Eric R. Cobb

Person

Danvers, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature controlled ion source
- Patent number 10,262,833
- Issue date Apr 16, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled ion source
- Patent number 9,859,098
- Issue date Jan 2, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for processing a substrate
- Patent number 9,093,372
- Issue date Jul 28, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Technique for processing a substrate
- Patent number 9,064,795
- Issue date Jun 23, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for improving extracted ion beam quality using high-tran...
- Patent number 8,466,431
- Issue date Jun 18, 2013
- Varian Semiconductor Equipment Associates, Inc.
- James S. Buff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directional gas injection for an ion source cathode assembly
- Patent number 8,263,944
- Issue date Sep 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- John Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indirectly heated cathode clamp system and method
- Patent number 7,887,034
- Issue date Feb 15, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Stephen Krause
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Ion source cleaning method and apparatus
- Patent number 7,888,662
- Issue date Feb 15, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for providing ion source feed materials
- Patent number 7,655,932
- Issue date Feb 2, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Technique for improving performance and extending lifetime of indir...
- Patent number 7,491,947
- Issue date Feb 17, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Eric R. Cobb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer charge monitoring
- Patent number 7,476,877
- Issue date Jan 13, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Source arc chamber for ion implanter having repeller electrode moun...
- Patent number 7,102,139
- Issue date Sep 5, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas flow restricting cathode system for ion implanter and related m...
- Patent number 6,984,831
- Issue date Jan 10, 2006
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Temperature Controlled Ion Source
- Publication number 20180090297
- Publication date Mar 29, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Controlled Ion Source
- Publication number 20170178857
- Publication date Jun 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Scott C. Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique For Processing A Substrate
- Publication number 20150179455
- Publication date Jun 25, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIFETIME ION SOURCE
- Publication number 20150034837
- Publication date Feb 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE FOR PROCESSING A SUBSTRATE
- Publication number 20130260544
- Publication date Oct 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUE FOR PROCESSING A SUBSTRATE
- Publication number 20130260543
- Publication date Oct 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRAN...
- Publication number 20100200768
- Publication date Aug 12, 2010
- Varian Semiconductor Equipment Associates, Inc.
- JAMES BUFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY
- Publication number 20100155619
- Publication date Jun 24, 2010
- Varian Semiconductor Equipment Associates Inc.
- John Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE CLEANING METHOD AND APPARATUS
- Publication number 20090314951
- Publication date Dec 24, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROVIDING ION SOURCE FEED MATERIALS
- Publication number 20080169427
- Publication date Jul 17, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. HATEM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Indirectly heated cathode clamp system and method
- Publication number 20080072413
- Publication date Mar 27, 2008
- Stephen Krause
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer charge monitoring
- Publication number 20070187615
- Publication date Aug 16, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for providing an inductively coupled radio frequency plas...
- Publication number 20070137576
- Publication date Jun 21, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for improving performance and extending lifetime of induc...
- Publication number 20070085021
- Publication date Apr 19, 2007
- Varian Semiconductor Equipment Associates, Inc.
- Eric R. Cobb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOURCE ARC CHAMBER FOR ION IMPLANTER HAVING REPELLER ELECTRODE MOUN...
- Publication number 20060163489
- Publication date Jul 27, 2006
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas flow restricting cathode system for ion implanter and related m...
- Publication number 20050194550
- Publication date Sep 8, 2005
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS

Eric R. Cobb

Person

Patents Grantslast 30 patents

Temperature controlled ion source

Temperature controlled ion source

Technique for processing a substrate

Technique for processing a substrate

Techniques for improving extracted ion beam quality using high-tran...

Directional gas injection for an ion source cathode assembly

Indirectly heated cathode clamp system and method

Ion source cleaning method and apparatus

Techniques for providing ion source feed materials

Technique for improving performance and extending lifetime of indir...

Wafer charge monitoring

Source arc chamber for ion implanter having repeller electrode moun...

Gas flow restricting cathode system for ion implanter and related m...

Patents Applicationslast 30 patents

Temperature Controlled Ion Source

Temperature Controlled Ion Source

Technique For Processing A Substrate

LIFETIME ION SOURCE

TECHNIQUE FOR PROCESSING A SUBSTRATE

TECHNIQUE FOR PROCESSING A SUBSTRATE

TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRAN...

DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY

ION SOURCE CLEANING METHOD AND APPARATUS

TECHNIQUES FOR PROVIDING ION SOURCE FEED MATERIALS

Indirectly heated cathode clamp system and method

Wafer charge monitoring

Technique for providing an inductively coupled radio frequency plas...

Technique for improving performance and extending lifetime of induc...

SOURCE ARC CHAMBER FOR ION IMPLANTER HAVING REPELLER ELECTRODE MOUN...

Gas flow restricting cathode system for ion implanter and related m...