Hiroaki Ikegawa

Person

Tokyo-To, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,171,014
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Hideomi Hane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and apparatus of manuf...
- Patent number 10,900,121
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and operation method of film forming apparatus
- Patent number 10,550,470
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 10,550,467
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 10,519,550
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and storage medium
- Patent number 10,438,791
- Issue date Oct 8, 2019
- Tokyo Electron Limited
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and semiconductor device...
- Patent number 10,297,443
- Issue date May 21, 2019
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and storage medium
- Patent number 9,640,448
- Issue date May 2, 2017
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method
- Patent number 9,252,043
- Issue date Feb 2, 2016
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing film
- Patent number 9,136,133
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Kentaro Oshimo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing a film using a turntable apparatus
- Patent number 8,987,147
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method
- Patent number 8,980,371
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method
- Patent number 8,962,495
- Issue date Feb 24, 2015
- Tokyo Electron Limited
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing a film
- Patent number 8,921,237
- Issue date Dec 30, 2014
- Tokyo Electron Limited
- Kentaro Oshimo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing a film
- Patent number 8,895,456
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Mitsuhiro Tachibana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, film-forming apparatu...
- Patent number 7,084,023
- Issue date Aug 1, 2006
- Tokyo Electron Limited
- Shigeru Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment process for wafers
- Patent number 5,500,388
- Issue date Mar 19, 1996
- Tokyo Electron Kabushiki Kaisha
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...
- Publication number 20220189785
- Publication date Jun 16, 2022
- TOKYO ELECTRON LIMITED
- Yutaka MOTOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOAT TRANSFER METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20220122867
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Shingo HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20190292662
- Publication date Sep 26, 2019
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND OPERATION METHOD OF FILM FORMING APPARATUS
- Publication number 20190127849
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method, Film Forming Apparatus, and Storage Medium
- Publication number 20180366315
- Publication date Dec 20, 2018
- TOKYO ELECTRON LIMITED
- Hideomi Hane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180358235
- Publication date Dec 13, 2018
- TOKYO ELECTRON LIMITED
- Hideomi HANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION PROCESSING METHOD AND FILM FORMATION PROCESING APPAR...
- Publication number 20180142350
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device Manufacturing Method and Semiconductor Device...
- Publication number 20170278698
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Formation Apparatus
- Publication number 20170183777
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS
- Publication number 20170183779
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Method, Film Forming Apparatus, and Storage Medium
- Publication number 20160284613
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING FILM
- Publication number 20150011087
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Kentaro OSHIMO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20140209028
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Kentaro OSHIMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A FILM
- Publication number 20140179104
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Kentaro Oshimo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A FILM
- Publication number 20140179122
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Mitsuhiro Tachibana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A FILM
- Publication number 20140179121
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD, STORAGE MEDIUM, AND FILM DEPOSITION APPARATUS
- Publication number 20140147591
- Publication date May 29, 2014
- TOKYO ELECTRON LIMITED
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD
- Publication number 20140011353
- Publication date Jan 9, 2014
- Hiroaki IKEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD
- Publication number 20130337658
- Publication date Dec 19, 2013
- TOKYO ELECTRON LIMITED
- Hiroaki Ikegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming film and film forming apparatus
- Publication number 20060216953
- Publication date Sep 28, 2006
- Shigeru Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing method for processing substrate to be proc...
- Publication number 20050272271
- Publication date Dec 8, 2005
- TOKYO ELECTRON LIMITED
- Haruhiko Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of manufacturing semiconductor device, film-forming apparatu...
- Publication number 20050142716
- Publication date Jun 30, 2005
- Shigeru Nakajima
- H01 - BASIC ELECTRIC ELEMENTS

Hiroaki Ikegawa

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Method of manufacturing semiconductor device and apparatus of manuf...

Film forming apparatus and operation method of film forming apparatus

Film formation apparatus

Film formation apparatus

Film forming method, film forming apparatus, and storage medium

Semiconductor device manufacturing method and semiconductor device...

Film forming method, film forming apparatus, and storage medium

Film deposition method

Method of depositing film

Method of depositing a film using a turntable apparatus

Film deposition method

Film deposition method

Method of depositing a film

Method of depositing a film

Method of manufacturing semiconductor device, film-forming apparatu...

Heat treatment process for wafers

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...

BOAT TRANSFER METHOD AND HEAT TREATMENT APPARATUS

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

FILM FORMING APPARATUS AND OPERATION METHOD OF FILM FORMING APPARATUS

Film Forming Method, Film Forming Apparatus, and Storage Medium

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM FORMATION PROCESSING METHOD AND FILM FORMATION PROCESING APPAR...

Semiconductor Device Manufacturing Method and Semiconductor Device...

Film Formation Apparatus

FILM FORMATION APPARATUS

Film Forming Method, Film Forming Apparatus, and Storage Medium

METHOD OF DEPOSITING FILM

FILM DEPOSITION APPARATUS

METHOD OF DEPOSITING A FILM

METHOD OF DEPOSITING A FILM

METHOD OF DEPOSITING A FILM

FILM DEPOSITION METHOD, STORAGE MEDIUM, AND FILM DEPOSITION APPARATUS

FILM DEPOSITION METHOD

FILM DEPOSITION METHOD

Method of forming film and film forming apparatus

Semiconductor processing method for processing substrate to be proc...

Method of manufacturing semiconductor device, film-forming apparatu...