Hiroyuki Takamatsu

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Shirakawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of purifying alkaline solution and method of etching semicon...
- Patent number 6,319,845
- Issue date Nov 20, 2001
- Shin-Etsu Handotai Co., Ltd.
- Isao Uchiyama
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for cleaning semiconductor silicon wafer
- Patent number 5,665,168
- Issue date Sep 9, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning silicon wafers in cleaning baths with controlled...
- Patent number 5,662,743
- Issue date Sep 2, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting particles on wafers
- Patent number 5,640,238
- Issue date Jun 17, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning semiconductor wafers
- Patent number 5,626,681
- Issue date May 6, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- B08 - CLEANING