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Cupertino, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Collimator for a physical vapor deposition chamber
Patent number
D1009816
Issue date
Jan 2, 2024
Applied Materials, Inc.
Martin Lee Riker
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
Patent number
11,810,770
Issue date
Nov 7, 2023
Applied Materials, Inc.
Xiaodong Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Collimator for use in a physical vapor deposition (PVD) chamber
Patent number
D998575
Issue date
Sep 12, 2023
Applied Materials, Inc.
Martin Lee Riker
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Collimator for use in a physical vapor deposition (PVD) chamber
Patent number
D997111
Issue date
Aug 29, 2023
Applied Materials, Inc.
Martin Lee Riker
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Method of depositing multilayer stack including copper over feature...
Patent number
11,562,925
Issue date
Jan 24, 2023
Applied Materials, Inc.
Shirish Pethe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for intermixing layer for enhanced metal reflow
Patent number
11,527,437
Issue date
Dec 13, 2022
Applied Materials, Inc.
Lanlan Zhong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate temperature non-uniformity reduction over target life usi...
Patent number
11,492,699
Issue date
Nov 8, 2022
Applied Materials, Inc.
Suhas Bangalore Umesh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Physical vapor deposition (PVD) chamber with reduced arcing
Patent number
11,393,665
Issue date
Jul 19, 2022
Applied Materials, Inc.
Chao Du
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus to prevent interference between processing ch...
Patent number
11,335,577
Issue date
May 17, 2022
Applied Materials, Inc.
Fuhong Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,315,771
Issue date
Apr 26, 2022
Applied Materials, Inc.
Xiangjin Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Biasable flux optimizer / collimator for PVD sputter chamber
Patent number
11,309,169
Issue date
Apr 19, 2022
Applied Materials, Inc.
Martin Lee Riker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for filling a feature disposed in a substrate
Patent number
11,289,329
Issue date
Mar 29, 2022
Applied Materials, Inc.
Rui Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target profile for a physical vapor deposition chamber target
Patent number
D946638
Issue date
Mar 22, 2022
Applied Materials, Inc.
Martin Lee Riker
D15 - Machines not elsewhere specified
Information
Patent Grant
Apparatus for enhancing flow uniformity in a process chamber
Patent number
11,270,898
Issue date
Mar 8, 2022
Applied Materials, Inc.
Jothilingam Ramalingam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for semi-dynamic bottom up reflow
Patent number
11,222,816
Issue date
Jan 11, 2022
Applied Materials, Inc.
Lanlan Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
Patent number
11,037,768
Issue date
Jun 15, 2021
Applied Materials, Inc.
Xiaodong Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Biasable flux optimizer / collimator for PVD sputter chamber
Patent number
10,727,033
Issue date
Jul 28, 2020
Applied Materials, Inc.
Martin Lee Riker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Target profile for a physical vapor deposition chamber target
Patent number
D869409
Issue date
Dec 10, 2019
Applied Materials, Inc.
Martin Lee Riker
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Target profile for a physical vapor deposition chamber target
Patent number
D868124
Issue date
Nov 26, 2019
Applied Materials, Inc.
Martin Lee Riker
D15 - Machines not elsewhere specified
Information
Patent Grant
Methods and apparatus to prevent interference between processing ch...
Patent number
10,438,828
Issue date
Oct 8, 2019
Applied Materials, Inc.
Fuhong Zhang
G05 - CONTROLLING REGULATING
Information
Patent Grant
Collimator for a physical vapor deposition chamber
Patent number
D859333
Issue date
Sep 10, 2019
Applied Materials, Inc.
Martin Lee Riker
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Collimator for a physical vapor deposition chamber
Patent number
D858468
Issue date
Sep 3, 2019
Applied Materials, Inc.
Martin Lee Riker
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Biasable flux optimizer / collimator for PVD sputter chamber
Patent number
10,347,474
Issue date
Jul 9, 2019
Applied Materials, Inc.
Martin Lee Riker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for maintaining low non-uniformity over targe...
Patent number
10,283,334
Issue date
May 7, 2019
Applied Materials, Inc.
William Johanson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Target profile for a physical vapor deposition chamber target
Patent number
D837755
Issue date
Jan 8, 2019
Applied Materials, Inc.
Martin Lee Riker
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Target profile for a physical vapor deposition chamber target
Patent number
D836572
Issue date
Dec 25, 2018
Applied Materials, Inc.
Martin Lee Riker
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Methods for igniting a plasma in a substrate processing chamber
Patent number
10,157,733
Issue date
Dec 18, 2018
Applied Materials, Inc.
Shouyin Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target profile for a physical vapor deposition chamber target
Patent number
D825504
Issue date
Aug 14, 2018
Applied Materials, Inc.
Fuhong Zhang
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Magnetron assembly for physical vapor deposition chamber
Patent number
9,991,101
Issue date
Jun 5, 2018
Applied Materials, Inc.
William Johanson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Biasable flux optimizer / collimator for PVD sputter chamber
Patent number
9,960,024
Issue date
May 1, 2018
Applied Materials, Inc.
Martin Lee Riker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER
Publication number
20240102153
Publication date
Mar 28, 2024
Fuhong ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
Publication number
20230402271
Publication date
Dec 14, 2023
Applied Materials, Inc.
Xiaodong WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING LAYERS
Publication number
20230122969
Publication date
Apr 20, 2023
Applied Materials, Inc.
Shirish PETHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING
Publication number
20220380888
Publication date
Dec 1, 2022
Goichi YOSHIDOME
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TEMPERATURE NON-UNIFORMITY REDUCTION OVER TARGET LIFE USI...
Publication number
20220259720
Publication date
Aug 18, 2022
Applied Materials, Inc.
Suhas BANGALORE UMESH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR INTERMIXING LAYER FOR ENHANCED METAL REFLOW
Publication number
20220084882
Publication date
Mar 17, 2022
Applied Materials, Inc.
Lanlan ZHONG
G11 - INFORMATION STORAGE
Information
Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
Publication number
20220020577
Publication date
Jan 20, 2022
Applied Materials, Inc.
Xiaodong WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20220020578
Publication date
Jan 20, 2022
Applied Materials, Inc.
Xiangjin XIE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR SEMI-DYNAMIC BOTTOM UP REFLOW
Publication number
20210391214
Publication date
Dec 16, 2021
Applied Materials, Inc.
Lanlan ZHONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DEPOSITING LAYERS
Publication number
20210118729
Publication date
Apr 22, 2021
Applied Materials, Inc.
Shirish PETHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
Publication number
20210071294
Publication date
Mar 11, 2021
Applied Materials, Inc.
Xiaodong WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BIASABLE FLUX OPTIMIZER / COLLIMATOR FOR PVD SPUTTER CHAMBER
Publication number
20200357617
Publication date
Nov 12, 2020
Applied Materials, Inc.
Martin Lee RIKER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR FILLING A FEATURE DISPOSED IN A SUBSTRATE
Publication number
20200350159
Publication date
Nov 5, 2020
Applied Materials, Inc.
Rui LI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR ENHANCING FLOW UNIFORMITY IN A PROCESS CHAMBER
Publication number
20200090957
Publication date
Mar 19, 2020
Applied Materials, Inc.
Jothilingam Ramalingam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHYSICAL VAPOR DEPOSITION ( PVD) CHAMBER WITH REDUCED ARCING
Publication number
20200051795
Publication date
Feb 13, 2020
Applied Materials, Inc.
CHAO DU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods And Apparatus To Prevent Interference Between Processing Ch...
Publication number
20200035527
Publication date
Jan 30, 2020
Applied Materials, Inc.
Fuhong Zhang
G05 - CONTROLLING REGULATING
Information
Patent Application
BIASABLE FLUX OPTIMIZER / COLLIMATOR FOR PVD SPUTTER CHAMBER
Publication number
20190279851
Publication date
Sep 12, 2019
Applied Materials, Inc.
Martin Lee RIKER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGE...
Publication number
20190259586
Publication date
Aug 22, 2019
Applied Materials, Inc.
WILLIAM JOHANSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BIASABLE FLUX OPTIMIZER / COLLIMATOR FOR PVD SPUTTER CHAMBER
Publication number
20180218889
Publication date
Aug 2, 2018
Applied Materials, Inc.
Martin Lee RIKER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and Apparatus to Prevent Interference Between Processing Ch...
Publication number
20180096871
Publication date
Apr 5, 2018
Applied Materials, Inc.
Fuhong Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
Publication number
20170253959
Publication date
Sep 7, 2017
Applied Materials, Inc.
Xiaodong WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR IGNITING A PLASMA IN A SUBSTRATE PROCESSING CHAMBER
Publication number
20170221685
Publication date
Aug 3, 2017
Applied Materials, Inc.
Shouyin ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BIASABLE FLUX OPTIMIZER / COLLIMATOR FOR PVD SPUTTER CHAMBER
Publication number
20170117121
Publication date
Apr 27, 2017
Applied Materials, Inc.
Martin Lee RIKER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGE...
Publication number
20160056024
Publication date
Feb 25, 2016
Applied Materials, Inc.
WILLIAM JOHANSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MAGNETRON ASSEMBLY FOR PHYSICAL VAPOR DEPOSITION CHAMBER
Publication number
20160035547
Publication date
Feb 4, 2016
Applied Materials, Inc.
WILLIAM JOHANSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SOURCE MAGNET FOR IMPROVED RESPUTTERING UNIFORMITY IN DIRECT CURREN...
Publication number
20150075982
Publication date
Mar 19, 2015
Applied Materials, Inc.
GOICHI YOSHIDOME
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Sputter deposition and etching of metallization seed layer for over...
Publication number
20060030151
Publication date
Feb 9, 2006
APPLIED MATERIALS, INC.
Peijun Ding
H01 - BASIC ELECTRIC ELEMENTS