Eugene Gantvarg

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing system having multiple polishing stat...
- Patent number 8,079,894
- Issue date Dec 20, 2011
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing system having multiple polishing stat...
- Patent number 7,614,939
- Issue date Nov 10, 2009
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing system having multiple polishing stat...
- Patent number 7,255,632
- Issue date Aug 14, 2007
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus having a trough
- Patent number 7,238,090
- Issue date Jul 3, 2007
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing system having multiple polishing stat...
- Patent number 7,097,544
- Issue date Aug 29, 2006
- Applied Materials Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Method of controlling carrier head with multiple chambers
- Patent number 6,896,584
- Issue date May 24, 2005
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with a flexible membrane to form multiple chambers
- Patent number 6,648,740
- Issue date Nov 18, 2003
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for orienting substrates
- Patent number 6,532,866
- Issue date Mar 18, 2003
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier head with a flexible membrane
- Patent number 6,506,104
- Issue date Jan 14, 2003
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for improved substrate handling
- Patent number 6,468,353
- Issue date Oct 22, 2002
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for orienting substrates
- Patent number 6,393,337
- Issue date May 21, 2002
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for aligning a substrate on a support member
- Patent number 6,374,508
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conditioner apparatus for chemical mechanical polishing
- Patent number 6,293,853
- Issue date Sep 25, 2001
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Carousel wafer transfer system
- Patent number 6,287,386
- Issue date Sep 11, 2001
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier head with a flexible membrane for a chemical mechanical pol...
- Patent number 6,277,010
- Issue date Aug 21, 2001
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for aligning a substrate on a support member
- Patent number 6,146,463
- Issue date Nov 14, 2000
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier head with a retaining ring for a chemical mechanical polish...
- Patent number 6,143,127
- Issue date Nov 7, 2000
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
System for chemical mechanical polishing having multiple polishing...
- Patent number 6,126,517
- Issue date Oct 3, 2000
- Applied Materials, Inc.
- Robert D. Tolles
- B08 - CLEANING
Information Patent Grant
Carrier head with a flexible membrane for a chemical mechanical pol...
- Patent number 6,106,378
- Issue date Aug 22, 2000
- Applied Materials, Inc.
- Iiya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Washing transfer station in a system for chemical mechanical polishing
- Patent number 6,086,457
- Issue date Jul 11, 2000
- Applied Materials, Inc.
- Ilya Perlov
- B08 - CLEANING
Information Patent Grant
Wafer cassette load station
- Patent number 6,082,951
- Issue date Jul 4, 2000
- Applied Materials, Inc.
- Eric A. Nering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Underwater wafer storage and wafer picking for chemical mechanical...
- Patent number 6,080,046
- Issue date Jun 27, 2000
- Applied Materials, Inc.
- Norm Shendon
- B08 - CLEANING
Information Patent Grant
Conditioner head in a substrate polisher and method
- Patent number 6,036,583
- Issue date Mar 14, 2000
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with a flexible membrane for a chemical mechanical pol...
- Patent number 5,964,653
- Issue date Oct 12, 1999
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Carousel wafer transfer system
- Patent number 5,951,770
- Issue date Sep 14, 1999
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanical fastener to hold a polishing pad on a platen in a chemic...
- Patent number 5,931,724
- Issue date Aug 3, 1999
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for moving a cassette
- Patent number 5,893,795
- Issue date Apr 13, 1999
- Applied Materials, Inc.
- Ilya Perlov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radially oscillating carousel processing system for chemical mechan...
- Patent number 5,804,507
- Issue date Sep 8, 1998
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Continuous processing system for chemical mechanical polishing
- Patent number 5,738,574
- Issue date Apr 14, 1998
- Applied Materials, Inc.
- Robert D. Tolles
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL MECHANICAL POLISHING SYSTEM HAVING MULTIPLE POLISHING STAT...
- Publication number 20100035526
- Publication date Feb 11, 2010
- Applied Materials, Inc.
- Robert D. Tolles
- B08 - CLEANING
Information Patent Application
CHEMICAL MECHANICAL POLISHING SYSTEM HAVING MULTIPLE POLISHING STAT...
- Publication number 20070238399
- Publication date Oct 11, 2007
- Applied Materials, Inc.
- Robert D. Tolles
- B08 - CLEANING
Information Patent Application
Chemical mechanical polishing system having multiple polishing stat...
- Publication number 20060194525
- Publication date Aug 31, 2006
- Applied Materials, Inc., a Delaware corporation
- Robert D. Tolles
- B08 - CLEANING
Information Patent Application
Method of controlling carrier head with multiple chambers
- Publication number 20050142995
- Publication date Jun 30, 2005
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Application
Chemical mechanical polishing system having multiple polishing stat...
- Publication number 20050048880
- Publication date Mar 3, 2005
- Applied Materials, Inc., a Delaware corporation
- Robert D. Tolles
- B08 - CLEANING
Information Patent Application
Method of controlling carrier head with multiple chambers
- Publication number 20040063385
- Publication date Apr 1, 2004
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Application
Carrier head with a flexible membrane to form multiple chambers
- Publication number 20030022609
- Publication date Jan 30, 2003
- Applied Materials, Inc., a Delaware corporation
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for improved substrate handling
- Publication number 20020170672
- Publication date Nov 21, 2002
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for orienting substrates
- Publication number 20020111710
- Publication date Aug 15, 2002
- APPLIED MATERIALS, INC.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pod door opener
- Publication number 20020006322
- Publication date Jan 17, 2002
- APPLIED MATERIALS, INC.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carrier head with a flexible membrane for a chemical mechanical pol...
- Publication number 20010041526
- Publication date Nov 15, 2001
- Applied Materials, Inc. a Delaware Corporation
- Ilya Perlov
- B24 - GRINDING POLISHING

Eugene Gantvarg

Person

Patents Grantslast 30 patents

Chemical mechanical polishing system having multiple polishing stat...

Chemical mechanical polishing system having multiple polishing stat...

Chemical mechanical polishing system having multiple polishing stat...

Polishing apparatus having a trough

Chemical mechanical polishing system having multiple polishing stat...

Method of controlling carrier head with multiple chambers

Carrier head with a flexible membrane to form multiple chambers

Method and apparatus for orienting substrates

Carrier head with a flexible membrane

Method and apparatus for improved substrate handling

Method and apparatus for orienting substrates

Apparatus and method for aligning a substrate on a support member

Conditioner apparatus for chemical mechanical polishing

Carousel wafer transfer system

Carrier head with a flexible membrane for a chemical mechanical pol...

Apparatus and method for aligning a substrate on a support member

Carrier head with a retaining ring for a chemical mechanical polish...

System for chemical mechanical polishing having multiple polishing...

Carrier head with a flexible membrane for a chemical mechanical pol...

Washing transfer station in a system for chemical mechanical polishing

Wafer cassette load station

Underwater wafer storage and wafer picking for chemical mechanical...

Conditioner head in a substrate polisher and method

Carrier head with a flexible membrane for a chemical mechanical pol...

Carousel wafer transfer system

Mechanical fastener to hold a polishing pad on a platen in a chemic...

Apparatus for moving a cassette

Radially oscillating carousel processing system for chemical mechan...

Continuous processing system for chemical mechanical polishing

Patents Applicationslast 30 patents

CHEMICAL MECHANICAL POLISHING SYSTEM HAVING MULTIPLE POLISHING STAT...

CHEMICAL MECHANICAL POLISHING SYSTEM HAVING MULTIPLE POLISHING STAT...

Chemical mechanical polishing system having multiple polishing stat...

Method of controlling carrier head with multiple chambers

Chemical mechanical polishing system having multiple polishing stat...

Method of controlling carrier head with multiple chambers

Carrier head with a flexible membrane to form multiple chambers

Method and apparatus for improved substrate handling

Method and apparatus for orienting substrates

Pod door opener

Carrier head with a flexible membrane for a chemical mechanical pol...