Hideto Tateno

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Furnace for substrate processing apparatus
- Patent number D1053156
- Issue date Dec 3, 2024
- Kokusai Electric Corporation
- Hideto Tateno
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus
- Patent number 12,087,598
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate processing method and non...
- Patent number 11,869,764
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Akinori Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,538,716
- Issue date Dec 27, 2022
- Kokusai Electric Corporation
- Tomoya Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,499,224
- Issue date Nov 15, 2022
- Kokusai Electric Corporation
- Tetsuaki Inada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,476,112
- Issue date Oct 18, 2022
- Kokusai Electric Corporation
- Akinori Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust pipe
- Patent number D837706
- Issue date Jan 8, 2019
- Kokusai Electric Corporation
- Daisuke Hara
- D12 - Transportation
Information Patent Grant
Gas sampling cell
- Patent number D813065
- Issue date Mar 20, 2018
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 9,816,182
- Issue date Nov 14, 2017
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 9,793,112
- Issue date Oct 17, 2017
- Hitachi Kokusai Electric Inc.
- Takuya Joda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat insulating unit for substrate processing apparatus
- Patent number D788705
- Issue date Jun 6, 2017
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heat insulating unit for substrate processing apparatus
- Patent number D788704
- Issue date Jun 6, 2017
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heat insulating unit for substrate processing apparatus
- Patent number D788706
- Issue date Jun 6, 2017
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heat insulating unit for substrate processing apparatus
- Patent number D788038
- Issue date May 30, 2017
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,587,313
- Issue date Mar 7, 2017
- Hitachi Kokusai Electric Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction tube
- Patent number D778457
- Issue date Feb 7, 2017
- Hitachi Kokusai Electric Inc.
- Daisuke Hara
- D24 - Medical and laboratory equipment
Information Patent Grant
Reaction tube
- Patent number D778458
- Issue date Feb 7, 2017
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- D24 - Medical and laboratory equipment
Information Patent Grant
Substrate processing method, substrate processing apparatus, method...
- Patent number 9,502,239
- Issue date Nov 22, 2016
- Hitachi Kokusai Electric Inc.
- Masahisa Okuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing semiconductor device, method of manufac...
- Patent number 9,190,299
- Issue date Nov 17, 2015
- Hitachi Kokusai Electric, Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer for substrate processing apparatus
- Patent number D741823
- Issue date Oct 27, 2015
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240186156
- Publication date Jun 6, 2024
- Kokusai Electric Corporation
- Kenji ONO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...
- Publication number 20240096615
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Akinori TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20230193465
- Publication date Jun 22, 2023
- Kokusai Electric Corporation
- Hideto TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20230077197
- Publication date Mar 9, 2023
- Kokusai Electric Corporation
- Akinori TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230041284
- Publication date Feb 9, 2023
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20220005738
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Hideto TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200347498
- Publication date Nov 5, 2020
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200303234
- Publication date Sep 24, 2020
- Kokusai Electric Corporation
- Tomoya MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vaporizer and Substrate Processing Apparatus
- Publication number 20190003047
- Publication date Jan 3, 2019
- Kokusai Electric Corporation
- Hideto TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180204720
- Publication date Jul 19, 2018
- Hitachi Kokusai Electric Inc.
- Akinori TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180204742
- Publication date Jul 19, 2018
- Hitachi Kokusai Electric Inc.
- Hideto TATENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...
- Publication number 20160203976
- Publication date Jul 14, 2016
- Hitachi Kokusai Electric Inc.
- Takuya JODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20160002789
- Publication date Jan 7, 2016
- Hitachi Kokusai Electric Inc.
- Tadashi KONTANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD...
- Publication number 20150262817
- Publication date Sep 17, 2015
- Hitachi Kokusai Electric Inc.
- Masahisa OKUNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20150140835
- Publication date May 21, 2015
- Hitachi Kokusai Electric Inc.
- Hideto TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150132972
- Publication date May 14, 2015
- Hitachi Kokusai Electric Inc.
- Yuichi WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Device, Method for Manufacturing Semiconductor...
- Publication number 20140302687
- Publication date Oct 9, 2014
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Manufacturing Semiconductor Device, Method of Manufac...
- Publication number 20140256160
- Publication date Sep 11, 2014
- Hitachi Kokusai Electric Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, APPARATUS FOR MANUFAC...
- Publication number 20140235068
- Publication date Aug 21, 2014
- Hitachi Kokusai Electric Inc.
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS

Hideto Tateno

Person

Patents Grantslast 30 patents

Furnace for substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus, substrate processing method and non...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus

Exhaust pipe

Gas sampling cell

Substrate processing apparatus, method for manufacturing semiconduc...

Method of manufacturing semiconductor device and non-transitory com...

Heat insulating unit for substrate processing apparatus

Heat insulating unit for substrate processing apparatus

Heat insulating unit for substrate processing apparatus

Heat insulating unit for substrate processing apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Reaction tube

Reaction tube

Substrate processing method, substrate processing apparatus, method...

Apparatus for manufacturing semiconductor device, method of manufac...

Vaporizer for substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Vaporizer and Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COM...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Device, Method for Manufacturing Semiconductor...

Apparatus for Manufacturing Semiconductor Device, Method of Manufac...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, APPARATUS FOR MANUFAC...