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Spin on oxygen reactive ion etch barrier
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Patent number 5,270,151
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Issue date Dec 14, 1993
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International Business Machines Corporation
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Peter A. Agostino
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Spray silylation of photoresist images
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Patent number 4,999,280
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Issue date Mar 12, 1991
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International Business Machines Corporation
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Hiroyuki Hiraoka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Electro-lithography method
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Patent number 4,119,688
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Issue date Oct 10, 1978
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International Business Machines Corporation
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Hiroyuki Hiraoka
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B82 - NANO-TECHNOLOGY
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Nitrated polymers as positive resists
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Patent number 4,004,043
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Issue date Jan 18, 1977
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International Business Machines Corporation
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Hiroyuki Hiraoka
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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