Fumiko Yagi

Person

Miyagi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
- Patent number 8,790,529
- Issue date Jul 29, 2014
- Tokyo Electron Limited
- Shinichiro Hayasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for examining substrate proc...
- Patent number 8,190,281
- Issue date May 29, 2012
- Tokyo Electron Limited
- Takeshi Yokouchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
- Patent number 7,896,967
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Shinichiro Hayasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for electrically discharging substrate, substrate processing...
- Patent number 7,535,688
- Issue date May 19, 2009
- Tokyo Electron Limited
- Takeshi Yokouchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROC...
- Publication number 20110224818
- Publication date Sep 15, 2011
- TOKYO ELECTRON LIMITED
- Takeshi Yokouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND M...
- Publication number 20110190924
- Publication date Aug 4, 2011
- TOKYO ELECTRON LIMITED
- Takeshi Yokouchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
- Publication number 20110120563
- Publication date May 26, 2011
- TOKYO ELECTRON LIMITED
- Shinichiro HAYASAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND M...
- Publication number 20070227658
- Publication date Oct 4, 2007
- TOKYO ELECTRON LIMITED
- Takeshi Yokouchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR EXAMINING SUBSTRATE PROC...
- Publication number 20070212846
- Publication date Sep 13, 2007
- TOKYO ELECTRON LIMITED
- Takeshi Yokouchi
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROC...
- Publication number 20070199655
- Publication date Aug 30, 2007
- TOKYO ELECTRON LIMITED
- Takeshi Yokouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
- Publication number 20070181255
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Shinichiro HAYASAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for electrically discharging substrate, substrate processing...
- Publication number 20060215338
- Publication date Sep 28, 2006
- TOKTO ELECTRON LIMITED
- Takeshi Yokouchi
- H01 - BASIC ELECTRIC ELEMENTS

Fumiko Yagi

Person

Patents Grantslast 30 patents

Gas supply system, substrate processing apparatus and gas supply me...

Substrate processing apparatus, method for examining substrate proc...

Gas supply system, substrate processing apparatus and gas supply me...

Method for electrically discharging substrate, substrate processing...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROC...

CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND M...

GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...

CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS AND M...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR EXAMINING SUBSTRATE PROC...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MODIFYING SUBSTRATE PROC...

GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...

Method for electrically discharging substrate, substrate processing...