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Particle multibeam lithography
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Patent number 6,989,546
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Issue date Jan 24, 2006
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IMS-Innenmikrofabrikations Systeme GmbH
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Hans Loschner
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H01 - BASIC ELECTRIC ELEMENTS
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Pattern lock system
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Patent number 6,661,015
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Issue date Dec 9, 2003
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IMS-Ionen Mikrofabrikations Systeme GmbH
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Alfred Chalupka
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H01 - BASIC ELECTRIC ELEMENTS
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Structuring device for processing a substrate
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Patent number 6,419,752
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Issue date Jul 16, 2002
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The Provost, Fellows and Scholars of The College of the Holy and Undivided Tr...
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Igor V. Shvets
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of producing a structured layer
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Patent number 6,296,700
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Issue date Oct 2, 2001
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IMS-Ionen Mikrofabrikations Systems GmbH
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Uwe B. Sleytr
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Process for producing a structured mask
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Patent number 5,876,880
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Issue date Mar 2, 1999
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IMS Ionen Mikrofabrikations Systeme Gellschaft M.B.H.
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Herbert Vonach
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Silicon membrane and method of making same
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Patent number 5,672,449
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Issue date Sep 30, 1997
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IMS Ionen Mikrofabrikations Systeme GmbH
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Hans Loschner
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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Ion-projection apparatus
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Patent number 4,835,392
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Issue date May 30, 1989
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IMS Ionen Mikrofabrikations Systeme Gesellschaft m.b.H.
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Hans Loschner
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H01 - BASIC ELECTRIC ELEMENTS
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Process for making a transmission mask
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Patent number 4,780,382
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Issue date Oct 25, 1988
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IMS Ionen Mikrofabrikations Systems Gesellschaft mbH
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Gerhard Stengl
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method of stabilizing a mask
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Patent number 4,775,797
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Issue date Oct 4, 1988
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IMS Ionen Mikrofabrikations Systeme Gesellschaft mbH
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Gerhard Stengl
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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