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Sputtering apparatus
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Patent number 9,034,156
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Issue date May 19, 2015
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Samsung Display Co., Ltd.
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Tae-Hoon Yang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus
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Patent number 8,992,749
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Issue date Mar 31, 2015
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Samsung Display Co., Ltd.
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Tae-Hoon Yang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Apparatus for processing substrate
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Patent number 8,894,768
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Issue date Nov 25, 2014
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Samsung Display Co., Ltd.
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Byoung-Keon Park
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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System for sputtering and method thereof
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Patent number 8,658,002
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Issue date Feb 25, 2014
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Samsung Display Co., Ltd.
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Eu-Gene Kang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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