Hisanori Matsuo

Person

Kanagawa-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for polishing and method of polishing
- Patent number 11,926,018
- Issue date Mar 12, 2024
- Ebara Corporation
- Masayoshi Ito
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,897,080
- Issue date Feb 13, 2024
- Ebara Corporation
- Masashi Kabasawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus, information processing system, polishing metho...
- Patent number 11,897,078
- Issue date Feb 13, 2024
- Ebara Corporation
- Akira Nakamura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,710,208
- Issue date Jul 14, 2020
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for measuring surface properties of polishing pad
- Patent number 10,478,936
- Issue date Nov 19, 2019
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for regulating surface temperature of polishin...
- Patent number 10,414,018
- Issue date Sep 17, 2019
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for measuring surface properties of polishing pad
- Patent number 10,401,285
- Issue date Sep 3, 2019
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
CMP apparatus having polishing pad surface property measuring device
- Patent number 10,369,675
- Issue date Aug 6, 2019
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 10,259,098
- Issue date Apr 16, 2019
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,195,712
- Issue date Feb 5, 2019
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 10,035,238
- Issue date Jul 31, 2018
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 9,969,046
- Issue date May 15, 2018
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 9,782,870
- Issue date Oct 10, 2017
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 9,669,515
- Issue date Jun 6, 2017
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for polishing a substrate
- Patent number 9,579,768
- Issue date Feb 28, 2017
- Ebara Corporation
- Yasuyuki Motoshima
- B24 - GRINDING POLISHING
Information Patent Grant
Measuring method of surface roughness of polishing pad
- Patent number 9,393,670
- Issue date Jul 19, 2016
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 9,242,339
- Issue date Jan 26, 2016
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Method of adjusting profile of a polishing member used in a polishi...
- Patent number 9,156,130
- Issue date Oct 13, 2015
- Ebara Corporation
- Takahiro Shimano
- B24 - GRINDING POLISHING
Information Patent Grant
Method of obtaining a sliding distance distribution of a dresser on...
- Patent number 9,108,292
- Issue date Aug 18, 2015
- Ebara Corporation
- Takahiro Shimano
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method
- Patent number 9,067,296
- Issue date Jun 30, 2015
- Ebara Corporation
- Katsutoshi Ono
- B24 - GRINDING POLISHING
Information Patent Grant
Method of measuring surface properties of polishing pad
- Patent number 8,932,883
- Issue date Jan 13, 2015
- Ebara Corporation
- Hisanori Matsuo
- G01 - MEASURING TESTING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,360,817
- Issue date Jan 29, 2013
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
CMP polishing method, CMP polishing apparatus, and process for prod...
- Patent number 8,241,426
- Issue date Aug 14, 2012
- Nikon Corporation
- Syozo Takada
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Polishing apparatus
- Patent number 7,207,864
- Issue date Apr 24, 2007
- Ebara Corporation
- Kenji Kamimura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 7,040,968
- Issue date May 9, 2006
- Ebara Corporation
- Kenji Kamimura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method using an abrading plate
- Patent number 6,942,548
- Issue date Sep 13, 2005
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,939,208
- Issue date Sep 6, 2005
- Ebara Corporation
- Kenji Kamimura
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing-product discharging device and polishing device
- Patent number 6,712,678
- Issue date Mar 30, 2004
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and dressing method
- Patent number 6,672,945
- Issue date Jan 6, 2004
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 6,626,739
- Issue date Sep 30, 2003
- Ebara Corporation
- Yutaka Wada
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND INFORMATION PROCESSING SYSTEM
- Publication number 20240308018
- Publication date Sep 19, 2024
- EBARA CORPORATION
- Yuta SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROPERTY MEASURING APPARATUS FOR POLISHING PAD, SURFACE PRO...
- Publication number 20240075579
- Publication date Mar 7, 2024
- EBARA CORPORATION
- Kohei OHSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20230026751
- Publication date Jan 26, 2023
- EBARA CORPORATION
- Hisanori MATSUO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20220347814
- Publication date Nov 3, 2022
- EBARA CORPORATION
- BAN ITO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20220063050
- Publication date Mar 3, 2022
- EBARA CORPORATION
- Hisanori MATSUO
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR POLISHING AND METHOD OF POLISHING
- Publication number 20210347010
- Publication date Nov 11, 2021
- EBARA CORPORATION
- Masayoshi ITO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS, INFORMATION PROCESSING SYSTEM, POLISHING METHO...
- Publication number 20210291312
- Publication date Sep 23, 2021
- EBARA CORPORATION
- Akira Nakamura
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING
- Publication number 20210283746
- Publication date Sep 16, 2021
- EBARA CORPORATION
- Takuya MORIURA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20210114164
- Publication date Apr 22, 2021
- EBARA CORPORATION
- Masashi KABASAWA
- B24 - GRINDING POLISHING
Information Patent Application
HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF P...
- Publication number 20190126428
- Publication date May 2, 2019
- EBARA CORPORATION
- Toru MARUYAMA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20190118334
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Toru MARUYAMA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
- Publication number 20180222007
- Publication date Aug 9, 2018
- EBARA CORPORATION
- Yasuyuki MOTOSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20180021917
- Publication date Jan 25, 2018
- EBARA CORPORATION
- Toru MARUYAMA
- G01 - MEASURING TESTING
Information Patent Application
CMP APPARATUS HAVING POLISHING PAD SURFACE PROPERTY MEASURING DEVICE
- Publication number 20180015590
- Publication date Jan 18, 2018
- EBARA CORPORATION
- Hisanori MATSUO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20170361420
- Publication date Dec 21, 2017
- EBARA CORPORATION
- Toru MARUYAMA
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR REGULATING SURFACE TEMPERATURE OF POLISHIN...
- Publication number 20170239778
- Publication date Aug 24, 2017
- EBARA CORPORATION
- Toru MARUYAMA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD
- Publication number 20160184960
- Publication date Jun 30, 2016
- EBARA CORPORATION
- Hisanori MATSUO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR JUDGING POLISHING PERFORMANCE OF POLISHING...
- Publication number 20150346088
- Publication date Dec 3, 2015
- EBARA CORPORATION
- Chikako TAKATOH
- G01 - MEASURING TESTING
Information Patent Application
POLISHING APPARATUS
- Publication number 20150283669
- Publication date Oct 8, 2015
- EBARA CORPORATION
- Hisanori MATSUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
- Publication number 20150224621
- Publication date Aug 13, 2015
- EBARA CORPORATION
- Yasuyuki MOTOSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20150079881
- Publication date Mar 19, 2015
- EBARA CORPORATION
- Toru MARUYAMA
- G01 - MEASURING TESTING
Information Patent Application
MEASURING METHOD OF SURFACE ROUGHNESS OF POLISHING PAD
- Publication number 20150056891
- Publication date Feb 26, 2015
- EBARA CORPORATION
- Hisanori MATSUO
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...
- Publication number 20140342642
- Publication date Nov 20, 2014
- Takahiro SHIMANO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF ADJUSTING PROFILE OF A POLISHING MEMBER USED IN A POLISHI...
- Publication number 20140287653
- Publication date Sep 25, 2014
- Takahiro SHIMANO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF MEASURING SURFACE PROPERTIES OF POLISHING PAD
- Publication number 20140273308
- Publication date Sep 18, 2014
- EBARA CORPORATION
- Hisanori MATSUO
- G01 - MEASURING TESTING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20140273753
- Publication date Sep 18, 2014
- Hisanori MATSUO
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD
- Publication number 20140262027
- Publication date Sep 18, 2014
- KYUSHU INSTITUTE OF TECHNOLOGY
- Hisanori MATSUO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE
- Publication number 20130023186
- Publication date Jan 24, 2013
- Yasuyuki MOTOSHIMA
- B24 - GRINDING POLISHING
Information Patent Application
CMP Polishing Method, CMP Polishing Apparatus, and Process for Prod...
- Publication number 20120315831
- Publication date Dec 13, 2012
- Syozo Takada
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
POLISHING METHOD
- Publication number 20120276816
- Publication date Nov 1, 2012
- Katsutoshi Ono
- B24 - GRINDING POLISHING

Hisanori Matsuo

Person

Patents Grantslast 30 patents

Apparatus for polishing and method of polishing

Polishing apparatus

Polishing apparatus, information processing system, polishing metho...

Polishing method and polishing apparatus

Method and apparatus for measuring surface properties of polishing pad

Apparatus and method for regulating surface temperature of polishin...

Apparatus for measuring surface properties of polishing pad

CMP apparatus having polishing pad surface property measuring device

Method and apparatus for polishing a substrate

Polishing method and polishing apparatus

Polishing method and polishing apparatus

Method and apparatus for polishing a substrate

Polishing method and polishing apparatus

Polishing apparatus

Method and apparatus for polishing a substrate

Measuring method of surface roughness of polishing pad

Polishing apparatus and polishing method

Method of adjusting profile of a polishing member used in a polishi...

Method of obtaining a sliding distance distribution of a dresser on...

Polishing method

Method of measuring surface properties of polishing pad

Polishing apparatus and polishing method

CMP polishing method, CMP polishing apparatus, and process for prod...

Polishing apparatus

Polishing apparatus

Polishing method using an abrading plate

Polishing apparatus

Polishing-product discharging device and polishing device

Polishing apparatus and dressing method

Polishing method and polishing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND INFORMATION PROCESSING SYSTEM

SURFACE PROPERTY MEASURING APPARATUS FOR POLISHING PAD, SURFACE PRO...

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS

APPARATUS FOR POLISHING AND METHOD OF POLISHING

POLISHING APPARATUS, INFORMATION PROCESSING SYSTEM, POLISHING METHO...

APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING

POLISHING APPARATUS

HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF P...

POLISHING METHOD AND POLISHING APPARATUS

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE

POLISHING METHOD AND POLISHING APPARATUS

CMP APPARATUS HAVING POLISHING PAD SURFACE PROPERTY MEASURING DEVICE

POLISHING METHOD AND POLISHING APPARATUS

APPARATUS AND METHOD FOR REGULATING SURFACE TEMPERATURE OF POLISHIN...

METHOD AND APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD

METHOD AND APPARATUS FOR JUDGING POLISHING PERFORMANCE OF POLISHING...

POLISHING APPARATUS

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE

POLISHING METHOD AND POLISHING APPARATUS

MEASURING METHOD OF SURFACE ROUGHNESS OF POLISHING PAD

METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...

METHOD OF ADJUSTING PROFILE OF A POLISHING MEMBER USED IN A POLISHI...

METHOD OF MEASURING SURFACE PROPERTIES OF POLISHING PAD

POLISHING APPARATUS AND POLISHING METHOD

APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE

CMP Polishing Method, CMP Polishing Apparatus, and Process for Prod...

POLISHING METHOD