Glenn W. Travis

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Linear reciprocating disposable belt polishing method and apparatus
- Patent number 6,746,320
- Issue date Jun 8, 2004
- Lam Research Corporation
- Wilbur Krusell
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer carrier head assembly
- Patent number 6,666,756
- Issue date Dec 23, 2003
- Lam Research Corporation
- Glenn W. Travis
- B24 - GRINDING POLISHING
Information Patent Grant
System for wafer carrier in-process clean and rinse
- Patent number 6,659,116
- Issue date Dec 9, 2003
- Lam Research Corporation
- Damon Vincent Williams
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for wafer carrier in-process clean and rinse
- Patent number 6,505,636
- Issue date Jan 14, 2003
- Lam Research Corporation
- Glenn W. Travis
- B24 - GRINDING POLISHING
Information Patent Grant
Linear reciprocating disposable belt polishing method and apparatus
- Patent number 6,500,056
- Issue date Dec 31, 2002
- Lam Research Corporation
- Wilbur Krusell
- B24 - GRINDING POLISHING
Information Patent Grant
Locking mechanism for detachably securing a wafer carrier to a conv...
- Patent number 6,486,550
- Issue date Nov 26, 2002
- Lam Research Corporation
- Glenn W. Travis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for chemical mechanical planarization and poli...
- Patent number 6,428,394
- Issue date Aug 6, 2002
- Lam Research Corporation
- Ben Mooring
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head for chemical mechanical polishing using linear plana...
- Patent number 6,425,812
- Issue date Jul 30, 2002
- Lam Research Corporation
- Anil K. Pant
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad used in chemi...
- Patent number 6,328,637
- Issue date Dec 11, 2001
- Lam Research Corporation
- Michael Labunsky
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for chemically-mechanically polishing semicond...
- Patent number 6,261,959
- Issue date Jul 17, 2001
- Lam Research Corporation
- Glenn Travis
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad used in chemi...
- Patent number 6,086,460
- Issue date Jul 11, 2000
- Lam Research Corporation
- Michael Labunsky
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Linear reciprocating disposable belt polishing method and apparatus
- Publication number 20020123298
- Publication date Sep 5, 2002
- Lam Research Corporation
- Wilbur Krusell
- B24 - GRINDING POLISHING

Glenn W. Travis

Person

Patents Grantslast 30 patents

Linear reciprocating disposable belt polishing method and apparatus

Wafer carrier head assembly

System for wafer carrier in-process clean and rinse

Apparatus for wafer carrier in-process clean and rinse

Linear reciprocating disposable belt polishing method and apparatus

Locking mechanism for detachably securing a wafer carrier to a conv...

Method and apparatus for chemical mechanical planarization and poli...

Polishing head for chemical mechanical polishing using linear plana...

Method and apparatus for conditioning a polishing pad used in chemi...

Method and apparatus for chemically-mechanically polishing semicond...

Method and apparatus for conditioning a polishing pad used in chemi...

Patents Applicationslast 30 patents

Linear reciprocating disposable belt polishing method and apparatus