Fayaz Shaikh

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,851,760
- Issue date Dec 26, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,725,283
- Issue date Aug 15, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Separation of plasma suppression and wafer edge to improve edge fil...
- Patent number 11,674,226
- Issue date Jun 13, 2023
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 11,441,222
- Issue date Sep 13, 2022
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetric wafer bow compensation by chemical vapor deposition
- Patent number 10,903,070
- Issue date Jan 26, 2021
- Lam Research Corporation
- Chanyuan Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD deposition system for deposition on selective side of the sub...
- Patent number 10,851,457
- Issue date Dec 1, 2020
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inter-electrode gap variation methods for compensating deposition n...
- Patent number 10,388,485
- Issue date Aug 20, 2019
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for depositing a homogenous interface for PECVD m...
- Patent number 10,096,475
- Issue date Oct 9, 2018
- Lam Research Corporation
- Fayaz Shaikh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for decreasing carbon-hydrogen content of amorphous carbon...
- Patent number 9,928,994
- Issue date Mar 27, 2018
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of metal dielectric film for hardmasks
- Patent number 9,875,890
- Issue date Jan 23, 2018
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inter-electrode gap variation methods for compensating deposition n...
- Patent number 9,859,088
- Issue date Jan 2, 2018
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal doping of amorphous carbon and silicon films used as hardmask...
- Patent number 9,520,295
- Issue date Dec 13, 2016
- Lam Research Corporation
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION OF HIGH COMPRESSIVE STRESS THERMALLY STABLE NITRIDE FILM
- Publication number 20250037992
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- Soumana HAMMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20240309507
- Publication date Sep 19, 2024
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20240167161
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...
- Publication number 20230352279
- Publication date Nov 2, 2023
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...
- Publication number 20230323535
- Publication date Oct 12, 2023
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER RINGS WITH RADIALLY-VARIED PLASMA IMPEDANCE
- Publication number 20230238223
- Publication date Jul 27, 2023
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF WAFER BOW DURING INTEGRATED CIRCUIT PROCESSING
- Publication number 20230136819
- Publication date May 4, 2023
- LAM RESEARCH CORPORATION
- David W. Porter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV CURE FOR LOCAL STRESS MODULATION
- Publication number 20230038611
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Anirvan SIRCAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20220298632
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER
- Publication number 20220199379
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- James F. LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20220162755
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20220162754
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
- Publication number 20220162753
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Depositing a Film on a Backside of a Substrate
- Publication number 20210108314
- Publication date Apr 15, 2021
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Separation of Plasma Suppression and Wafer Edge to Improve Edge Fil...
- Publication number 20200190667
- Publication date Jun 18, 2020
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASYMMETRIC WAFER BOW COMPENSATION BY CHEMICAL VAPOR DEPOSITION
- Publication number 20200105523
- Publication date Apr 2, 2020
- LAM RESEARCH CORPORATION
- Chanyuan Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD Deposition System for Deposition on Selective Side of the Sub...
- Publication number 20190062918
- Publication date Feb 28, 2019
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Inter-Electrode Gap Variation Methods for Compensating Deposition N...
- Publication number 20180144903
- Publication date May 24, 2018
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Separation of Plasma Suppression and Wafer Edge to Improve Edge Fil...
- Publication number 20170002465
- Publication date Jan 5, 2017
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTER-ELECTRODE GAP VARIATION METHODS FOR COMPENSATING DEPOSITION N...
- Publication number 20160322215
- Publication date Nov 3, 2016
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEMS AND STRUCTURES HAVING SLOPED CONFINEMENT...
- Publication number 20160289827
- Publication date Oct 6, 2016
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METAL DIELECTRIC FILM FOR HARDMASKS
- Publication number 20160284541
- Publication date Sep 29, 2016
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL DOPING OF AMORPHOUS CARBON AND SILICON FILMS USED AS HARDMASK...
- Publication number 20160225632
- Publication date Aug 4, 2016
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DECREASING CARBON-HYDROGEN CONTENT OF AMORP...
- Publication number 20160225588
- Publication date Aug 4, 2016
- LAM RESEARCH CORPORATION
- Fayaz Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Fayaz Shaikh

Person

Patents Grantslast 30 patents

Spatially tunable deposition to compensate within wafer differentia...

PECVD deposition system for deposition on selective side of the sub...

PECVD deposition system for deposition on selective side of the sub...

Separation of plasma suppression and wafer edge to improve edge fil...

PECVD deposition system for deposition on selective side of the sub...

Asymmetric wafer bow compensation by chemical vapor deposition

PECVD deposition system for deposition on selective side of the sub...

Inter-electrode gap variation methods for compensating deposition n...

System and method for depositing a homogenous interface for PECVD m...

Methods for decreasing carbon-hydrogen content of amorphous carbon...

Deposition of metal dielectric film for hardmasks

Inter-electrode gap variation methods for compensating deposition n...

Metal doping of amorphous carbon and silicon films used as hardmask...

Patents Applicationslast 30 patents

DEPOSITION OF HIGH COMPRESSIVE STRESS THERMALLY STABLE NITRIDE FILM

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

MULTI-STATION PROCESSING TOOLS WITH STATION-VARYING SUPPORT FEATURE...

SEPARATION OF PLASMA SUPPRESSION AND WAFER EDGE TO IMPROVE EDGE FIL...

CARRIER RINGS WITH RADIALLY-VARIED PLASMA IMPEDANCE

CONTROL OF WAFER BOW DURING INTEGRATED CIRCUIT PROCESSING

UV CURE FOR LOCAL STRESS MODULATION

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

HIGH TEMPERATURE HEATING OF A SUBSTRATE IN A PROCESSING CHAMBER

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...

Methods for Depositing a Film on a Backside of a Substrate

Separation of Plasma Suppression and Wafer Edge to Improve Edge Fil...

ASYMMETRIC WAFER BOW COMPENSATION BY CHEMICAL VAPOR DEPOSITION

PECVD Deposition System for Deposition on Selective Side of the Sub...

Inter-Electrode Gap Variation Methods for Compensating Deposition N...

Separation of Plasma Suppression and Wafer Edge to Improve Edge Fil...

INTER-ELECTRODE GAP VARIATION METHODS FOR COMPENSATING DEPOSITION N...

PLASMA PROCESSING SYSTEMS AND STRUCTURES HAVING SLOPED CONFINEMENT...

DEPOSITION OF METAL DIELECTRIC FILM FOR HARDMASKS

METAL DOPING OF AMORPHOUS CARBON AND SILICON FILMS USED AS HARDMASK...

SYSTEMS AND METHODS FOR DECREASING CARBON-HYDROGEN CONTENT OF AMORP...