Gwo-Chuan Tzu

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support plate with improved lift pin sealing
- Patent number 10,857,655
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- Olkan Cuvalci
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus to improve substrate temperature uniformity
- Patent number 10,793,951
- Issue date Oct 6, 2020
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid assembly for a processing system to facilitate sequential depos...
- Patent number 10,280,509
- Issue date May 7, 2019
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus to improve substrate temperature uniformity
- Patent number 9,957,615
- Issue date May 1, 2018
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with multi-piece sealing surface
- Patent number 9,916,994
- Issue date Mar 13, 2018
- Applied Materials, Inc.
- Olkan Cuvalci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for variable substrate temperature control
- Patent number 9,783,889
- Issue date Oct 10, 2017
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with integrated vacuum and edge purge conduits
- Patent number 9,633,889
- Issue date Apr 25, 2017
- Applied Materials, Inc.
- Olkan Cuvalci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid assembly for a processing system to facilitate sequential depos...
- Patent number 9,587,310
- Issue date Mar 7, 2017
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with controlled sealing gap
- Patent number 9,543,186
- Issue date Jan 10, 2017
- Applied Materials, Inc.
- Olkan Cuvalci
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate support for substrate backside contamination control
- Patent number 9,490,150
- Issue date Nov 8, 2016
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with wire mesh plasma containment
- Patent number 9,478,447
- Issue date Oct 25, 2016
- Applied Materials, Inc.
- Olkan Cuvalci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for thermal based substrate processing with v...
- Patent number 8,920,564
- Issue date Dec 30, 2014
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled lid assembly for tungsten nitride deposition
- Patent number 8,821,637
- Issue date Sep 2, 2014
- Applied Materials, Inc.
- Avgerinos V. Gelatos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with substrate heater and symmetric RF return
- Patent number 8,618,446
- Issue date Dec 31, 2013
- Applied Materials, Inc.
- Yu Chang
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Self aligning non contact shadow ring process kit
- Patent number 8,342,119
- Issue date Jan 1, 2013
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly for a processing system to facilitate sequential depos...
- Patent number 7,905,959
- Issue date Mar 15, 2011
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support having brazed plates and resistance heater
- Patent number 7,705,275
- Issue date Apr 27, 2010
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly for a processing system to facilitate sequential depos...
- Patent number 6,878,206
- Issue date Apr 12, 2005
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamshell and small volume chamber with fixed substrate support
- Patent number 6,866,746
- Issue date Mar 15, 2005
- Applied Materials, Inc.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self aligning non contact shadow ring process kit
- Patent number 6,589,352
- Issue date Jul 8, 2003
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor substrate processing chamber having interchangeable l...
- Patent number 6,500,263
- Issue date Dec 31, 2002
- Applied Materials, Inc,
- Yu Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid level pressure sensor and method
- Patent number 6,220,091
- Issue date Apr 24, 2001
- Applied Materials, Inc.
- Fufa Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pivoting lid assembly for a chamber
- Patent number 6,050,446
- Issue date Apr 18, 2000
- Applied Materials, Inc.
- Lawrence Lei
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT FOR REDUCED DAMAGE SUBSTRATE BACKSIDE
- Publication number 20190080951
- Publication date Mar 14, 2019
- Joel M. HUSTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY
- Publication number 20180237916
- Publication date Aug 23, 2018
- Applied Materials, Inc.
- GWO-CHUAN TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...
- Publication number 20170241020
- Publication date Aug 24, 2017
- Applied Materials, Inc.
- Gwo-Chuan TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY
- Publication number 20150075432
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- GWO-CHUAN TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT PLATE WITH IMPROVED LIFT PIN SEALING
- Publication number 20140265097
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
HEATED SUBSTRATE SUPPORT WITH FLATNESS CONTROL
- Publication number 20140251214
- Publication date Sep 11, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SUPPORT WITH INTEGRATED VACUUM AND EDGE PURGE CONDUITS
- Publication number 20140252710
- Publication date Sep 11, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH MULTI-PIECE SEALING SURFACE
- Publication number 20140251207
- Publication date Sep 11, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH CONTROLLED SEALING GAP
- Publication number 20140217665
- Publication date Aug 7, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...
- Publication number 20140190411
- Publication date Jul 10, 2014
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH WIRE MESH PLASMA CONTAINMENT
- Publication number 20140144901
- Publication date May 29, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT FOR SUBSTRATE BACKSIDE CONTAMINATION CONTROL
- Publication number 20140008349
- Publication date Jan 9, 2014
- Applied Materials, Inc.
- GWO-CHUAN TZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR VARIABLE SUBSTRATE TEMPERATURE CONTROL
- Publication number 20130247826
- Publication date Sep 26, 2013
- Applied Materials, Inc.
- GWO-CHUAN TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH SUBSTRATE HEATER AND SYMMETRIC RF RETURN
- Publication number 20130001215
- Publication date Jan 3, 2013
- Applied Materials, Inc.
- YU CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR THERMAL BASED SUBSTRATE PROCESSING WITH V...
- Publication number 20120003388
- Publication date Jan 5, 2012
- Applied Materials, Inc.
- GWO-CHUAN TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...
- Publication number 20110114020
- Publication date May 19, 2011
- GWO-CHUAN TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED LID ASSEMBLY FOR TUNGSTEN NITRIDE DEPOSITION
- Publication number 20080202425
- Publication date Aug 28, 2008
- APPLIED MATERIALS, INC.
- Avgerinos V. Gelatos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR TUNGSTEN NITRIDE DEPOSITION BY A TEMPERATURE CONTROLLED...
- Publication number 20080206987
- Publication date Aug 28, 2008
- Avgerinos V. Gelatos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF ALIGNING NON CONTACT SHADOW RING PROCESS KIT
- Publication number 20080072823
- Publication date Mar 27, 2008
- Joseph Yudovsky
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate support having brazed plates and resistance heater
- Publication number 20070040265
- Publication date Feb 22, 2007
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for generating plasma by RF power
- Publication number 20060130971
- Publication date Jun 22, 2006
- APPLIED MATERIALS, INC.
- Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Clamshell and small volume chamber with fixed substrate support
- Publication number 20050139160
- Publication date Jun 30, 2005
- APPLIED MATERIALS, INC.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lid assembly for a processing system to facilitate sequential depos...
- Publication number 20050115675
- Publication date Jun 2, 2005
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Self aligning non contact shadow ring process kit
- Publication number 20040003780
- Publication date Jan 8, 2004
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- C30 - CRYSTAL GROWTH
Information Patent Application
Clamshell and small volume chamber with fixed substrate support
- Publication number 20030221780
- Publication date Dec 4, 2003
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lid assembly for a processing system to facilitate sequential depos...
- Publication number 20030010451
- Publication date Jan 16, 2003
- APPLIED MATERIALS, INC.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor substrate processing chamber having interchangeable l...
- Publication number 20020134505
- Publication date Sep 26, 2002
- Yu Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Gwo-Chuan Tzu

Person

Patents Grantslast 30 patents

Substrate support plate with improved lift pin sealing

Apparatus to improve substrate temperature uniformity

Lid assembly for a processing system to facilitate sequential depos...

Apparatus to improve substrate temperature uniformity

Substrate support with multi-piece sealing surface

Apparatus for variable substrate temperature control

Substrate support with integrated vacuum and edge purge conduits

Lid assembly for a processing system to facilitate sequential depos...

Substrate support with controlled sealing gap

Substrate support for substrate backside contamination control

Substrate support with wire mesh plasma containment

Methods and apparatus for thermal based substrate processing with v...

Temperature controlled lid assembly for tungsten nitride deposition

Substrate support with substrate heater and symmetric RF return

Self aligning non contact shadow ring process kit

Lid assembly for a processing system to facilitate sequential depos...

Substrate support having brazed plates and resistance heater

Lid assembly for a processing system to facilitate sequential depos...

Clamshell and small volume chamber with fixed substrate support

Self aligning non contact shadow ring process kit

Semiconductor substrate processing chamber having interchangeable l...

Liquid level pressure sensor and method

Pivoting lid assembly for a chamber

Patents Applicationslast 30 patents

SUBSTRATE SUPPORT FOR REDUCED DAMAGE SUBSTRATE BACKSIDE

APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...

APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY

SUBSTRATE SUPPORT PLATE WITH IMPROVED LIFT PIN SEALING

HEATED SUBSTRATE SUPPORT WITH FLATNESS CONTROL

SUBSTRATE SUPPORT WITH INTEGRATED VACUUM AND EDGE PURGE CONDUITS

SUBSTRATE SUPPORT WITH MULTI-PIECE SEALING SURFACE

SUBSTRATE SUPPORT WITH CONTROLLED SEALING GAP

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...

SUBSTRATE SUPPORT WITH WIRE MESH PLASMA CONTAINMENT

SUBSTRATE SUPPORT FOR SUBSTRATE BACKSIDE CONTAMINATION CONTROL

APPARATUS FOR VARIABLE SUBSTRATE TEMPERATURE CONTROL

SUBSTRATE SUPPORT WITH SUBSTRATE HEATER AND SYMMETRIC RF RETURN

METHODS AND APPARATUS FOR THERMAL BASED SUBSTRATE PROCESSING WITH V...

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...

TEMPERATURE CONTROLLED LID ASSEMBLY FOR TUNGSTEN NITRIDE DEPOSITION

PROCESS FOR TUNGSTEN NITRIDE DEPOSITION BY A TEMPERATURE CONTROLLED...

SELF ALIGNING NON CONTACT SHADOW RING PROCESS KIT

Substrate support having brazed plates and resistance heater

Apparatus for generating plasma by RF power

Clamshell and small volume chamber with fixed substrate support

Lid assembly for a processing system to facilitate sequential depos...

Self aligning non contact shadow ring process kit

Clamshell and small volume chamber with fixed substrate support

Lid assembly for a processing system to facilitate sequential depos...

Semiconductor substrate processing chamber having interchangeable l...