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German E. Rylov
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Poway, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Line narrowing module
Patent number
8,126,027
Issue date
Feb 28, 2012
Cymer, Inc.
J. Martin Algots
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Active bandwidth control for a laser
Patent number
7,653,095
Issue date
Jan 26, 2010
Cymer, Inc.
Daniel J. Reiley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Immersion lithography laser light source with pulse stretcher
Patent number
7,643,528
Issue date
Jan 5, 2010
Cymer, Inc.
William N. Partlo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line narrowing module
Patent number
7,366,219
Issue date
Apr 29, 2008
Cymer, Inc.
J. Martin Algots
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line selected F2 two chamber laser system
Patent number
7,218,661
Issue date
May 15, 2007
Cymer, Inc.
David S. Knowles
G01 - MEASURING TESTING
Information
Patent Grant
Relax gas discharge laser lithography light source
Patent number
7,088,758
Issue date
Aug 8, 2006
Cymer, Inc.
Richard L. Sandstrom
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Line selected F2 two chamber laser system
Patent number
7,058,107
Issue date
Jun 6, 2006
Cymer, Inc.
David S. Knowles
G01 - MEASURING TESTING
Information
Patent Grant
Line selected F2 two chamber laser system
Patent number
6,801,560
Issue date
Oct 5, 2004
Cymer, Inc.
David S. Knowles
G01 - MEASURING TESTING
Information
Patent Grant
Two chamber F2 laser system with F2 pressure based line selection
Patent number
6,798,812
Issue date
Sep 28, 2004
Cymer, Inc.
German E. Rylov
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Line Narrowing Module
Publication number
20110194580
Publication date
Aug 11, 2011
Cymer, Inc.
J. Martin Algots
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Line narrowing module
Publication number
20100097704
Publication date
Apr 22, 2010
Cymer, Inc.
J. Martin Algots
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Immersion lithography laser light source with pulse stretcher
Publication number
20100074295
Publication date
Mar 25, 2010
Cymer, Inc.
William N. Partlo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Immersion lithography laser light source with pulse stretcher
Publication number
20090080476
Publication date
Mar 26, 2009
Cymer, Inc.
William N. Partlo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Line narrowing module
Publication number
20080151944
Publication date
Jun 26, 2008
Cymer, Inc.
J. Martin Algots
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Active bandwidth control for a laser
Publication number
20070001127
Publication date
Jan 4, 2007
Cymer, Inc.
Daniel J. Reiley
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Line narrowing module
Publication number
20060114957
Publication date
Jun 1, 2006
J. Martin Algots
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Relax gas discharge laser lithography light source
Publication number
20050083983
Publication date
Apr 21, 2005
Richard L. Sandstrom
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Line selected F2 two chamber laser system
Publication number
20040258122
Publication date
Dec 23, 2004
David S. Knowles
G01 - MEASURING TESTING
Information
Patent Application
Line selected F2 two chamber laser system
Publication number
20040174919
Publication date
Sep 9, 2004
David S. Knowles
G01 - MEASURING TESTING
Information
Patent Application
Two chamber F2 laser system with F2 pressure based line selection
Publication number
20030138019
Publication date
Jul 24, 2003
German E. Rylov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Line selected F2 two chamber laser system
Publication number
20020154671
Publication date
Oct 24, 2002
David S. Knowles
G01 - MEASURING TESTING