Hiroshi Sobukawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus of substrate
- Patent number 11,607,769
- Issue date Mar 21, 2023
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Method for polishing substrate including functional chip
- Patent number 11,597,051
- Issue date Mar 7, 2023
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Magnetic levitated pump
- Patent number 10,995,765
- Issue date May 4, 2021
- Ebara Corporation
- Ichiju Sato
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Electro-optical inspection apparatus and method with dust or partic...
- Patent number 9,105,444
- Issue date Aug 11, 2015
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electro-optical inspection apparatus and method with dust or partic...
- Patent number 8,624,182
- Issue date Jan 7, 2014
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,530,869
- Issue date Sep 10, 2013
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Turbo vacuum pump
- Patent number 8,109,744
- Issue date Feb 7, 2012
- Ebara Corporation
- Hiroyuki Kawasaki
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Electron beam apparatus
- Patent number 8,067,732
- Issue date Nov 29, 2011
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,003,963
- Issue date Aug 23, 2011
- Gigaphton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inspection system by charged particle beam and method of manufactur...
- Patent number 7,411,191
- Issue date Aug 12, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Processing method utilizing an apparatus to be sealed against workp...
- Patent number 7,098,045
- Issue date Aug 29, 2006
- Ebara Corporation
- Nobuharu Noji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus to be sealed against workpiece
- Patent number 6,869,890
- Issue date Mar 22, 2005
- Ebara Corporation
- Nobuharu Noji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Turbo-molecular pump
- Patent number 6,589,009
- Issue date Jul 8, 2003
- Ebara Corporation
- Atsushi Shiokawa
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Turbo-molecular pump
- Patent number 6,585,480
- Issue date Jul 1, 2003
- Ebara Corporation
- Hiroyuki Kawasaki
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Vacuum exhaust system
- Patent number 6,382,249
- Issue date May 7, 2002
- Ebara Corporation
- Hiroyuki Kawasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Turbo-molecular pump
- Patent number 6,343,910
- Issue date Feb 5, 2002
- Ebera Corporation
- Hiroyuki Kawasaki
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Turbomolecular pump
- Patent number 6,220,831
- Issue date Apr 24, 2001
- Ebara Corporation
- Atsushi Shiokawa
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Liquid delivery device, method of controlling such liquid delivery...
- Patent number 6,092,994
- Issue date Jul 25, 2000
- Ebara Corporation
- Shigekazu Yamamoto
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Turbomolecular pump
- Patent number 6,062,810
- Issue date May 16, 2000
- Ebara Corporation
- Matsutaro Miyamoto
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Evacuation apparatus and evacuation method
- Patent number RE36610
- Issue date Mar 14, 2000
- Kabushiki Kaisha Toshiba
- Katsuya Okumura
- 062 - Refrigeration
Information Patent Grant
Evacuation apparatus and evacuation method
- Patent number 5,062,271
- Issue date Nov 5, 1991
- Kabushiki Kaisha Toshiba
- Katsuya Okumura
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Turbomolecular pump and method of operating the same
- Patent number 4,926,648
- Issue date May 22, 1990
- Toshiba Corp.
- Katsuya Okumura
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP
- Publication number 20230173636
- Publication date Jun 8, 2023
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP
- Publication number 20200391341
- Publication date Dec 17, 2020
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS OF SUBSTRATE
- Publication number 20200130131
- Publication date Apr 30, 2020
- EBARA CORPORATION
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Application
MAGNETIC LEVITATED PUMP
- Publication number 20160131141
- Publication date May 12, 2016
- EBARA CORPORATION
- Ichiju SATO
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...
- Publication number 20140091215
- Publication date Apr 3, 2014
- EBARA CORPORATION
- Kenji WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM EVACUATION APPARATUS
- Publication number 20130259712
- Publication date Oct 3, 2013
- EBARA CORPORATION
- Hiroyuki Kawasaki
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...
- Publication number 20120074316
- Publication date Mar 29, 2012
- Kenji WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20110266468
- Publication date Nov 3, 2011
- Gigaphoton Inc.
- Shinji NAGAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20100108918
- Publication date May 6, 2010
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TURBO VACUUM PUMP
- Publication number 20090246038
- Publication date Oct 1, 2009
- EBARA CORPORATION
- Hiroyuki KAWASAKI
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
ELECTRON BEAM APPARATUS
- Publication number 20090218506
- Publication date Sep 3, 2009
- EBARA CORPORATION
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection system by charged particle beam and method of manufactur...
- Publication number 20070235644
- Publication date Oct 11, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Processing method utilizing an apparatus to be sealed against workp...
- Publication number 20050145171
- Publication date Jul 7, 2005
- Nobuharu Noji
- B08 - CLEANING
Information Patent Application
Turbo-molecular pump
- Publication number 20030017047
- Publication date Jan 23, 2003
- EBARA CORPORATION
- Atsushi Shiokawa
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Processing apparatus and method for processing workpiece
- Publication number 20020088399
- Publication date Jul 11, 2002
- Nobuharu Noji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Turbo-molecular pump
- Publication number 20020054815
- Publication date May 9, 2002
- EBARA CORPORATION
- Hiroyuki Kawasaki
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Hiroshi Sobukawa

Person

Patents Grantslast 30 patents

Polishing apparatus of substrate

Method for polishing substrate including functional chip

Magnetic levitated pump

Electro-optical inspection apparatus and method with dust or partic...

Electro-optical inspection apparatus and method with dust or partic...

Extreme ultraviolet light source apparatus

Turbo vacuum pump

Electron beam apparatus

Extreme ultraviolet light source apparatus

Inspection system by charged particle beam and method of manufactur...

Processing method utilizing an apparatus to be sealed against workp...

Processing apparatus to be sealed against workpiece

Turbo-molecular pump

Turbo-molecular pump

Vacuum exhaust system

Turbo-molecular pump

Turbomolecular pump

Liquid delivery device, method of controlling such liquid delivery...

Turbomolecular pump

Evacuation apparatus and evacuation method

Evacuation apparatus and evacuation method

Turbomolecular pump and method of operating the same

Patents Applicationslast 30 patents

METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP

METHOD FOR POLISHING SUBSTRATE INCLUDING FUNCTIONAL CHIP

POLISHING APPARATUS OF SUBSTRATE

MAGNETIC LEVITATED PUMP

ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...

VACUUM EVACUATION APPARATUS

ELECTRO-OPTICAL INSPECTION APPARATUS AND METHOD WITH DUST OR PARTIC...

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

TURBO VACUUM PUMP

ELECTRON BEAM APPARATUS

Inspection system by charged particle beam and method of manufactur...

Processing method utilizing an apparatus to be sealed against workp...

Turbo-molecular pump

Processing apparatus and method for processing workpiece

Turbo-molecular pump