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Haruhiko Yoshioka
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Yamanashi-Ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum prober and vacuum probe method
Patent number
7,221,176
Issue date
May 22, 2007
Tokyo Electron Limited
Haruhiko Yoshioka
G01 - MEASURING TESTING
Information
Patent Grant
Stage driving apparatus and probe method
Patent number
7,106,082
Issue date
Sep 12, 2006
Tokyo Electron Limited
Haruhiko Yoshioka
G01 - MEASURING TESTING
Information
Patent Grant
Prober
Patent number
6,933,736
Issue date
Aug 23, 2005
Tokyo Electron Limited
Masahito Kobayashi
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus
Patent number
6,927,587
Issue date
Aug 9, 2005
Tokyo Electron Limited
Haruhiko Yoshioka
G01 - MEASURING TESTING
Information
Patent Grant
Probing method
Patent number
6,850,052
Issue date
Feb 1, 2005
Tokyo Electron Limited
Shinji Iino
G01 - MEASURING TESTING
Information
Patent Grant
Drivingly rotatable mechanism of specimen loading table and specime...
Patent number
6,634,245
Issue date
Oct 21, 2003
Tokyo Electron Limited
Haruhiko Yoshioka
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus
Patent number
6,262,570
Issue date
Jul 17, 2001
Tokyo Electron Limited
Yutaka Akaike
G01 - MEASURING TESTING
Information
Patent Grant
Prober and probe method
Patent number
6,140,828
Issue date
Oct 31, 2000
Tokyo Electron Limited
Shinji Iino
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus
Patent number
5,912,555
Issue date
Jun 15, 1999
Tokyo Electron Limited
Yutaka Akaike
G01 - MEASURING TESTING
Information
Patent Grant
Probe apparatus with tilt correction mechanisms
Patent number
5,804,983
Issue date
Sep 8, 1998
Tokyo Electron Limited
Hisashi Nakajima
G01 - MEASURING TESTING
Information
Patent Grant
Wafer prober
Patent number
D383683
Issue date
Sep 16, 1997
Tokyo Electron Limited
Osamu Kamata
D10 - Measuring, testing, or signalling instruments
Information
Patent Grant
Probe apparatus for correcting the probe card posture before testing
Patent number
5,642,056
Issue date
Jun 24, 1997
Tokyo Electron Limited
Hisashi Nakajima
G01 - MEASURING TESTING
Information
Patent Grant
Probe system and probe method
Patent number
5,640,101
Issue date
Jun 17, 1997
Tokyo Electron Limited
Motohiro Kuji
G01 - MEASURING TESTING
Information
Patent Grant
Probe system having vertical height detection and double focal imag...
Patent number
5,585,738
Issue date
Dec 17, 1996
Tokyo Electron Limited
Motohiro Kuji
G01 - MEASURING TESTING
Information
Patent Grant
Method of ashing layers, and apparatus for ashing layers
Patent number
4,812,201
Issue date
Mar 14, 1989
Tokyo Electron Limited
Hiroyuki Sakai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Probe apparatus
Publication number
20050253611
Publication date
Nov 17, 2005
TOKYO ELECTRON LIMITED
Haruhiko Yoshioka
G01 - MEASURING TESTING
Information
Patent Application
Vacuum prober and vacuum probe method
Publication number
20050206396
Publication date
Sep 22, 2005
Haruhiko Yoshioka
G01 - MEASURING TESTING
Information
Patent Application
Stage driving apparatus and probe method
Publication number
20050127898
Publication date
Jun 16, 2005
Haruhiko Yoshioka
G01 - MEASURING TESTING
Information
Patent Application
Prober
Publication number
20040164759
Publication date
Aug 26, 2004
Masahito Kobayashi
G01 - MEASURING TESTING
Information
Patent Application
Probe apparatus
Publication number
20040036861
Publication date
Feb 26, 2004
TOKYO ELECTRON LIMITED
Haruhiko Yoshioka
G01 - MEASURING TESTING
Information
Patent Application
Probing method
Publication number
20030025495
Publication date
Feb 6, 2003
TOKYO ELECTRON LTD.
Shinji Ilno
G01 - MEASURING TESTING