006
- International Business Machine Corporation
- Bachir Dirahoui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Determining root cause of matching problem and/or fleet measurement...
- Publication number 20060195295
- Publication date Aug 31, 2006
- International Business Machines Corporation
- Charles N. Archie
- G01 - MEASURING TESTING
Information Patent Application
Determining fleet matching problem and root cause issue for measure...
- Publication number 20060195294
- Publication date Aug 31, 2006
- Charles N. Archie
- G01 - MEASURING TESTING
Information Patent Application
Method for monitoring lateral encroachment of spacer process on a C...
- Publication number 20060055393
- Publication date Mar 16, 2006
- International Business Machines Corporation
- Bachir Dirahoui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for characterizing features at small dimensions
- Publication number 20030101013
- Publication date May 29, 2003
- International Business Machines Corporation
- Eric P. Solecky
- G06 - COMPUTING CALCULATING COUNTING

Eric P. Solecky

Person

Patents Grantslast 30 patents

Metrology management

Methods and systems involving measuring complex dimensions of silic...

Measurement tool monitoring using fleet measurement precision and t...

SEM repair for sub-optimal features

SEM repair for sub-optimal features

Automated dynamic metrology sampling system and method for process...

Quantification of adsorbed molecular contaminant using thin film me...

Metrology tool recipe validator using best known methods

Structure for reducing prior level edge interference with critical...

Method and structure for reducing prior level edge interference wit...

Measurement system fleet optimization

Determining root cause of matching problem and/or fleet measurement...

Automated dynamic metrology sampling system and method for process...

Charged beam apparatus and method that provide charged beam aerial...

Structure, system and method for dimensionally unstable layer dimen...

Determining fleet matching problem and root cause issue for measure...

Measurement of critical dimension and quantification of electron be...

Quantification of adsorbed molecular contaminant using thin film me...

Method for monitoring lateral encroachment of spacer process on a C...

Measurement system optimization

Determining fleet matching problem and root cause issue for measure...

Metrology tool recipe validator using best known methods

Metrology tool error log analysis methodology and system

Method for monitoring lateral encroachment of spacer process on a C...

Metrology tool error log analysis methodology and system

Apparatus and method for characterizing features at small dimensions

Wafer metrology structure

Method characterizing a feature using measurement imaging tool

Method for astigmatism correction in charged particle beam systems

Method and apparatus for critical dimension and tool resolution det...

Patents Applicationslast 30 patents

Metrology Management

SEM REPAIR FOR SUB-OPTIMAL FEATURES

SEM REPAIR FOR SUB-OPTIMAL FEATURES

Methods and Systems Involving Measuring Complex Dimensions of Silic...

Measurement Tool Monitoring Using Fleet Measurement Precision and T...

AUTOMATED DYNAMIC METROLOGY SAMPLING SYSTEM AND METHOD FOR PROCESS...

CHARGED BEAM APPARATUS AND METHOD THAT PROVIDE CHARGED BEAM AERIAL...

METHOD AND STRUCTURE FOR REDUCING PRIOR LEVEL EDGE INTERFERENCE WIT...

QUANTIFICATION OF ADSORBED MOLECULAR CONTAMINANT USING THIN FILM ME...

MASK LAYER TRIM METHOD USING CHARGED PARTICLE BEAM EXPOSURE

MEASUREMENT SYSTEM FLEET OPTIMIZATION

MEASUREMENT OF CRITICAL DIMENSION AND QUANTIFICATION OF ELECTRON BE...

METROLOGY TOOL RECIPE VALIDATOR USING BEST KNOWN METHODS

DETERMINING FLEET MATCHING PROBLEM AND ROOT CAUSE ISSUE FOR MEASURE...

QUANTIFICATION OF ADSORBED MOLECULAR CONTAMINANT USING THIN FILM ME...

METROLOGY TOOL RECIPE VALIDATOR USING BEST KNOWN METHODS

MEASUREMENT SYSTEM OPTIMIZATION

Structure, system and method for dimensionally unstable layer dimen...

METHOD AND STRUCTURE FOR REDUCING PRIOR LEVEL EDGE INTERFERENCE WIT...

Metrology tool error log analysis methodology and system

AUTOMATED DYNAMIC METROLOGY SAMPLING SYSTEM ADN METHOD FOR PROCESS...

Method for monitoring lateral encroachment of spacer process on a C...

Determining root cause of matching problem and/or fleet measurement...

Determining fleet matching problem and root cause issue for measure...

Method for monitoring lateral encroachment of spacer process on a C...

Apparatus and method for characterizing features at small dimensions