Hirokuni Hiyama

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Dressing method, method of determining dressing conditions, program...
- Patent number 8,965,555
- Issue date Feb 24, 2015
- Ebara Corporation
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Grant
Dressing method, method of determining dressing conditions, program...
- Patent number 8,655,478
- Issue date Feb 18, 2014
- Ebara Corporation
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Grant
Electrolytic processing apparatus and electrolytic processing method
- Patent number 7,527,723
- Issue date May 5, 2009
- Ebara Corporation
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,361,076
- Issue date Apr 22, 2008
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Etching method and apparatus
- Patent number 7,314,574
- Issue date Jan 1, 2008
- Ebara Corporation
- Katsunori Ichiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for polishing a substrate
- Patent number 7,291,057
- Issue date Nov 6, 2007
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,234,999
- Issue date Jun 26, 2007
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning method and polishing apparatus employing such cleaning method
- Patent number 7,169,235
- Issue date Jan 30, 2007
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Method for estimating polishing profile or polishing amount, polish...
- Patent number 7,150,673
- Issue date Dec 19, 2006
- Ebara Corporation
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Grant
Etching method and apparatus
- Patent number 7,144,520
- Issue date Dec 5, 2006
- Ebara Corporation
- Katsunori Ichiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus including turntable with polishing surface of d...
- Patent number RE39262
- Issue date Sep 5, 2006
- Ebara Corporation
- Masayoshi Hirose
- 451 - Abrading
Information Patent Grant
Beam source and beam processing apparatus
- Patent number 7,078,862
- Issue date Jul 18, 2006
- Ebara Corporation
- Akira Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam source and beam processing apparatus
- Patent number 7,034,285
- Issue date Apr 25, 2006
- Ebara Corporation
- Katsunori Ichiki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Polishing method using an abrading plate
- Patent number 6,942,548
- Issue date Sep 13, 2005
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Neutral particle beam processing apparatus
- Patent number 6,909,086
- Issue date Jun 21, 2005
- Ebara Corporation
- Seiji Samukawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of processing a surface of a workpiece
- Patent number 6,909,087
- Issue date Jun 21, 2005
- Ebara Corporation
- Katsunori Ichiki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Neutral particle beam processing apparatus
- Patent number 6,861,643
- Issue date Mar 1, 2005
- Ebara Corporation
- Katsunori Ichiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Neutral particle beam processing apparatus
- Patent number 6,861,642
- Issue date Mar 1, 2005
- Ebara Corporation
- Katsunori Ichiki
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Neutral particle beam processing apparatus
- Patent number 6,858,838
- Issue date Feb 22, 2005
- Ebara Corporation
- Katsunori Ichiki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Beam processing apparatus
- Patent number 6,849,857
- Issue date Feb 1, 2005
- Ebara Corporation
- Katsunori Ichiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method and polishing apparatus employing such cleaning method
- Patent number 6,752,692
- Issue date Jun 22, 2004
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing-product discharging device and polishing device
- Patent number 6,712,678
- Issue date Mar 30, 2004
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and dressing method
- Patent number 6,672,945
- Issue date Jan 6, 2004
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 6,626,739
- Issue date Sep 30, 2003
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Method for polishing a substrate
- Patent number 6,609,950
- Issue date Aug 26, 2003
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Method for polishing workpieces using fixed abrasives
- Patent number 6,595,831
- Issue date Jul 22, 2003
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,579,148
- Issue date Jun 17, 2003
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,520,845
- Issue date Feb 18, 2003
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,458,012
- Issue date Oct 1, 2002
- Ebara Corporation
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polisher and method for manufacturing same and polishing tool
- Patent number 6,454,644
- Issue date Sep 24, 2002
- Ebara Corporation
- Hisamitsu Miyazaki
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
DRESSING METHOD, METHOD OF DETERMINING DRESSING CONDITIONS, PROGRAM...
- Publication number 20140120808
- Publication date May 1, 2014
- EBARA CORPORATION
- Akira FUKUDA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20100325913
- Publication date Dec 30, 2010
- Xinming WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRESSING METHOD, METHOD OF DETERMINING DRESSING CONDITIONS, PROGRAM...
- Publication number 20100081361
- Publication date Apr 1, 2010
- Akira Fukuda
- B24 - GRINDING POLISHING
Information Patent Application
Electrochemical polishing method and polishing method
- Publication number 20090095637
- Publication date Apr 16, 2009
- Yasushi Toma
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrochemical mechanical polishing method and electrochemical mec...
- Publication number 20090078583
- Publication date Mar 26, 2009
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Polishing Apparatus and Polishing Method
- Publication number 20070254558
- Publication date Nov 1, 2007
- Masako Kodera
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and polishing apparatus
- Publication number 20070232203
- Publication date Oct 4, 2007
- Akira Fukuda
- B08 - CLEANING
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20070224916
- Publication date Sep 27, 2007
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20070205112
- Publication date Sep 6, 2007
- Masako Kodera
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20070061036
- Publication date Mar 15, 2007
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20060234499
- Publication date Oct 19, 2006
- Akira Kodera
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method for estimating polishing profile or polishing amount, polish...
- Publication number 20060009127
- Publication date Jan 12, 2006
- Kunihiko Sakurai
- B24 - GRINDING POLISHING
Information Patent Application
Electrolytic processing apparatus and electrolytic processing method
- Publication number 20050155868
- Publication date Jul 21, 2005
- Itsuki Kobata
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Etching method and apparatus
- Publication number 20050020070
- Publication date Jan 27, 2005
- Katsunori Ichiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching method and apparatus
- Publication number 20040244687
- Publication date Dec 9, 2004
- Katsunori Ichiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam source and beam processing apparatus
- Publication number 20040222367
- Publication date Nov 11, 2004
- Katsunori Ichiki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Beam source and beam processing apparatus
- Publication number 20040221815
- Publication date Nov 11, 2004
- Akira Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning method and polishing apparatus employing such cleaning method
- Publication number 20040221874
- Publication date Nov 11, 2004
- Yutaka Wada
- B08 - CLEANING
Information Patent Application
Neutral particle beam processing apparatus
- Publication number 20040119006
- Publication date Jun 24, 2004
- EBARA CORPORATION
- Seiji Samukawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Beam processing apparatus
- Publication number 20040108469
- Publication date Jun 10, 2004
- Katsunori Ichiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Neutral particle beam processing apparatus
- Publication number 20040108470
- Publication date Jun 10, 2004
- Katsunori Ichiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of processing a surface of a workpiece
- Publication number 20040094400
- Publication date May 20, 2004
- Kasunori Ichiki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Neutral particle beam processing apparatus
- Publication number 20040074604
- Publication date Apr 22, 2004
- Katsunori Ichiki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Neutral particle beam processing apparatus
- Publication number 20040070348
- Publication date Apr 15, 2004
- Katsunori Ichiki
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus for polishing a substrate
- Publication number 20030232576
- Publication date Dec 18, 2003
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and dressing method
- Publication number 20030100246
- Publication date May 29, 2003
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20020151259
- Publication date Oct 17, 2002
- Kazuto Hirokawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20020137440
- Publication date Sep 26, 2002
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus and method for polishing substrate
- Publication number 20020016074
- Publication date Feb 7, 2002
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Application
Polishing tool and manufacturing method therefor
- Publication number 20020016139
- Publication date Feb 7, 2002
- Kazuto Hirokawa
- B24 - GRINDING POLISHING

Hirokuni Hiyama

Person

Patents Grantslast 30 patents

Dressing method, method of determining dressing conditions, program...

Dressing method, method of determining dressing conditions, program...

Electrolytic processing apparatus and electrolytic processing method

Method for estimating polishing profile or polishing amount, polish...

Etching method and apparatus

Apparatus for polishing a substrate

Method for estimating polishing profile or polishing amount, polish...

Cleaning method and polishing apparatus employing such cleaning method

Method for estimating polishing profile or polishing amount, polish...

Etching method and apparatus

Polishing apparatus including turntable with polishing surface of d...

Beam source and beam processing apparatus

Beam source and beam processing apparatus

Polishing method using an abrading plate

Neutral particle beam processing apparatus

Method of processing a surface of a workpiece

Neutral particle beam processing apparatus

Neutral particle beam processing apparatus

Neutral particle beam processing apparatus

Beam processing apparatus

Cleaning method and polishing apparatus employing such cleaning method

Polishing-product discharging device and polishing device

Polishing apparatus and dressing method

Polishing method and polishing apparatus

Method for polishing a substrate

Method for polishing workpieces using fixed abrasives

Polishing apparatus

Polishing apparatus

Polishing apparatus

Polisher and method for manufacturing same and polishing tool

Patents Applicationslast 30 patents

DRESSING METHOD, METHOD OF DETERMINING DRESSING CONDITIONS, PROGRAM...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

DRESSING METHOD, METHOD OF DETERMINING DRESSING CONDITIONS, PROGRAM...

Electrochemical polishing method and polishing method

Electrochemical mechanical polishing method and electrochemical mec...

Polishing Apparatus and Polishing Method

Polishing method and polishing apparatus

Method for estimating polishing profile or polishing amount, polish...

Polishing apparatus and polishing method

Method for estimating polishing profile or polishing amount, polish...

Substrate processing method and substrate processing apparatus

Method for estimating polishing profile or polishing amount, polish...

Electrolytic processing apparatus and electrolytic processing method

Etching method and apparatus

Etching method and apparatus

Beam source and beam processing apparatus

Beam source and beam processing apparatus

Cleaning method and polishing apparatus employing such cleaning method

Neutral particle beam processing apparatus

Beam processing apparatus

Neutral particle beam processing apparatus

Method of processing a surface of a workpiece

Neutral particle beam processing apparatus

Neutral particle beam processing apparatus

Apparatus for polishing a substrate

Polishing apparatus and dressing method

Polishing apparatus

Polishing apparatus

Apparatus and method for polishing substrate

Polishing tool and manufacturing method therefor