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Patents Grants
last 30 patents
Information
Patent Grant
Particle-measuring system and particle-measuring method
Patent number
8,100,147
Issue date
Jan 24, 2012
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method
Patent number
7,931,945
Issue date
Apr 26, 2011
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film formation processing apparatus and method for determining an e...
Patent number
7,894,059
Issue date
Feb 22, 2011
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing apparatus with a chamber having therein a high-corrosion...
Patent number
7,879,179
Issue date
Feb 1, 2011
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing apparatus with a chamber having therein a high-corrosion...
Patent number
7,846,291
Issue date
Dec 7, 2010
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a metal film for electrode
Patent number
7,829,144
Issue date
Nov 9, 2010
Tokyo Electron Limited
Kimihiro Matsuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas processing apparatus, gas processing method and integrated valv...
Patent number
7,828,016
Issue date
Nov 9, 2010
Tokyo Electron Limited
Hayashi Otsuki
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Grant
Particle-measuring system and particle-measuring method
Patent number
7,667,840
Issue date
Feb 23, 2010
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particle-measuring system and particle-measuring method
Patent number
7,515,264
Issue date
Apr 7, 2009
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particle-measuring system and particle-measuring method
Patent number
7,511,814
Issue date
Mar 31, 2009
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming titanium film by CVD
Patent number
7,484,513
Issue date
Feb 3, 2009
Tokyo Electron Limited
Kunihiro Tada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
SiC material, semiconductor device fabricating system and SiC mater...
Patent number
7,410,923
Issue date
Aug 12, 2008
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
TiSiN film forming method, diffusion barrier TiSiN film, semiconduc...
Patent number
7,153,773
Issue date
Dec 26, 2006
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
SiC material, semiconductor processing equipment and method of prep...
Patent number
6,936,102
Issue date
Aug 30, 2005
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming TiSiN film, diffusion preventive film comprising...
Patent number
6,919,273
Issue date
Jul 19, 2005
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a barrier film and method of forming wiring struc...
Patent number
6,861,356
Issue date
Mar 1, 2005
Tokyo Electron Limited
Kimihiro Matsuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming titanium film by CVD
Patent number
6,841,203
Issue date
Jan 11, 2005
Tokyo Electron Limited
Kunihiro Tada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming semiconductor wiring structures
Patent number
6,838,376
Issue date
Jan 4, 2005
Tokyo Electron Limited
Kimihiro Matsuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing metallic nitride series thin film
Patent number
6,824,825
Issue date
Nov 30, 2004
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas processing apparatus, gas processing method and integrated valv...
Patent number
6,817,381
Issue date
Nov 16, 2004
Tokyo Electron Limited
Hayashi Otsuki
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Grant
Particle-measuring system and particle-measuring method
Patent number
6,532,069
Issue date
Mar 11, 2003
Tokyo Electron Limited
Hayashi Otsuki
G01 - MEASURING TESTING
Information
Patent Grant
Method of forming titanium film by chemical vapor deposition
Patent number
6,451,388
Issue date
Sep 17, 2002
Tokyo Electron Limited
Kunihiro Tada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming titanium film by CVD
Patent number
6,177,149
Issue date
Jan 23, 2001
Tokyo Electron Limited
Kunihiro Tada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing method and apparatus thereof
Patent number
5,474,641
Issue date
Dec 12, 1995
Tokyo Electron Kabushiki Kaisha
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20100139565
Publication date
Jun 10, 2010
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming titanium film by CVD
Publication number
20090071404
Publication date
Mar 19, 2009
Kunihiro Tada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas processing apparatus, gas processing method and integrated valv...
Publication number
20080282977
Publication date
Nov 20, 2008
Hayashi Otsuki
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20080264338
Publication date
Oct 30, 2008
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Processing apparatus with a chamber having therein a high-corrosion...
Publication number
20080070032
Publication date
Mar 20, 2008
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Processing apparatus with a chamber having therein a high-corrosion...
Publication number
20080069966
Publication date
Mar 20, 2008
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20080069671
Publication date
Mar 20, 2008
TOKYO ELECTRON LIMITED
Hayashi OTSUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20080065340
Publication date
Mar 13, 2008
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20070264444
Publication date
Nov 15, 2007
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20070261740
Publication date
Nov 15, 2007
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20070263217
Publication date
Nov 15, 2007
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for depositing metallic nitride series thin film
Publication number
20060231028
Publication date
Oct 19, 2006
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SiC material, semiconductor device fabricating system and SiC mater...
Publication number
20060011131
Publication date
Jan 19, 2006
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming a metal film for electrode
Publication number
20050191803
Publication date
Sep 1, 2005
TOKYO ELECTRON LIMITED
Kimihiro Matsuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming titanium film by CVD
Publication number
20050136660
Publication date
Jun 23, 2005
Kunihiro Tada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for depositing metallic nitride series thin film
Publication number
20050089634
Publication date
Apr 28, 2005
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas processing apparatus, gas processing method and integrated valv...
Publication number
20050061377
Publication date
Mar 24, 2005
Hayashi Otsuki
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Application
TiSiN film forming method, diffusion barrier TiSiN film, semiconduc...
Publication number
20040232467
Publication date
Nov 25, 2004
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Processing apparatus with a chamber having therein a high-corrosion...
Publication number
20030200929
Publication date
Oct 30, 2003
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas processing appauratus, gas processing method and integrated val...
Publication number
20030192608
Publication date
Oct 16, 2003
Hayashi Otsuki
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information
Patent Application
Particle-measuring system and particle-measuring method
Publication number
20030147075
Publication date
Aug 7, 2003
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for depositing metallic nitride series thin film
Publication number
20030129309
Publication date
Jul 10, 2003
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WIRING STRUCTURE OF SEMICONDUCTOR DEVICE, ELECTRODE, AND METHOD FOR...
Publication number
20030034560
Publication date
Feb 20, 2003
Kimihiro Matsuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming titanium film by CVD
Publication number
20030031794
Publication date
Feb 13, 2003
Kunihiro Tada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming a barrier film and method of forming wiring struc...
Publication number
20020197856
Publication date
Dec 26, 2002
Kimihiro Matsuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Processing apparatus with a chamber having therein a high-corrosion...
Publication number
20010003271
Publication date
Jun 14, 2001
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...