Patent Grant
7218661
Electric discharge gas lasers are well known and have been available since soon after lasers were invented in the 1960s. A high voltage discharge between two electrodes excites a laser gas to produce a gaseous gain medium. A resonance cavity containing the gain medium permits stimulated amplification of light which is then extracted from the cavity in the form of a laser beam. Many of these electric discharge gas lasers are operated in a pulse mode.
Excimer lasers are a particular type of electric discharge gas laser and they have been known since the mid 1970s. A description of an excimer laser, useful for integrated circuit lithography, is described in U.S. Pat. No. 5,023,884 issued Jun. 11, 1991 entitled “Compact Excimer Laser.” This patent has been assigned to Applicants' employer, and the patent is hereby incorporated herein by reference. The excimer laser described in Patent '884 is a high repetition rate pulse laser. These excimer lasers, when used for integrated circuit lithography, are typically operated in a fabrication line “around-the-clock” producing many thousands of valuable integrated circuits per hour; therefore, down-time can be very expensive. For this reason most of the components are organized into modules which can be replaced within a few minutes. Excimer lasers used for lithography typically must have its output beam reduced in bandwidth to a fraction of a picometer. Electric discharge gas lasers of the type described in Patent '884 utilize an electric pulse power system to produce the electrical discharges, between the two electrodes. In such prior art systems, a direct current power supply charges a capacitor bank called “the charging capacitor” or “C0” to a predetermined and controlled voltage called the “charging voltage” for each pulse. The magnitude of this charging voltage may be in the range of about 500 to 1000 volts in these prior art units. After C0 has been charged to the predetermined voltage, a solid state switch is closed allowing the electrical energy stored on C0 to ring very quickly through a series of magnetic compression circuits and a voltage transformer to produce high voltage electrical potential in the range of about 16,000 volts (or greater) across the electrodes which produce the discharges which lasts about 20 to 50 ns.
Excimer lasers such as described in the '884 patent have during the period 1989 to 2001 become the primary light source for integrated circuit lithography. More than 1000 of these lasers are currently in use in the most modern integrated circuit fabrication plants. Almost all of these lasers have the basic design features described in the '884 patent.
This is:
During the 1989–2001 period, output power of these lasers has increased gradually and beam quality specifications for pulse energy stability, wavelength stability and bandwidth have also become increasingly tighter. Operating parameters for a popular lithography laser model used widely in integrated circuit fabrication include pulse energy at 8 mJ, pulse rate at 2,500 pulses per second (providing an average beam power of up to about 20 watts), bandwidth at about 0.5 pm (FWHM) and pulse energy stability at +/−0.35%.
F2 lasers are well known. These lasers are similar to the KrF and ArF lasers. The basic differences are the gas mixture which in the F2 laser is a small portion of F2 with helium and/or neon as a buffer gas. The natural output spectrum of the F2 laser is concentrated in two spectral lines of narrow bandwidth, a relatively strong line centered at about 157.63 nm and a relatively weak line centered at about 157.52 nm.
A typical KrF laser has a natural bandwidth of about 300 pm measured full width half maximum (FWHM) centered at about 248 nm and for lithography use, it is typically line narrowed to less than 0.6 pm. (In this specification bandwidth values will refer to the FWHM bandwidths unless otherwise indicated.) ArF lasers have a natural bandwidth of about 500 centered at about 193 nm and is typically line narrowed to less than 0.5 pm. These lasers can be relatively easily tuned over a large portion of their natural bandwidth using the grating based line narrowing module referred to above. F2 lasers, as stated above, typically produce laser beams with most of its energy in two narrow spectral features (referred to herein sometimes as “spectral lines”) centered at about 157.63 nm and 157.52 nm. Often, the less intense of these two spectral lines (i.e., the 157.52 nm line) is suppressed and the laser is forced to operate at the 157.63 nm line. The natural bandwidth of the 157.63 nm line is pressure and gas content dependent and varies from about 0.6 to 1.2 pm (FWHM). An F2 laser with a bandwidth in this range can be used with lithography devices with a catadiophic lens design utilizing both refractive and reflective optical elements, but for an all-refractive lens design the laser beam bandwidth may have to be reduced to about 0.1 pm to produce desired results.
A well-known technique for reducing the band-width of gas discharge laser systems (including excimer laser systems) involves the injection of a narrow band “seed” beam into a gain medium. In one such system, a laser producing the seed beam called a “master oscillator” is designed to provide a very narrow bandwidth beam in a first gain medium, and that beam is used as a seed beam in a second gain medium. If the second gain medium functions as a power amplifier, the system is referred to as a master oscillator, power amplifier (MOPA) system. If the second gain medium itself has a resonance cavity (in which laser oscillations take place), the system is referred to as an injection seeded oscillator (ISO) system or a master oscillator, power oscillator (MOPO) system in which case the seed laser is called the master oscillator and the downstream system is called the power oscillator. Laser systems comprised of two separate systems tend to be substantially more expensive, larger and more complicated than comparable single chamber laser systems. Therefore, commercial application of these two chamber laser systems has been limited.
What is needed is a better laser design for a pulse gas discharge F2 laser for operation at repetition rates in the range of about 4,000 pulses per second or greater, permitting precise control of all beam quality parameters including wavelength and pulse energy.
The present invention provides an injection seeded modular gas discharge laser system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 to 10 mJ or greater for integrated outputs of about 20 to 40 Watts or greater. Two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. The chambers can be controlled separately permitting optimization of wavelength parameters in the master oscillator and optimization of pulse energy parameters in the amplifying chamber. A preferred embodiment is a F2 laser system configured as a MOPA and specifically designed for use as a light source for integrated circuit lithography. In this preferred embodiment, both of the chambers and the laser optics are mounted on a vertical optical table within a laser enclosure. In the preferred MOPA embodiment, each chamber comprises a single tangential fan providing sufficient gas flow to permit operation at pulse rates of 4000 Hz or greater by clearing debris from the discharge region in less time than the approximately 0.25 milliseconds between pulses. The master oscillator is equipped with a line selection package for selecting the strongest F2 spectral line. This preferred embodiment also includes a pulse multiplying module dividing each pulse from the power amplifier into either two or four pulses in order to reduce substantially the deterioration rates of lithography optics. Preferred embodiments of this invention utilize a “three wavelength platform”. This includes an enclosure optics table and general equipment layout that is the same for each of the three types of discharge laser systems expected to be in substantial use for integrated circuit fabrication during the early part of the 21st century, i.e., KrF, ArF, and F2 lasers.
FIGS. 1C and 1C1 show a second preferred embodiment.
FIGS. 13A1–13A6 show features of a preferred current return structure.
This first preferred embodiment is an F2 laser system; however, the system utilizes a modular platform configuration which is designed to accommodate either fluorine (F2), krypton-fluoride (KrF), or argon-fluoride (ArF) laser components. This platform design permits use of the same basic cabinet and many of the laser system modules and components for either of these three types of lasers. Applicants refer to this platform as their “three wavelength platform” since the three laser designs produce laser beams with wavelengths of about 248 nm for KrF, about 193 nm for ArF and about 157.63 for F2. This platform is also designed with interface components to make the laser systems at each of the three wavelengths compatible with modern lithography tools of all the major makers of such tools. Preferred F2 product options include:
The major components of this preferred laser system 2 are identified in
For many applications the laser system would preferably include a pulse stretching unit (not shown) to stretch the pulse duration beyond about 12 ns.
In the
A second general layout shown in
Portions of a third general layout is shown in
In each of the above three layouts provisions are preferably made to permit the output beam to exit at the left of the laser enclosure or the right of the enclosure in order to accommodate customer preference without major design changes.
In each of the above layouts some improvement in performance could be achieved by combining the commutator and the compression head into a single module. Applicants have resisted this combination in the past because any component failure requires replacement of the entire module. However, Applicants experience is that these units are extremely reliable so that the combined module is now feasible. In fact, one of the few causes of failure in the pulse power units has been failure of the electrical cable connecting the two modules. This cable would not be needed in the combined module.
The design and operation of the preferred laser systems and the modules referred to above are described in more detail below.
The master oscillator 10 shown in
In preferred embodiments the main charging capacitor banks for both the master oscillator and the power amplifier are charged in parallel so as to reduce jitter problems. This is desirable because the time for pulse compression in the pulse compression circuits of the two pulse power systems is dependent on the level of the charge of the charging capacitors. Preferably pulse energy output from the power amplifier is controlled on a pulse-to-pulse basis by adjustment of the charging voltage. This limits somewhat the use of voltage to control beam parameters of the master oscillator. However, laser gas pressure and F2 concentration can be easily controlled to achieve desirable beam parameters over a wide range pulse energy. Bandwidth decreases with decreasing F2 concentration and laser gas pressure. For the master oscillator the time between discharge and light-out is a function of F2 concentration (1 ns/kPa), so F2 concentration may also be changed to vary the timing but this may not be desirable since it could complicate other aspects of laser beam control.
The power amplifier in each of the three embodiments is comprised of a laser chamber which is very similar to the corresponding master oscillator discharge chamber. Having the two separate chambers allows the pulse energy and integrated energy in a series of pulses (called dose) to be controlled, to a large extent, separately from wavelength and bandwidth. This permits better dose stability. All of the components of the chamber are the same and are interchangeable during the manufacturing process. However, in operation, the gas pressure is preferably substantially lower in the MO as compared to the PA. The compression head 12B of the power amplifier as shown in
The power amplifier is configured for a single pass through the discharge region of the power amplifier discharge chamber in the
In the preferred embodiment shown in
A preferred resonant charger system is shown in
This circuit includes switch Q2 and diode D3, together known as a De-Qing switch. This switch improves the regulation of the circuit by allowing the control unit to short out the inductor during the resonant charging process. This “de-qing” prevents additional energy stored in the current of the charging inductor, L1, from being transferred to capacitor C0.
Prior to the need for a laser pulse the voltage on C-1 is charged to 600–800 volts and switches Q1–Q3 are open. Upon command from the laser, Q1 would close. At this time current would flow from C-1 to C0 through the charge inductor L1. As described in the previous section, a calculator on the control board would evaluate the voltage on C0 and the current flowing in L1 relative to a command voltage set point from the laser. Q1 will open when the voltage on the CO capacitor banks plus the equivalent energy stored in inductor L1 equals the desired command voltage. The calculation is:
Vf=[VC0s2+((L1*ILIs2)/C0)]0.5
Where:
Vf=The voltage on C0 after Q1 opens and the current in L1 goes to zero.
VC0s=The voltage on C0 when Q1 opens.
ILIs=The current flowing through L1 when Q1 opens.
After Q1 opens the energy stored in L1 starts transferring to the CO capacitor banks through D2 until the voltage on the CO capacitor banks approximately equals the command voltage. At this time Q2 closes and current stops flowing to CO and is directed through D3. In addition to the “de-qing” circuit, Q3 and R3 from a bleed-down circuit allow additional fine regulation of the voltage on CO.
Switch Q3 of bleed down circuit 216 will be commanded closed by the control board when current flowing through inductor L1 stops and the voltage on C0 will be bled down to the desired control voltage; then switch Q3 is opened. The time constant of capacitor C0 and resistor R3 should be sufficiently fast to bleed down capacitor C0 to the command voltage without being an appreciable amount of the total charge cycle.
As a result, the resonant charger can be configured with three levels of regulation control. Somewhat crude regulation is provided by the energy calculator and the opening of switch Q1 during the charging cycle. As the voltage on the CO capacitor banks nears the target value, the de-qing switch is closed, stopping the resonant charging when the voltage on C0 is at or slightly above the target value. In a preferred embodiment, the switch Q1 and the de-qing switch is used to provide regulation with accuracy better than +/−0.1%. If additional regulation is required, the third control over the voltage regulation could be utilized. This is the bleed-down circuit of switch Q3 and R3 (shown at 216 in
As indicated above, the pulse power system of the MO and the PA of the present invention each utilizes the same basic design (
In this section, we describe details of fabrication of the commutator and the compression head.
Solid state switch 46 is an P/N CM 800 HA-34H IGBT switch provided by Powerex, Inc. with offices in Youngwood, Pa. In a preferred embodiment, two such switches are used in parallel.
Inductors 48, 54 and 64 are saturable inductors similiar to those used in prior systems as described in U.S. Pat. Nos. 5,448,580 and 5,315,611.
A preferred sketch of saturable inductor 54 is shown in
A top and section view of the saturable inductor 64 is shown respectively in
Capacitor banks 42, 52, 62 and 82 (i.e., C0, C1, Cp-1 and Cp) as shown in
Applicants preferred method of connecting the capacitors and inductors is to solder them to positive and negative terminals on special printed circuit board having heavy nickel coated copper leads in a manner similar to that described in U.S. Pat. No. 5,448,580. Capacitor bank 62 and 64 is typically composed of a parallel array of high voltage ceramic capacitors from vendors such as Murata or TDK, both of Japan. In a preferred embodiment for use on this ArF laser, capacitor bank 82 (i.e., Cp) comprised of a bank of thirty three 0.3 nF capacitors for a capacitance of 9.9 nF; Cp-1 is comprised of a bank of twenty four 0.40 nF capacitors for a total capacitance of 9.6 nF; C1 is a 5.7:F capacitor bank and C0 is a 5.3:F capacitor bank.
Pulse transformer 56 is also similar to the pulse transformer described in U.S. Pat. Nos. 5,448,580 and 5,313,481; however, the pulse transformers of the present embodiment has only a single turn in the secondary winding and 24 induction units equivalent to 1/24 of a single primary turn for an equivalent step-up ratio of 1:24. A drawing of pulse transformer 56 is shown in
The secondary of the transformer is a single OD stainless steel rod mounted within a tight fitting insulating tube of PTFE (Teflon7). The winding is in four sections as shown in
The Cp capacitor 82 is comprised of a bank of thirty-three 0.3 nf capacitors mounted on top of the chamber pressure vessel. (Typically an ArF laser is operated with a lasing gas made up of 3.5% argon, 0.1% fluorine, and the remainder neon.) The electrodes are about 28 inches long which are separated by about 0.5 to 1.0 inch preferably about ⅝ inch. Preferred electrodes are described below. In this embodiment, the top electrode is referred to as the cathode and the bottom electrode is connected to ground as indicated in
In ArF, KrF and F2 electric discharge lasers, the electric discharge lasts only about 50 ns (i.e., 50 billionths of a second). This discharge creates a population inversion necessary for lasing action but the inversion only exists during the time of the discharge. Therefore, an important requirement for an injection seeded ArF, KrF or F2 laser is to assure that the seed beam from the master oscillator passes through discharge region of the power amplifier during the approximately 50 billionth of a second when the population is inverted in the laser gas so that amplification of the seed beam can occur. An important obstacle to precise timing of the discharge is the fact that there is a delay of about 5 microseconds between the time switch 42 (as shown in
Nevertheless in the preferred embodiment of the present invention described herein, Applicants have developed electrical pulse power circuits that provide timing control of the discharges of the two discharge chambers within a relative accuracy of less than about 2 ns (i.e., 2 billionths of a second). A block diagram of the two circuits are shown in
Applicants have conducted tests which show that timing varies with charging voltage by approximately 5–10 ns/volt. This places a stringent requirement on the accuracy and repeatability of the high voltage power supply charging the charging capacitors. For example, if timing control of 5 ns is desired, with a shift sensitivity of 10 ns per volt, then the resolution accuracy would be 0.5 Volts. For a nominal charging voltage of 1000 V, this would require a charging accuracy of 0.05% which is very difficult to achieve especially when the capacitors must be charged to those specific values 4000 times per second.
Applicants' preferred solution to this problem is to charge the charging capacitor of both the MO and the PA in parallel from the single resonant charger 7 as indicated in
Thus, in order to minimize timing variations (the variations are referred to as jitter) in this preferred embodiment, Applicants have designed pulse power components for both discharge chambers with similar components and have confirmed that the time delay versus voltage curves do in fact track each other as indicated in FIG. 4A. Applicants have confirmed that over the normal operating range of charging voltage, there is a substantial change in time delay with voltage but the change with voltage is virtually the same for both circuits. Thus, with both charging capacitors charged in parallel charging voltages can be varied over a wide operating range without changing the relative timing of the discharges.
Temperature control of electrical components in the pulse power circuit is also important since temperature variations can affect pulse compression timing (especially temperature changes in the saturable inductors). Therefore, a design goal is to minimize temperature variations and a second approach is to monitor temperature of the temperature sensitive components and using a feedback control adjust the trigger timing to compensate. Controls can be provided with a processor programmed with a learning algorithm to make adjustments based on historical data relating to past timing variations with known operating histories. This historical data is then applied to anticipate timing changes based on the current operation of the laser system.
The triggering of the discharge for each of the two chambers is accomplished separately utilizing for each circuit a trigger circuit such as one of those described in U.S. Pat. No. 6,016,325. These circuits add timing delays to correct for variations in charging voltage and temperature changes in the electrical components of the pulse power so that the time between trigger and discharge is held as constant as feasible. As indicated above, since the two circuits are basically the same, the variations after correction are almost equal (i.e., within about 2 ns of each other).
As indicated in
Since the relative timing of the discharges can have important effects on beam quality as indicated in the
Monitor Timing
The timing of the discharges can be monitored on a pulse-to-pulse basis and the time difference can be used in a feedback control system to adjust timing of the trigger signals closing switch 42. Preferably, the PA discharge would be monitored using a photocell to observe discharge fluorescence (called ASE) rather than the laser pulse since very poor timing could result if no laser beam being produced in the PA. For the MO either the ASE or the seed laser pulse could be used.
Bias Voltage Adjustment
The pulse timing can be increased or decreased by adjusting the bias currents through inductors LB1 LB2 and LB3 which provide bias for inductors 48, 54 and 64 as shown in
Adjustable Parasitic Load
An adjustable parasitic load could be added to either or both of the pulse power circuits downstream of the CO's.
Additional Feedback Control
Charging voltage and inductor temperature signals, in addition to the pulse timing monitor signals can be used in feedback controls to adjust the bias voltage or core mechanical separation as indicated above in addition to the adjustment of the trigger timing as described above.
Feedback control of the timing is relatively easy and effective when the laser is operating on a continuous basis. However, normally lithography lasers operate in a burst mode such as the following to process 20 areas on each of many wafers:
This process may be repeated for many hours, but will be interrupted from time-to-time for periods longer than 1 minute.
The length of down times will affect the relative timing between the pulse power systems of the MO and the PA and adjustment may be required in the trigger control to assure that the discharge in the PA occurs when the seed beam from the MO is at the desired location. By monitoring the discharges and the timing of light out from each chamber the laser operator can adjust the trigger timing (accurate to within about 2 ns) to achieve best performance.
Preferably a laser control processor is programmed to monitor the timing and beam quality and adjust the timing automatically for best performance. Timing algorithms which develop sets of bin values applicable to various sets of operating modes are utilized in preferred embodiments of this invention. These algorithms are in preferred embodiments designed to switch to a feedback control during continuous operation where the timing values for the current pulse is set based on feedback data collected for one or more preceding pulse (such as the immediately preceding pulse).
Timing algorithms such as those discussed above work very well for continuous or regularly repeated operation. However, the accuracy of the timing may not be good in unusual situations such as the first pulse after the laser is off for an unusual period of time such as 5 minutes. In some situations imprecise timing for the first one or two pulses of a burst may not pose a problem. A preferred technique is to preprogram the laser so that the discharges of the MO and the PA are intentionally out of sequence for one or two pulses so that amplification of the seed beam from the MO is impossible. For example, laser could be programmed to trigger the discharge of the PA 80 ns prior to the trigger of the MO. In this case, there will be no significant output from the laser but the laser metrology sensors can determine the timing parameters so that the timing parameters for the first output pulse is precise. Alternatively, the MO could be triggered early enough relative to the triggering of the PA so that the MO beam passes through the PA prior to the PA discharge.
To accommodate greater heat loads water cooling of pulse power components is provided in addition to the normal forced air cooling provided by cooling fans inside the laser cabinet in order to support operation pulse rates of 4 KHz or greater.
One disadvantage of water cooling has traditionally been the possibility of leaks near the electrical components or high voltage wiring. This specific embodiment substantially avoids that potential issue by utilizing a single solid piece of cooling tubing that is routed within a module to cool those components that normally dissipate the majority of the heat deposited in the module. Since no joints or connections exist inside the module enclosure and the cooling tubing is a continuous piece of solid metal (e.g. copper, stainless steel, etc.), the chances of a leak occurring within the module are greatly diminished. Module connections to the cooling water are therefore made outside the assembly sheet metal enclosure where the cooling tubing mates with a quick-disconnect type connector.
In the case of the commutator module a water cooled saturable inductor 54A is provided as shown in
Since the jacket 54A1 is held at ground potential, there are no voltage isolation issues in directly attaching the cooling tubing to the reactor housing. This is done by press-fitting the tubing into a dovetail groove cut in the outside of the housing as shown at 54A3 and using a thermally conductive compound to aid in making good thermal contact between the cooling tubing and the housing.
Although the IGBT switches “float” at high voltage, they are mounted on an aluminum base electrically isolated from the switches by a 1/16 inch thick alumina plate. The aluminum base plate which functions as a heat sink and operates at ground potential and is much easier to cool since high voltage isolation is not required in the cooling circuit. A drawing of a water cooled aluminum base plate is shown in
The series diodes also “float” at high potential during normal operation. In this case, the diode housing typically used in the design provides no high voltage isolation. To provide this necessary insulation, the diode “hockey puck” package is clamped within a heat sink assembly which is then mounted on top of a ceramic base that is then mounted on top of the water-cooled aluminum base plate. The ceramic base is just thick enough to provide the necessary electrical isolation but not too thick to incur more than necessary thermal impedance. For this specific design, the ceramic is 1/16″ thick alumina although other more exotic materials, such as beryllia, can also be used to further reduce the thermal impedance between the diode junction and the cooling water.
A second embodiment of a water cooled commutator utilizes a single cold plate assembly which is attached to the chassis baseplate for the IGBT's and the diodes. The cold plate may be fabricated by brazing single piece nickel tubing to two aluminum “top” and “bottom” plates. As described above, the IGBT's and diodes are designed to transfer their heat into the cold plate by use of the previously mentioned ceramic disks underneath the assembly. In a preferred embodiment of this invention, the cold plate cooling method is also used to cool the IGBT and the diodes in the resonant charger. Thermally conductive rods or a heat pipe can also be used to transfer heat from the outside housing to the chassis plate.
The water-cooled compression head is similar in the electrical design to a prior art air-cooled version (the same type ceramic capacitors are used and similar material is used in the reactor designs). The primary differences in this case are that the module must run at higher rep-rates and therefore, higher average power. In the case of the compression head module, the majority of the heat is dissipated within the modified saturable inductor 64A. Cooling the subassembly is not a simple matter since the entire housing operates with short pulses of very high voltages. The solution to this issue as shown in
The ferrite pieces are made from CN-20 material manufactured by Ceramic Magnetics, Inc. of Fairfield, N.J. A single piece of copper tubing (0.187″ diameter) is press fit and wound onto one winding form, around the housing 64A1 of inductor 64A and around the second winding form. Sufficient length is left at the ends to extend through fittings in the compression head sheet metal cover such that no cooling tubing joints exist within the chassis.
The inductor 64A comprises a dovetail groove as shown at 64A2 similar to that used in the water-cooled commutator first stage reactor housing. This housing is much the same as previous air-cooled versions with the exception of the dovetail groove. The copper cooling-water tubing is press fit into this groove in order to make a good thermal connection between the housing and the cooling-water tubing. Thermally conductive compound is also added to minimize the thermal impedance.
The electrical design of inductor 64A is changed slightly from that of 64 shown in
As a result of this water-cooled tubing conductive path from the output potential to ground, the bias current circuit is now slightly different. As before, bias current is supplied by a dc-dc converter in the commutator through a cable into the compression head. The current passes through the “positive” bias inductor LB2 and is connected to the Cp-1 voltage node. The current then splits with a portion returning to the commutator through the HV cable (passing through the transformer secondary to ground and back to the dc-dc converter). The other portion passes through the compression head reactor Lp-1 (to bias the magnetic switch) and then through the cooling-water tubing “negative” bias inductor LB3 and back to ground and the dc-dc converter. By balancing the resistance in each leg, the designer is able to ensure that sufficient bias current is available for both the compression head reactor and the commutator transformer.
The “positive” bias inductor LB2 is made very similarly to the “negative” bias inductor LB3. In this case, the same ferrite bars and blocks are used as a magnetic core. However, two 0.125″ thick plastic spacers are used to create an air gap in the magnetic circuit so that the cores do not saturate with the dc current. Instead of winding the inductor with cooling-water tubing, 18 AWG teflon wire is wound around the forms.
In this preferred embodiment, three of the pulse power electrical modules utilize blind mate electrical connections so that all electrical connections to the portions of the laser system are made merely by sliding the module into its place in the laser cabinet. These are the AC distribution module, the power supply module and the resonant charges module. In each case a male or female plug on the module mates with the opposite sex plug mounted at the back of the cabinet. In each case two approximately 3-inch end tapered pins on the module guide the module into its precise position so that the electrical plugs properly mate. The blind mate connectors such as AMP Model No. 194242-1 are commercially available from AMP, Inc. with offices in Harrisburg, Pa. In this embodiment connectors are for the various power circuits such as 208 volt AC, 400 volt AC, 1000 Volt DC (power supply out and resonant charges in) and several signal voltages. These blind mate connections permit these modules to be removed for servicing and replacing in a few seconds or minutes. In this embodiment blind mate connections are not used for the commutator module the output voltage of the module is in the range of 20 to 30,000 volts. Instead, a typical high voltage connector is used.
FIGS. 13 and 13A(1) show details of an improved discharge configuration utilized in preferred embodiments of the present invention. This configuration includes an electrode configuration that Applicants call a blade-dielectric electrode. In this design, the anode 540 comprises a blunt blade shaped electrode 542 with dielectric spacers 544 mounted on both sides of the anode as shown to improve the gas flow in the discharge region. The spacers are attached to anode support bar 546 with screws at each end of the spacers beyond the discharge region. The screws allow for thermal expansion slippage between the spacers and the bar. The anode is 26.4 inches long and 0.439 inches high. It is 0.284 inches wide at the bottom and 0.141 inches wide at the top. It is attached to flow shaping anode support bar 546 with screws through sockets that allow differential thermal expansion of the electrode from its center position. The anode is comprised of a copper based alloy preferably C36000, C95400, or C19400. Cathode 541 has a cross section shape as shown in
An alternative dielectric spacer design for the anode is shown in FIG. 13A2 to improve flow even more. In this case the spacers mate more perfectly with the flow shaping anode support bar to provide a better gas flow path. Applicants call this their “fast back” blade dielectric anode design.
A second preferred pulse power circuit is shown in FIGS. 5C1, 5C2 and 5C3. This circuit is similar to the one described above but utilizes a higher voltage power supply for charging C0 to a higher value. As in the above described embodiments, a high voltage pulse power supply unit operating from factory power at 230 or 460 volts AC, is power source for a fast charging resonant charger as described above and designed for precise charging two 2.17: F at frequencies of 4000 to 6000 Hz to voltages in the range of about 1100 V to 2250 V. The electrical components in the commutator and compression head for the master oscillator are as identical as feasible to the corresponding components in the power amplifier. This is done to keep time responses in the two circuits as identical as feasible. Switches 46 are banks of two IGBT switches each rated at 3300 V and arranged in parallel. The C0 capacitor banks 42 is comprised of 128 0.068: F 1600 V capacitors arranged in 64 parallel legs to provide the 2.17: F C0 bank. The C1 capacitor banks 52 are comprised of 136 0.068: F 1600 V capacitors arranged in 68 parallel legs to provide a bank capacitance of 2.33: F. The Cp-1 and Cp capacitor banks are the same as those described above with reference to
The output pulse length measured in tests conducted by Applicants on these F2 lasers is in the range of about 12 ns and is to some extent a function of the relative timing of the two discharges. A longer pulse length (other things being equal) can increase the lifetime of optical components of lithography equipment.
Applicants have identified several techniques for increasing pulse length. As indicated above, the relative time between discharges can be optimized for pulse length. The pulse power circuits of both the MO and the PA could be optimized for longer pulses using techniques such as those described in U.S. patent application Ser. No. 09/451,995 incorporated herein by reference. An optical pulse multiplier system such as one of those described in U.S. Pat. No. 6,067,311, incorporated by reference herein, could be added downstream of the PA to reduce the intensity of individual pulses. A preferred pulse multiplier unit (also called a pulse stretcher) is described in the next section. This pulse multiplier could be made a part of the beam path to lens components of a lithography tool. The chamber could be made longer and the electrodes could be configured to produce traveling wave discharges designed for longer pulse lengths.
A preferred pulse multiplier unit is shown in
The pulse stretcher unit could be installed in the back of vertical optical table 11 as suggested above or it could be installed on top of the table or even inside of it.
Pulse energy and dose energy are preferably controlled with a feedback control system and algorithm such as that described above. The pulse energy monitor can be at the laser as closer to the wafer in the lithography tool. Using this technique charging voltages are chosen to produce the pulse energy desired. In the above preferred embodiment, both the MO and the PA are provided with the same charging voltage since the CO's are charged in parallel.
As discussed above, Applicants have determined that this technique works very well and greatly minimize timing jitter problems. This technique, however, does reduce to an extent the laser operator's ability to control the MO independently of the PA. However, there are a number of operating parameters of the MO and the PA that can be controlled separably to optimize performance of each unit. These other parameters include: laser gas pressure, F2 concentration and laser gas temperature. These parameters preferably are controlled independently in each of the two chambers and regulated in a processor controlled feedback arrangement.
The present invention provides a laser system capable of much greater pulse energy and output power than prior art single chamber high repetition rate gas discharge lasers. With this system the master oscillator to a large extent determines the wavelength and the bandwidth and the power amplifier primarily controls the pulse energy. The pulse energy needed for an efficient seeding of the power amplifier is can be as low as a small fraction of a mJ as shown in
These techniques include:
Spatial filtering is effective at reducing the integrated 95% bandwidth. However, all direct spatial filtering techniques previously proposed required at least concentrating the beam and in most cases actually focusing the beam. Additionally all previous designs required multiple optical elements. A simple, compact spatial filter, that does not require a focused beam, would be more readily adaptable for incorporation inside the laser resonator if spatial filtering is desired.
A preferred filter is a single prism approximately 2 inches in length. The entrance and exit faces of the prism are parallel to each other and normal to the incident beam. Two other faces would be parallel to each other but orientated at an angle equal to the critical angle with respect to the entrance and exit faces. At a wavelength of about 157 nm the critical angle in CaF2 is 39.89 degrees. The only coatings required would be normal incidence anti-reflection coatings on the entrance and exit faces of the prism.
The spatial filter would work in the following manner. The beam would enter at normal incidence to the entrance face of the prism. The beam would then propagate to the critical angle face of the prism. If the beam was collimated all rays would be incident at the critical angle at this second face. However, if the beam if diverging or converging some of the rays will strike this face at angles greater than and less than the critical angle. All rays striking this face at or greater than the critical angle will be reflected at 100%. Rays striking this face at an angle less than the critical angle will be reflected at values less than 100% and will be attenuated. All rays that are reflected will be incident at the opposite face of the prism at the same angle where they will also be attenuated by the same amount. In the design proposed there will be a total of six reflections for each pass. The reflectivity for p-polarized light at an angle of 1 mrad less than the critical angle is about 71%. Therefore, all rays with incident angles that differ from the critical angle by 1 mrad or more will be transmitted at the exit face at less than 13% of their original intensity.
However, a single pass of this filter will only be one sided. All rays that are incident at angles greater than the critical angle reflect at 100%. Once exiting the spatial filter prism, the beam will be incident upon a mirror. Inside the laser resonator this mirror could be the output coupler. After reflecting off the mirror, the rays will re-enter the spatial filter prism, but with one critical difference. All rays that exited the spatial filter at angles that were greater than the critical angle will be inverted after reflecting off the mirror. These rays will now re-enter the prism at values less than the critical angle and will be attenuated. It is this second pass through the prism that changes the transmission function of the prism from a one sided filter into a true bandpass filter.
In preferred embodiments a cylindrical refractive telescope is provided between the output of the master oscillator and the input of the power amplifier. This controls the horizontal size of the beam entering the power amplifier. This telescope can also be designed using well known techniques to control the horizontal divergence.
In preferred embodiments of the present invention pulse energy is monitored controlled on a pulse to pulse basis with feedback from a fast photodiode energy monitor. In many applications, pulse-by-pulse monitoring of wavelength and bandwidth are not provided since the natural centerline wavelength and bandwidth of the major F2 line is relatively invariable. If desired, however, both wavelength and bandwidth could be monitored generally in the same manner as in prior art excimer lasers but at the 157 nm wavelength range.
Preferably power monitors (p-cells) should be provided at the output of the master oscillator, after the power amplifies and after the pulse multiplies. Preferably a p-cell should also be provided for monitoring any back reflections into the master oscillator. Such back reflections could be amplified in the oscillator and damage the master oscillator optical components. The back reflection signal from the back reflection monitor is used to shut the laser down if a danger threshold is exceeded. Also, the system should be designed to avoid glint in the beam path that might cause any significant back reflection.
The beam parameter measurement and control for this laser is described below. The wavemeter used in the present embodiment is similar to the one described in U.S. Pat. No. 5,978,394 and some of the description below is extracted from that patent. At wavelengths in the range of 157 nm, wavelength and bandwidth metrology components are subject to radiation damage so Applicants recommend that these measurements be made periodically rather than on a pulse to pulse basis. For example, wavelength and bandwidth could be monitored for 30 pulses once each 10 minute period. At this rate the metrology components for the F2 lasers should have lifetimes at least comparable to KrF and ArF lasers. To accomplish this a shutter should be provided for the wavemeter to block the beam access to the wavelength and bandwidth metrology components.
The optical equipment in these units measure pulse energy, wavelength and bandwidth. These measurements are used with feedback circuits to maintain pulse energy and wavelength within desired limits.
A small portion of the laser beam is reflected to an energy detector which comprises a very fast photo diode which is able to measure the energy of individual pulses occurring at the rate of 4,000 pulses per second. The pulse energy is about 10 mJ, and the output of detector 69 is fed to a computer controller which uses a special algorithm to adjust the laser charging voltage to precisely control the pulse energy of future pulses based on stored pulse energy data in order to limit the variation of the energy of individual pulses and the integrated energy of bursts of pulses.
Based on the measurement of pulse energy of each pulse as described above, the pulse energy of subsequent pulses are controlled to maintain desired pulse energies and also desired total integrated dose of a specified number of pulses all as described in U.S. Pat. No. 6,005,879, Pulse Energy Control for Excimer Laser which is incorporated by reference herein.
In preferred embodiments, the strongest of the natural F2 resonant lines is selected using a five-prism line selector as shown in
Mirror 114B is positioned to reflect the beam upward to mirror 114C which is positioned to reflect the beam through an aperture (not shown) into the discharge region of the power amplifier as shown 12A as shown in
An alternate prism line selection unit is shown in
An alternate to the prism based line selector shown in
The advantages of this scheme are its inherent robustness, the ease of adjustment, the reduction of optical elements and the possibility to solely use anti-reflective coatings on the crystal for small (close to zero) incident angles.
FIG. 16C1 shows schematically a line selected F2 laser system with intra-cavity Lyot filter. The resonator is built of high reflective mirror 116A, the birefringent dispersive crystal 116B, the (chamber) Brewster windows 116C and 116D and the output coupling mirror 116E which is partially reflecting. The optical gain is generated within the gas discharge in chamber 116F.
FIG. 16C2 shows another design, which uses one or several additional Brewster elements 116G to increase the discrimination between both p- and s-polarization.
FIG. 16C3 shows an alternative design for the high reflecting mirror and the crystal. In fact, both elements can be combined applying the dielectric reflective coating 116H directly on the rear side of the crystal 116B, which will reduce the amount of optical elements required.
The embodiment shown in
When a prism line selector is used inside the resonant cavity it is more important that optical losses in a selected polarization be minimized. A preferred design of such a line selector comprises five CaF or MgF prisms oriented such that entering and leaving the prisms are at Brewster angle (about 57.3 degrees). This permits use of prisms without anti-reflection coatings. A sketch showing this line selection approach is shown in
The novel features here are to avoid the need for an anti-reflection coating on the incidence face by using Brewster's angle (providing zero reflection coefficient for appropriately polarized laser) and placing the reflective coating directly on the rear surface of the optic.
The output coupler of gas discharge lasers configured as oscillators is typically a partially reflecting mirror which is usually a wedge shaped optical element with one surface oriented transverse to the beam path and coated to reflect a desired portion of the beam and transmit the remaining portion. The other surface is often coated with an anti-reflection coating and may be oriented as an angle other than transverse to the beam path so that any reflections from this surface is not returned to the gain region.
Coated surfaces sometimes provide lifetime problems when used in these high intensity UV applications. A solution is shown in
In spite of efforts to maintain constant conditions in the beam path, many laser operations such as burst mode operation, such as those described above, produce transient conditions which in some cases cause significant transient steering of the output laser beam. This transient steering can be corrected with an active beam direction control system which includes a beam direction monitor and beam direction control mechanism. In a preferred embodiment the beam direction monitor is a split detector, also known as a bi-cell detector or segmented detector. This type of detector has two distinct photosensitive elements separated by a small gap. The ratio of the outputs of the two elements is a measure of the beam direction. The beam direction control mechanism can be a pivot mirror preferably in the line selection package 10C in
As indicated above, a small amount of beam steering in the beam path can result from operations such as burst mode operation commonly used in laser integrated circuit lithography. Even very minor changes in the beam direction can be extremely undesirable. As indicated above, techniques can be utilized to eliminate the causes of beam steering. Also, pivoting of optical elements such as prisms or mirrors could correct for unwanted changes in beam directions. Another approach is to correct for unwanted beam direction changes by controlling the purge gas pressure in portions of the beam path. In a preferred embodiment the purge pressure in the line selection package is controlled to compensate for beam direction changes. Applicants have determined that for the five-prism line selector shown in
The preferred embodiment of this invention has a gas control module as indicated in
Another technique for providing continuous flow of laser gas into the chambers which Applicants call its binary fill technique is to provide a number (such as 5) fill lines each successive line orificed to permit double the flow of the previous line with each line having a shut off valve. The lowest flow line is orificed to permit minimum equilibrium gas flow. Almost any desired flow rate can be achieved by selecting appropriate combinations of valves to be opened. Preferably a buffer tank is provided between the orificed lines and the laser gas source which is maintained at a pressure at about twice the pressure of the laser chambers.
In preferred embodiments the two chambers and the laser optics are mounted on a vertically oriented optical table. The table is preferably supported in the laser frame with a three-point kinematic mount. One preferred embodiment arrangement is shown in FIG. 1C1. Metal straps are provided on table 11 at locations A, B, and C where the table is mounted to the laser frame 4 (not shown in FIG. 1C1). A swivel joint is provided at location A which anchors the table but permits it to swivel. A ball and V-groove is provided at location B which restricts rotation in the plane of the bottom surface of the table and rotation in the plane of the table front surface. A ball and slot groove is provided at location C which restricts rotation around the A–B axis.
Preferred embodiments are designed to operate at pulse repetition rates of 4,000 pulses per second. Clearing the discharge region of discharge affected gas between pulses requires a gas flow between the electrodes 18A and 20A of up to about 67 m/s. To achieve these speeds, the diameter of tangential fan unit has been set at 5 inches (the length of the blade structure is 26 inches) and the rotational speed has been increased to about 3500 rpm. To achieve this performance the embodiment utilizes two motors which together deliver up to about 4 kw of drive power to the fan blade structure. At a pulse rate of 4000 Hz, the discharge will add about 12 kw of heat energy to the laser gas. To remove the heat produced by the discharge along with the heat added by the fan four separate water cooled finned heat exchanger units 58A are provided. The motors and the heat exchangers are described in detail below.
A preferred embodiment of the present invention utilizes four finned water cooled heat exchangers 58A shown generally in
A cross sectional drawing of one of the heat exchangers is shown in
The components of the heat exchanger includes a finned structure 302 which is machined from solid copper (CU 11000) and contains twelve fins 303 per inch. Water flow is through an axial passage having a bore diameter of 0.33 inch. A plastic turbulator 306 located in the axial passage prevents stratification of water in the passage and prevents the formation of a hot boundary layer on the inside surface of the passage. A flexible flange unit 304 is a welded unit comprised of inner flange 304A, bellows 304B and outer flange 304C. The heat exchanger unit includes three c-seals 308 to seal the water flowing in the heat exchanger from the laser gas. Bellows 304B permits expansion and contraction of the heat exchanger relative to the chamber. A double port nut 400 connects the heat exchanger passage to a standard 5/16 inch positional elbow pipe fitting which in turn is connected to a water source. O-ring 402 provides a seal between nut 400 and finned structure 302. In preferred embodiments cooling flow direction in two of the units is opposite the other two minimizing axial temperature gradients.
In a preferred embodiment, the turbulator is comprised of four off-the-shelf, long in-line mixing elements which are typically used to mix epoxy components and are available from 3M Corporation (Static Mixer, Part No. 06-D1229-00). The in-line mixers are shown at 306 in
In this preferred embodiment, gas flow into and out of the discharge region has been greatly improved over prior art laser chambers. The region upstream of the discharge and adjacent to the exit of the cross flow fan is shaped to form a smooth transition from a large cross section to the small cross section of the discharge. The cross section of the region directly downstream of the discharge increases smoothly for the small value of the discharge to a much greater value before the gas is forced to turn 90° into the heat exchangers. This arrangement minimizes the pressure drop and associated turbulence caused by high velocity flow over sharp steps. Providing this smooth gradually expanding flow path in the direction away from the laser also reduces adverse acoustic effects resulting from acoustic waves from a pulse reflecting back to the discharge region at the time of a subsequent pulse. Techniques for reducing these effects are described in U.S. Pat. No. 6,212,211 and U.S. Pat. No. 6,317,447 both of which are incorporated herein by reference. The time required for an acoustic wave to return to the discharge region is dependent to a significant extent. The result is reflection from a particular surface could be a problem only at a particular combination of repetition rate and gas temperature. If this reflecting surface cannot be easily eliminated an alternate solution could be to avoid operation at the problem temperature-repetition rate combination. One solution could be to program the laser controller to automatically change the gas temperature as necessary to avoid operation at a problem combination.
This first preferred embodiment of the present invention provides a large tangential fan driven by dual motors for circulating the laser gas. This preferred arrangement as shown in
A cross section blade structure of the fan is shown as 64A in
This embodiment as shown in
This first embodiment of the present invention includes an ultra-pure N2 purge system which provides greatly improved performance and substantially increases component lifetime.
An important feature of the present invention is the inclusion of N2 filter 18. In the past, makers of excimer lasers for integrated circuit lithography have believed that a filter for N2 purge gas was not necessary since N2 gas specification for commercially available N2 is almost always good enough so that gas meeting specifications is clean enough. Applicants have discovered, however, that occasionally the source gas may be out of specification or the N2 lines leading to the purge system may contain contamination. Also lines can become contaminated during maintenance or operation procedures. Applicants have determined that the cost of the filter is very good insurance against an even low probability of contamination caused damage.
A preferred N2 filter is Model 500K Inert Gas Purifier available from Aeronex, Inc. with offices in San Diego, Calif. This filter removes H2O, O2, CO, CO2, H2 and non-methane hydrocarbons to sub-parts-per-billion levels. It removes 99.9999999 percent of all particulate 0.003 microns or larger.
A flow monitor in unit 22 is provided for each of the five purged components. These are commercially available units having an alarm feature for low flow.
Preferably all piping is comprised of stainless steel (316SST) with electro polished interior. Certain types of plastic tubing, comprised of PFA 400 or ultra-high purity Teflon, may be also used.
A portion or all of the purge gas could be recirculated as shown in
In preferred embodiments the line selection package is purged with helium and the remainder of the beam path is purged with nitrogen. Helium has a much lower index of refraction than nitrogen so thermal effects in the LNP are minimized with the use of helium. However, helium is about 1000 times more expensive than nitrogen. Also, control of beam steering by charging purge pressure would be more difficult with helium.
Preferred techniques for enclosing the beam path are described in U.S. patent application Ser. No.10/000,991, filed Nov. 14, 2001, entitled “Gas Discharge Laser With Improved Beam Path” which is incorporated by reference herein.
Applicants have developed an easy sealing bellows seals to permit quick sealing of the beam path to a vacuum compatible seal when reinstalling laser modules in the beam path. The reader should note that although the seals provide vacuum quality seals of the respective sealed portions of the beam path, the path is not operated as a vacuum but typically at pressures slightly in excess of atmospheric.
Fast sealing is important since there is a great need that these modules be replaceable within a few minutes. The basic design of the easy sealing bellows seal is shown in
Flange part 93B comprises tapered flange 120. This flange has a 20° taper as shown in
Important advantages of this seal system are:
The seal is made between flange part 93B and 93A with metal c seal 93C sandwiched in between the two parts as indicated in
Applicants have discovered through experiments with F2 lasers at high repetition rates, such as 4000 Hz, several milli Joule per pulse beam will suffer divergence and deflectance transients due to beam interaction with the purge gas. Applicants have also determined that these effects can be minimized by producing purge flows transverse to the beam path. Applicants have identified several techniques for doing this. Four such techniques are shown in FIGS. 19C1, 19C2, 19C3, and 19C4. FIGS. 19C1 and 2 show baffles in the beam path which encourage transverse purge flow. FIG. 19C3 show a fan in the purge line for recirculating the purge gas and in 19C4 the purge flow is directed by purge nozzles transverse to the beam path.
Providing a confined vacuum type purge path complicates alignment of the laser optics. In prior art systems, the purge path had to be broken to insert a small visible light alignment laser. In preferred embodiments, a small visible light laser may be included as a permanent part of the beam path which is very useful during maintenance operations. Preferably, the alignment laser is a helium-neon laser or small diode laser mounted on the rear side of high reflectance mirror 10D which for this design should be comprised of a CaF plate having a dielectric reflecting coating designed to reflect a very high portion of 157 nm ultraviolet light but transmit a high portion of visible light. The alignment laser can then be used for alignment of the entire beam path through the MO, the PA and the beam stretcher, all without breaking the purge path. (The reader should understand that any line selection optics will alter the direction of the alignment laser. The line selection optics could be removed to align the rest of the system or the direction of the alignment laser beam could be adjusted to take into account the line selection optics.)
The vacuum quality purge system described herein represents a major improvement in long term excimer laser performance especially for F2 lasers. Contamination problems are basically eliminated which has resulted in substantial increases in component lifetimes and beam quality. In addition, since leakage has been eliminated except through outlet ports the flow can be controlled to desired values which has the effect of reducing N2 requirements by about 50 percent.
This first preferred embodiment includes a sealed shutter unit 500 with a built in power meter as shown in
Power meter 506 is operated in a similar fashion to place pyroelectric photo detector in the path of the output laser beam as shown in
Prior art chamber windows are often placed at Brewster's angle which results in about 100% transmission of the polarization direction at about 58 percent in the p-polarization direction. In other prior art designs, the windows are placed at bout 45 degrees in which case transmission of the s-polarization is a little less and the p a little more than the above values.
For F2 lasers, Applicants have determined that with the chamber windows at somewhat less than Brewster's, there is substantial competition in the gain region between the s and p polarization. This is because there typically is very high gain in the discharge region of the F2 lasers compared to prior art KrF and ArF lasers. This competition is not desirable because in most applications light at s-polarization is not useful and is typically lost as undesirable heat. Thus, there is a need to minimize the amount of s-polarization produced in the laser.
A preferred technique which can be relatively easily accomplished is to increase the angle of incidence of the chamber windows substantially above the Brewster's angle. For example, at Brewster's angle for a 157 nm F2 beam about 100% of the p-polarization is transmitted and about 83% of the s-polarization is transmitted. If we increase the angle of incident to 64° the p-polarization transmission is reduced to about 99% but only 76% of the s-polarization is transmitted. Since in the master oscillator the light output from the gain region has made about two passes through each of the two windows (for 4 window passes and 2 surfaces for each window) the ratio of the two polarizations in the output beam (assuming 64° window angles) is:
Applicants tests with 47° windows about 72% of the light is p-polarization and 28% at s-polarization.
By changing the angle of the windows to 64° and adding an additional window at 64° in front of the high reflection mirror 10D in
Various modifications may be made to the present invention without altering its scope. Those skilled in the art will recognize many other possible variations. For example, the pulse power circuit could be a common circuit up to the output of pulse transformer 56 as shown in
The present invention is a divisional of Ser. No. 10/056,619, filed on Jan. 23, 2002 wich is a continuation-in-part of Ser. No. 10/036,676, filed Dec. 21, 2001, Ser. No. 10/036,727, filed Dec. 21, 2001, Ser. No. 10/012,002, filed Nov. 30, 2001, Ser. No. 10/006,913, filed Nov. 29, 2001, Ser. No. 10/000,991, filed Nov. 14, 2001, Ser. No. 09/970,503, filed Oct. 3, 2001, Ser. No. 09/943,343, filed Aug. 29, 2001, Ser. No. 09/879,311, filed Jun. 6, 2001, Ser. No. 09/855,310, filed May 14, 2001, Ser. No. 09/854,097, filed May 11, 2001, Ser. No. 09/848,043, filed May 3, 2001, Ser. No. 09/829,475, filed Apr. 9, 2001, Ser. No. 09/771,789, filed Jan. 29, 2001, Ser. No. 09/768,753, filed Jan. 23, 2001, Ser. No. 09/684,629, filed Oct. 6, 2000, Ser. No. 09/473,795, filed Dec. 28, 1999, Ser. No. 09/473,852, filed Dec. 27, 1999, Ser. No. 09/459,165, filed Dec. 10, 1999 and Ser. No. 09/309,478, filed May 10, 1999. This invention relates to electric discharge gas lasers and in particular to high repetition rate F2 lasers.
| Number | Name | Date | Kind |
|---|---|---|---|
| 4223279 | Bradford, Jr. et al. | Sep 1980 | A |
| 4455658 | Sutter et al. | Jun 1984 | A |
| 4959840 | Akins et al. | Sep 1990 | A |
| 5023884 | Akins et al. | Jun 1991 | A |
| 5025445 | Anderson et al. | Jun 1991 | A |
| 5025446 | Kuizenga | Jun 1991 | A |
| 5189678 | Ball et al. | Feb 1993 | A |
| 5313481 | Cook et al. | May 1994 | A |
| 5315611 | Ball et al. | May 1994 | A |
| 5359620 | Akins | Oct 1994 | A |
| 5448580 | Birx et al. | Sep 1995 | A |
| 5471965 | Kapich | Dec 1995 | A |
| 5852621 | Sandstrom | Dec 1998 | A |
| 5863017 | Larson et al. | Jan 1999 | A |
| 5953360 | Vitruk et al. | Sep 1999 | A |
| 5978394 | Newman et al. | Nov 1999 | A |
| 6005879 | Sandstrom et al. | Dec 1999 | A |
| 6016325 | Ness et al. | Jan 2000 | A |
| 6018537 | Hofmann et al. | Jan 2000 | A |
| 6028880 | Carlesi et al. | Feb 2000 | A |
| 6067311 | Morton et al. | May 2000 | A |
| 6094448 | Fomenkov et al. | Jul 2000 | A |
| 6104735 | Webb | Aug 2000 | A |
| 6109574 | Pan et al. | Aug 2000 | A |
| 6128323 | Myers et al. | Oct 2000 | A |
| 6151349 | Gong et al. | Nov 2000 | A |
| 6164116 | Rice et al. | Dec 2000 | A |
| 6192064 | Algots et al. | Feb 2001 | B1 |
| 6208674 | Webb et al. | Mar 2001 | B1 |
| 6208675 | Webb | Mar 2001 | B1 |
| 6212211 | Azzola et al. | Apr 2001 | B1 |
| 6219368 | Govorkov | Apr 2001 | B1 |
| 6240117 | Gong et al. | May 2001 | B1 |
| 6317447 | Partlo et al. | Nov 2001 | B1 |
| 6414979 | Ujazdowski et al. | Jul 2002 | B2 |
| 6477193 | Oliver et al. | Nov 2002 | B2 |
| 6493374 | Fomenkov et al. | Dec 2002 | B1 |
| 6556612 | Ershov et al. | Apr 2003 | B2 |
| 6567450 | Myers et al. | May 2003 | B2 |
| 6618421 | Das et al. | Sep 2003 | B2 |
| 6625191 | Knowles et al. | Sep 2003 | B2 |
| 6782031 | Hoffmann et al. | Aug 2004 | B1 |
| 6801560 | Smith et al. | Oct 2004 | B2 |
| 20020154668 | Knowles et al. | Oct 2002 | A1 |
| 20030099269 | Ershov et al. | May 2003 | A1 |
| Number | Date | Country | |
|---|---|---|---|
| 20040258122 A1 | Dec 2004 | US |
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