Hitoshi Murata

Person

Souraku-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate temperature sensor, substrate retainer and substrate proc...
- Patent number 11,906,367
- Issue date Feb 20, 2024
- Kokusai Electric Corporation
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 11,359,285
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooling unit, heat insulating structure, and substrate processing a...
- Patent number 11,043,402
- Issue date Jun 22, 2021
- Kokusai Electric Corporation
- Tetsuya Kosugi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 10,597,780
- Issue date Mar 24, 2020
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electric furnace for substrate processing apparatus
- Patent number D860420
- Issue date Sep 17, 2019
- Kokusai Electric Corporation
- Tetsuya Kosugi
- D23 - Environmental heating and cooling
Information Patent Grant
Electric furnace for substrate processing apparatus
- Patent number D860419
- Issue date Sep 17, 2019
- Kokusai Electric Corporation
- Tetsuya Kosugi
- D23 - Environmental heating and cooling
Information Patent Grant
Substrate processing apparatus, heating apparatus, ceiling heat ins...
- Patent number 10,340,151
- Issue date Jul 2, 2019
- Kokusai Electric Corporation
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protector tube for thermocouple
- Patent number D819463
- Issue date Jun 5, 2018
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Protector tube for thermocouple
- Patent number D818850
- Issue date May 29, 2018
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Substrate processing apparatus and heating unit
- Patent number 9,957,616
- Issue date May 1, 2018
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater supporting device
- Patent number 9,779,970
- Issue date Oct 3, 2017
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater for semiconductor thermal process
- Patent number D795209
- Issue date Aug 22, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater for semiconductor thermal process
- Patent number D793975
- Issue date Aug 8, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater for semiconductor thermal process
- Patent number D793974
- Issue date Aug 8, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,695,511
- Issue date Jul 4, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulation structure and method of manufacturing semiconductor device
- Patent number 9,587,884
- Issue date Mar 7, 2017
- Hitachi Kokusai Electric Inc.
- Tetsuya Kosugi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus and heating equipment
- Patent number 9,460,946
- Issue date Oct 4, 2016
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device using meander-shaped h...
- Patent number 9,449,849
- Issue date Sep 20, 2016
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device, substrate processing apparatus, and method of manuf...
- Patent number 9,064,912
- Issue date Jun 23, 2015
- Hitachi Kokusai Electric, Inc.
- Hitoshi Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating device having a meander-shaped heating element with an insu...
- Patent number 8,847,124
- Issue date Sep 30, 2014
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 8,535,444
- Issue date Sep 17, 2013
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus and method of cleaning the CVD apparatus
- Patent number 8,277,560
- Issue date Oct 2, 2012
- National Institute of Advanced Industrial Science and Technology
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for cleaning CVD device and method of cleaning CVD device
- Patent number 8,043,438
- Issue date Oct 25, 2011
- National Institute of Advanced Industrial Science and Technology
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning CVD device and cleaning device therefor
- Patent number 6,935,351
- Issue date Aug 30, 2005
- Anelva Corporation
- Koji Shibata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and cleaning method of the same
- Patent number 6,807,971
- Issue date Oct 26, 2004
- Tokyo Electron Ltd.
- Yukimasa Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and cleaning method of the same
- Patent number 6,383,300
- Issue date May 7, 2002
- Tokyo Electron Ltd.
- Yukimasa Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE SENSOR, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUF...
- Publication number 20250004489
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Takayuki NAKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MEAS...
- Publication number 20240234187
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TEMPERATURE SENSOR, SUBSTRATE RETAINER AND SUBSTRATE PROC...
- Publication number 20240151591
- Publication date May 9, 2024
- Kokusai Electric Corporation
- Tokunobu AKAO
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANU...
- Publication number 20220122858
- Publication date Apr 21, 2022
- Kokusai Electric Corporation
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANU...
- Publication number 20220122859
- Publication date Apr 21, 2022
- Kokusai Electric Corporation
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210407865
- Publication date Dec 30, 2021
- Kokusai Electric Corporation
- Kenji SHINOZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20210313205
- Publication date Oct 7, 2021
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Temperature Sensor, Substrate Retainer and Substrate Proc...
- Publication number 20210181033
- Publication date Jun 17, 2021
- Kokusai Electric Corporation
- Tokunobu AKAO
- G01 - MEASURING TESTING
Information Patent Application
Substrate Processing Apparatus, Heater and Method of Manufacturing...
- Publication number 20200173024
- Publication date Jun 4, 2020
- Kokusai Electric Corporation
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER
- Publication number 20190284696
- Publication date Sep 19, 2019
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING UNIT, HEAT INSULATING STRUCTURE, AND SUBSTRATE PROCESSING A...
- Publication number 20190080941
- Publication date Mar 14, 2019
- Kokusai Electric Corporation
- Tetsuya KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RETAINER
- Publication number 20190024232
- Publication date Jan 24, 2019
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Heater and Method of Manufacturing...
- Publication number 20170335458
- Publication date Nov 23, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HEATING UNIT
- Publication number 20160244878
- Publication date Aug 25, 2016
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, HEATING APPARATUS, CEILING HEAT INS...
- Publication number 20150221532
- Publication date Aug 6, 2015
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150093909
- Publication date Apr 2, 2015
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140322926
- Publication date Oct 30, 2014
- Hitoshi Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATION STRUCTURE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140287375
- Publication date Sep 25, 2014
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HEATING EQUIPMENT
- Publication number 20120006506
- Publication date Jan 12, 2012
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER SUPPORTING DEVICE
- Publication number 20110281226
- Publication date Nov 17, 2011
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...
- Publication number 20110021039
- Publication date Jan 27, 2011
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...
- Publication number 20110021038
- Publication date Jan 27, 2011
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20090209113
- Publication date Aug 20, 2009
- Hitachi Kokusai Electric, Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for cleaning cvd device and method of cleaning cvd device
- Publication number 20060207630
- Publication date Sep 21, 2006
- RESEARCH INST. OF INNOVATIVE TECH. FOR THE EARTH
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd apparatus and method for cleaning cvd apparatus
- Publication number 20060201533
- Publication date Sep 14, 2006
- RESEARCH INST. OF INNOVATIVE TECH. FOR THE EARTH
- Etsuo Wani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd apparatus having means for cleaning with fluorine gas and metho...
- Publication number 20050252451
- Publication date Nov 17, 2005
- Tatsuro Beppu
- B08 - CLEANING
Information Patent Application
Cvd apparatus and method of cleaning the cvd apparatus
- Publication number 20040255854
- Publication date Dec 23, 2004
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd apparatus and method of cleaning the cvd apparatus
- Publication number 20040250775
- Publication date Dec 16, 2004
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of cleaning cvd device and cleaning device therefor
- Publication number 20030079757
- Publication date May 1, 2003
- Koji Shibata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat treatment apparatus and cleaning method of the same
- Publication number 20020073923
- Publication date Jun 20, 2002
- Yukimasa Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hitoshi Murata

Person

Patents Grantslast 30 patents

Substrate temperature sensor, substrate retainer and substrate proc...

Substrate processing apparatus, heater and method of manufacturing...

Cooling unit, heat insulating structure, and substrate processing a...

Substrate processing apparatus, heater and method of manufacturing...

Electric furnace for substrate processing apparatus

Electric furnace for substrate processing apparatus

Substrate processing apparatus, heating apparatus, ceiling heat ins...

Protector tube for thermocouple

Protector tube for thermocouple

Substrate processing apparatus and heating unit

Heater supporting device

Heater for semiconductor thermal process

Heater for semiconductor thermal process

Heater for semiconductor thermal process

Substrate processing apparatus, method of manufacturing semiconduct...

Insulation structure and method of manufacturing semiconductor device

Substrate processing apparatus and heating equipment

Method of manufacturing semiconductor device using meander-shaped h...

Heating device, substrate processing apparatus, and method of manuf...

Heating device having a meander-shaped heating element with an insu...

Substrate processing apparatus, method of manufacturing semiconduct...

CVD apparatus and method of cleaning the CVD apparatus

Device for cleaning CVD device and method of cleaning CVD device

Method of cleaning CVD device and cleaning device therefor

Heat treatment apparatus and cleaning method of the same

Heat treatment apparatus and cleaning method of the same

Patents Applicationslast 30 patents

TEMPERATURE SENSOR, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUF...

SUBSTRATE SUPPORTER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MEAS...

SUBSTRATE TEMPERATURE SENSOR, SUBSTRATE RETAINER AND SUBSTRATE PROC...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANU...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND APPARATUS FOR MANU...

Method of Manufacturing Semiconductor Device, Substrate Processing...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

Substrate Temperature Sensor, Substrate Retainer and Substrate Proc...

Substrate Processing Apparatus, Heater and Method of Manufacturing...

SUBSTRATE PROCESSING APPARATUS AND CEILING HEATER

COOLING UNIT, HEAT INSULATING STRUCTURE, AND SUBSTRATE PROCESSING A...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RETAINER

Substrate Processing Apparatus, Heater and Method of Manufacturing...

SUBSTRATE PROCESSING APPARATUS AND HEATING UNIT

SUBSTRATE PROCESSING APPARATUS, HEATING APPARATUS, CEILING HEAT INS...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

INSULATION STRUCTURE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS AND HEATING EQUIPMENT

HEATER SUPPORTING DEVICE

HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...

HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUF...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Device for cleaning cvd device and method of cleaning cvd device

Cvd apparatus and method for cleaning cvd apparatus

Cvd apparatus having means for cleaning with fluorine gas and metho...

Cvd apparatus and method of cleaning the cvd apparatus

Cvd apparatus and method of cleaning the cvd apparatus

Method of cleaning cvd device and cleaning device therefor

Heat treatment apparatus and cleaning method of the same