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Eric R. Dickey
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Northfield, MN, US
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Patents Grants
last 30 patents
Information
Patent Grant
High voltage, low pressure plasma enhanced atomic layer deposition
Patent number
11,935,759
Issue date
Mar 19, 2024
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low voltage embedded memory having conductive oxide and electrode s...
Patent number
9,647,208
Issue date
May 9, 2017
Intel Corporation
Elijah V. Karpov
G11 - INFORMATION STORAGE
Information
Patent Grant
Atomic layer deposition method utilizing multiple precursor zones f...
Patent number
9,469,901
Issue date
Oct 18, 2016
LOTUS APPLIED TECHONOLOGY, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma generation for thin film deposition on flexible substrates
Patent number
9,435,028
Issue date
Sep 6, 2016
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate transport mechanism contacting a single side of a flexibl...
Patent number
9,297,076
Issue date
Mar 29, 2016
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mixed metal-silicon-oxide barriers
Patent number
9,263,359
Issue date
Feb 16, 2016
Lotus Applied Technology, LLC
Eric R. Dickey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer deposition method for coating flexible substrates
Patent number
9,238,868
Issue date
Jan 19, 2016
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low voltage embedded memory having conductive oxide and electrode s...
Patent number
9,231,204
Issue date
Jan 5, 2016
Intel Corporation
Elijah V. Karpov
G11 - INFORMATION STORAGE
Information
Patent Grant
Electrically- and chemically-active adlayers for plasma electrodes
Patent number
9,133,546
Issue date
Sep 15, 2015
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Inhibiting excess precursor transport between separate precursor zo...
Patent number
8,637,117
Issue date
Jan 28, 2014
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Oxygen radical generation for radical-enhanced thin film deposition
Patent number
8,637,123
Issue date
Jan 28, 2014
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition system utilizing multiple precursor zones f...
Patent number
8,202,366
Issue date
Jun 19, 2012
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Radical-enhanced atomic layer deposition system and method
Patent number
8,187,679
Issue date
May 29, 2012
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition system for coating flexible substrates
Patent number
8,137,464
Issue date
Mar 20, 2012
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fabrication of composite materials using atomic layer deposition
Patent number
7,923,068
Issue date
Apr 12, 2011
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
TFEL devices having insulating layers
Patent number
6,358,632
Issue date
Mar 19, 2002
Planar Systems, Inc.
Eric R. Dickey
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Geometries and configurations for magnetron sputtering apparatus
Patent number
5,879,519
Issue date
Mar 9, 1999
Optical Coating Laboratory, Inc.
James W. Seeser
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shielding for arc suppression in rotating magnetron sputtering systems
Patent number
5,725,746
Issue date
Mar 10, 1998
Viratec Thin Films, Inc.
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual substrate full color TFEL panel with insulator bridge structure
Patent number
5,712,528
Issue date
Jan 27, 1998
Planar Systems, Inc.
William A. Barrow
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Oxygen-doped thiogallate phosphor
Patent number
5,656,888
Issue date
Aug 12, 1997
Sey-Shing Sun
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Geometries and configurations for magnetron sputtering apparatus
Patent number
5,618,388
Issue date
Apr 8, 1997
Optical Coating Laboratory, Inc.
James W. Seeser
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
TFEL device with injection layer
Patent number
5,581,150
Issue date
Dec 3, 1996
Planar Systems, Inc.
Philip D. Rack
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Black electrode TFEL display
Patent number
5,504,389
Issue date
Apr 2, 1996
Planar Systems, Inc.
Eric R. Dickey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shielding for arc suppression in rotating magnetron sputtering systems
Patent number
5,470,452
Issue date
Nov 28, 1995
Viratec Thin Films, Inc.
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Four-layer antireflection coating for deposition in in-like DC sput...
Patent number
5,450,238
Issue date
Sep 12, 1995
Viratec Thin Films, Inc.
Erik J. Bjornard
G02 - OPTICS
Information
Patent Grant
DC reactively sputtered optical coatings including niobium oxide
Patent number
5,372,874
Issue date
Dec 13, 1994
Viratec Thin Films, Inc.
Eric R. Dickey
G02 - OPTICS
Information
Patent Grant
D.C. reactively sputtered antireflection coatings
Patent number
5,270,858
Issue date
Dec 14, 1993
Eric R. Dickey
G02 - OPTICS
Information
Patent Grant
Anode structures for magnetron sputtering apparatus
Patent number
5,106,474
Issue date
Apr 21, 1992
Viratec Thin Films, Inc.
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
DC reactively sputtered antireflection coatings
Patent number
5,105,310
Issue date
Apr 14, 1992
Viratec Thin Films, Inc.
Eric R. Dickey
G02 - OPTICS
Information
Patent Grant
Magnesium film reflectors
Patent number
5,022,726
Issue date
Jun 11, 1991
Viratec Thin Films, Inc.
Russell Austin
F24 - HEATING RANGES VENTILATING
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND SYSTEMS FOR SELECTIVE ATOMIC LAYER DEPOSITION
Publication number
20240368759
Publication date
Nov 7, 2024
Lotus Applied Technology, LLC
ERIC DICKEY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND SYSTEMS FOR INHIBITING PRECURSOR INTERACTIONS DURING RA...
Publication number
20240368760
Publication date
Nov 7, 2024
Lotus Applied Technology, LLC
ERIC DICKEY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH VOLTAGE, LOW PRESSURE PLASMA ENHANCED ATOMIC LAYER DEPOSITION
Publication number
20200350179
Publication date
Nov 5, 2020
Lotus Applied Technology, LLC
Eric R. Dickey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WATER-INSENSITIVE METHODS OF FORMING METAL OXIDE FILMS AND PRODUCTS...
Publication number
20200017970
Publication date
Jan 16, 2020
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION OF HIGH-QUALITY MIXED OXIDE BARRIER FILMS
Publication number
20170088951
Publication date
Mar 30, 2017
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MIXED METAL-SILICON-OXIDE BARRIERS
Publication number
20170025635
Publication date
Jan 26, 2017
Eric R. Dickey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-SPEED DEPOSITION OF MIXED OXIDE BARRIER FILMS
Publication number
20160108524
Publication date
Apr 21, 2016
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW VOLTAGE EMBEDDED MEMORY HAVING CONDUCTIVE OXIDE AND ELECTRODE S...
Publication number
20160079523
Publication date
Mar 17, 2016
Elijah V. Karpov
G11 - INFORMATION STORAGE
Information
Patent Application
ELECTRICALLY- AND CHEMICALLY-ACTIVE ADLAYERS FOR PLASMA ELECTRODES
Publication number
20150252478
Publication date
Sep 10, 2015
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA GENERATION FOR THIN FILM DEPOSITION ON FLEXIBLE SUBSTRATES
Publication number
20140329030
Publication date
Nov 6, 2014
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MIXED METAL-SILICON-OXIDE BARRIERS
Publication number
20140242736
Publication date
Aug 28, 2014
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW VOLTAGE EMBEDDED MEMORY HAVING CONDUCTIVE OXIDE AND ELECTRODE S...
Publication number
20140092666
Publication date
Apr 3, 2014
Elijah V. Karpov
G11 - INFORMATION STORAGE
Information
Patent Application
MIXED METAL OXIDE BARRIER FILMS AND ATOMIC LAYER DEPOSITION METHOD...
Publication number
20130177760
Publication date
Jul 11, 2013
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION METHOD UTILIZING MULTIPLE PRECURSOR ZONES F...
Publication number
20120219708
Publication date
Aug 30, 2012
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION METHOD FOR COATING FLEXIBLE SUBSTRATES
Publication number
20120171371
Publication date
Jul 5, 2012
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TRANSPORT MECHANISM CONTACTING A SINGLE SIDE OF A FLEXIBL...
Publication number
20120021128
Publication date
Jan 26, 2012
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INHIBITING EXCESS PRECURSOR TRANSPORT BETWEEN SEPARATE PRECURSOR ZO...
Publication number
20110256323
Publication date
Oct 20, 2011
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OXYGEN RADICAL GENERATION FOR RADICAL-ENHANCED THIN FILM DEPOSITION
Publication number
20110159204
Publication date
Jun 30, 2011
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION SYSTEM AND METHOD UTILIZING MULTIPLE PRECUR...
Publication number
20100189900
Publication date
Jul 29, 2010
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH RATE DEPOSITION OF THIN FILMS WITH IMPROVED BARRIER LAYER PROP...
Publication number
20100143710
Publication date
Jun 10, 2010
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FABRICATION OF COMPOSITE MATERIALS USING ATOMIC LAYER DEPOSITION
Publication number
20080193739
Publication date
Aug 14, 2008
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Iridium encased metal interconnects for integrated circuit applicat...
Publication number
20080045013
Publication date
Feb 21, 2008
Adrien R. Lavoie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADICAL-ENHANCED ATOMIC LAYER DEPOSITION SYSTEM AND METHOD
Publication number
20080026162
Publication date
Jan 31, 2008
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION SYSTEM AND METHOD FOR COATING FLEXIBLE SUBS...
Publication number
20070224348
Publication date
Sep 27, 2007
Planar Systems, Inc.
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and apparatus for the production of optical filters
Publication number
20050087132
Publication date
Apr 28, 2005
Planar Systems, Inc.
Eric Dickey
G02 - OPTICS