George A. Antonelli

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for multiple source excitation Raman spectroscopy
- Patent number 11,874,229
- Issue date Jan 16, 2024
- Onto Innovation Inc.
- George Andrew Antonelli
- G02 - OPTICS
Information Patent Grant
Target for optical measurement of trenches
- Patent number 11,808,715
- Issue date Nov 7, 2023
- Onto Innovation Inc.
- Nicholas James Keller
- G01 - MEASURING TESTING
Information Patent Grant
Opto-acoustic measurement of a transparent film stack
- Patent number 11,668,644
- Issue date Jun 6, 2023
- Onto Innovation Inc.
- George Andrew Antonelli
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 11,209,729
- Issue date Dec 28, 2021
- Lam Research Corporation
- Jeffrey Marks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical metrology device using numerical aperture reduction
- Patent number 11,162,897
- Issue date Nov 2, 2021
- Onto Innovation Inc.
- George Andrew Antonelli
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology system using infrared wavelengths
- Patent number 10,901,241
- Issue date Jan 26, 2021
- Onto Innovation Inc.
- George Andrew Antonelli
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 10,831,096
- Issue date Nov 10, 2020
- Lam Research Corporation
- Jeffrey Marks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source failure identification in an optical metrology device
- Patent number 10,775,149
- Issue date Sep 15, 2020
- Onto Innovation Inc.
- George Andrew Antonelli
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 10,514,598
- Issue date Dec 24, 2019
- Lam Research Corporation
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scanning white-light interferometry system for characterization of...
- Patent number 10,288,408
- Issue date May 14, 2019
- Nanometrics Incorporated
- Nigel P. Smith
- G02 - OPTICS
Information Patent Grant
Clean resistant windows for ultraviolet thermal processing
- Patent number 10,240,236
- Issue date Mar 26, 2019
- Lam Research Corporation
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus for in-situ deposition of film stacks
- Patent number 10,214,816
- Issue date Feb 26, 2019
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selectively sealing ultra low-k porous dielectric layer...
- Patent number 10,049,921
- Issue date Aug 14, 2018
- Lam Research Corporation
- Nerissa Sue Draeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
UV and reducing treatment for K recovery and surface clean in semic...
- Patent number 10,037,905
- Issue date Jul 31, 2018
- Novellus Systems, Inc.
- Bhadri Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for remote plasma treatment for reducing metal...
- Patent number 9,865,501
- Issue date Jan 9, 2018
- Lam Research Corporation
- Tighe A. Spurlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 9,778,561
- Issue date Oct 3, 2017
- Lam Research Corporation
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-k damage repair and pore sealing agents with photosensitive end...
- Patent number 9,502,255
- Issue date Nov 22, 2016
- Lam Research Corporation
- George Andrew Antonelli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxygen-containing ceramic hard masks and associated wet-cleans
- Patent number 9,337,068
- Issue date May 10, 2016
- Lam Research Corporation
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-K oxide deposition by hydrolysis and condensation
- Patent number 9,245,739
- Issue date Jan 26, 2016
- Lam Research Corporation
- Nicholas Muga Ndiege
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for reducing metal oxide surfaces to modified metal surface...
- Patent number 9,070,750
- Issue date Jun 30, 2015
- Novellus Systems, Inc.
- Tighe A. Spurlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ deposition of film stacks
- Patent number 9,028,924
- Issue date May 12, 2015
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardmask materials
- Patent number 8,846,525
- Issue date Sep 30, 2014
- Novellus Systems, Inc.
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ deposition of film stacks
- Patent number 8,741,394
- Issue date Jun 3, 2014
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Smooth silicon-containing films
- Patent number 8,709,551
- Issue date Apr 29, 2014
- Novellus Systems, Inc.
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD flowable dielectric gap fill
- Patent number 8,557,712
- Issue date Oct 15, 2013
- Novellus Systems, Inc.
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardmask materials
- Patent number 8,536,073
- Issue date Sep 17, 2013
- Novellus Systems, Inc.
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus including a plasma chamber and controller including instr...
- Patent number 8,479,683
- Issue date Jul 9, 2013
- Novellus Systems, Inc.
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing conformal boron nitride film by CVD without plasma
- Patent number 8,288,292
- Issue date Oct 16, 2012
- Novellus Systems, Inc.
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interfacial capping layers for interconnects
- Patent number 8,268,722
- Issue date Sep 18, 2012
- Novellus Systems, Inc.
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hardmask materials
- Patent number 8,247,332
- Issue date Aug 21, 2012
- Novellus Systems, Inc.
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20230366094
- Publication date Nov 16, 2023
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR MULTIPLE SOURCE EXCITATION RAMAN SPECTROSCOPY
- Publication number 20230324303
- Publication date Oct 12, 2023
- ONTO INNOVATION INC.
- George Andrew ANTONELLI
- G02 - OPTICS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230273516
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230266662
- Publication date Aug 24, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTO-ACOUSTIC MEASUREMENT OF A TRANSPARENT FILM STACK
- Publication number 20220317025
- Publication date Oct 6, 2022
- ONTO INNOVATION INC.
- George Andrew Antonelli
- G01 - MEASURING TESTING
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20220075260
- Publication date Mar 10, 2022
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET FOR OPTICAL MEASUREMENT OF TRENCHES
- Publication number 20210325317
- Publication date Oct 21, 2021
- ONTO INNOVATION INC.
- Nicholas JAMES KELLER
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL METROLOGY DEVICE USING NUMERICAL APERTURE REDUCTION
- Publication number 20200363332
- Publication date Nov 19, 2020
- ONTO INNOVATION INC.
- George Andrew Antonelli
- G01 - MEASURING TESTING
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20200089104
- Publication date Mar 19, 2020
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20190094685
- Publication date Mar 28, 2019
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL...
- Publication number 20180350670
- Publication date Dec 6, 2018
- LAM RESEARCH CORPORATION
- Tighe A. Spurlin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SCANNING WHITE-LIGHT INTERFEROMETRY SYSTEM FOR CHARACTERIZATION OF...
- Publication number 20180156597
- Publication date Jun 7, 2018
- Nanometrics Incorporated
- Nigel P. Smith
- G01 - MEASURING TESTING
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20180004083
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING
- Publication number 20160258057
- Publication date Sep 8, 2016
- LAM RESEARCH CORPORATION
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE ULTRAVIOLET THERMAL PROCESSING OF LOW DIELECTRIC CONSTANT...
- Publication number 20160138160
- Publication date May 19, 2016
- LAM RESEARCH CORPORATION
- Darcy E. Lambert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-K DAMAGE REPAIR AND PORE SEALING AGENTS WITH PHOTOSENSITIVE END...
- Publication number 20160111288
- Publication date Apr 21, 2016
- LAM RESEARCH CORPORATION
- George Andrew Antonelli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOWABLE DIELECTRIC FOR SELECTIVE ULTRA LOW-K PORE SEALING
- Publication number 20160056071
- Publication date Feb 25, 2016
- LAM RESEARCH CORPORATION
- Nerissa Sue Draeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-K DIELECTRIC FILM FORMATION
- Publication number 20160042943
- Publication date Feb 11, 2016
- LAM RESEARCH CORPORATION
- Troy Daniel Ribaudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING
- Publication number 20150376792
- Publication date Dec 31, 2015
- LAM RESEARCH CORPORATION
- Tighe A. Spurlin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CLEANING OF CARBON-BASED CONTAMINANTS IN METAL INTERCONNECTS FOR IN...
- Publication number 20150380296
- Publication date Dec 31, 2015
- LAM RESEARCH CORPORATION
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20150013607
- Publication date Jan 15, 2015
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-K OXIDE DEPOSITION BY HYDROLYSIS AND CONDENSATION
- Publication number 20150004806
- Publication date Jan 1, 2015
- LAM RESEARCH CORPORATION
- Nicholas Muga Ndiege
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL...
- Publication number 20140256128
- Publication date Sep 11, 2014
- Tighe A. Spurlin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
OXYGEN-CONTAINING CERAMIC HARD MASKS AND ASSOCIATED WET-CLEANS
- Publication number 20140175617
- Publication date Jun 26, 2014
- LAM RESEARCH CORPORATION
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDMASK MATERIALS
- Publication number 20130330932
- Publication date Dec 12, 2013
- Novellus Systems, Inc.
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Capping of Metal Interconnect Lines during Air Gap Formation
- Publication number 20130323930
- Publication date Dec 5, 2013
- Kaushik Chattopadhyay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20130171834
- Publication date Jul 4, 2013
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON NITRIDE FILMS FOR SEMICONDUCTOR DEVICE APPLICATIONS
- Publication number 20130157466
- Publication date Jun 20, 2013
- Keith Fox
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITING CONFORMAL BORON NITRIDE FILMS
- Publication number 20130008378
- Publication date Jan 10, 2013
- George Andrew Antonelli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDMASK MATERIALS
- Publication number 20120276752
- Publication date Nov 1, 2012
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

George A. Antonelli

Person

Patents Grantslast 30 patents

Apparatus and method for multiple source excitation Raman spectroscopy

Target for optical measurement of trenches

Opto-acoustic measurement of a transparent film stack

Vacuum-integrated hardmask processes and apparatus

Optical metrology device using numerical aperture reduction

Optical metrology system using infrared wavelengths

Vacuum-integrated hardmask processes and apparatus

Light source failure identification in an optical metrology device

Vacuum-integrated hardmask processes and apparatus

Scanning white-light interferometry system for characterization of...

Clean resistant windows for ultraviolet thermal processing

PECVD apparatus for in-situ deposition of film stacks

Method for selectively sealing ultra low-k porous dielectric layer...

UV and reducing treatment for K recovery and surface clean in semic...

Method and apparatus for remote plasma treatment for reducing metal...

Vacuum-integrated hardmask processes and apparatus

Low-k damage repair and pore sealing agents with photosensitive end...

Oxygen-containing ceramic hard masks and associated wet-cleans

Low-K oxide deposition by hydrolysis and condensation

Methods for reducing metal oxide surfaces to modified metal surface...

In-situ deposition of film stacks

Hardmask materials

In-situ deposition of film stacks

Smooth silicon-containing films

PECVD flowable dielectric gap fill

Hardmask materials

Apparatus including a plasma chamber and controller including instr...

Depositing conformal boron nitride film by CVD without plasma

Interfacial capping layers for interconnects

Hardmask materials

Patents Applicationslast 30 patents

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

APPARATUS AND METHOD FOR MULTIPLE SOURCE EXCITATION RAMAN SPECTROSCOPY

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

OPTO-ACOUSTIC MEASUREMENT OF A TRANSPARENT FILM STACK

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

TARGET FOR OPTICAL MEASUREMENT OF TRENCHES

OPTICAL METROLOGY DEVICE USING NUMERICAL APERTURE REDUCTION

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL...

SCANNING WHITE-LIGHT INTERFEROMETRY SYSTEM FOR CHARACTERIZATION OF...

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING

REACTIVE ULTRAVIOLET THERMAL PROCESSING OF LOW DIELECTRIC CONSTANT...

LOW-K DAMAGE REPAIR AND PORE SEALING AGENTS WITH PHOTOSENSITIVE END...

FLOWABLE DIELECTRIC FOR SELECTIVE ULTRA LOW-K PORE SEALING

LOW-K DIELECTRIC FILM FORMATION

ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING

CLEANING OF CARBON-BASED CONTAMINANTS IN METAL INTERCONNECTS FOR IN...

IN-SITU DEPOSITION OF FILM STACKS

LOW-K OXIDE DEPOSITION BY HYDROLYSIS AND CONDENSATION

METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL...

OXYGEN-CONTAINING CERAMIC HARD MASKS AND ASSOCIATED WET-CLEANS

HARDMASK MATERIALS

Selective Capping of Metal Interconnect Lines during Air Gap Formation

IN-SITU DEPOSITION OF FILM STACKS

SILICON NITRIDE FILMS FOR SEMICONDUCTOR DEVICE APPLICATIONS

DEPOSITING CONFORMAL BORON NITRIDE FILMS

HARDMASK MATERIALS