Hoa Thi Kieu

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reducing particle generation during sputter deposition
- Patent number 7,041,200
- Issue date May 9, 2006
- Applied Materials, Inc.
- Hien-Minh Huu Le
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing dielectric films
- Patent number 6,946,408
- Issue date Sep 20, 2005
- Applied Materials, Inc.
- Hien-Minh Huu Le
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming an anti-reflective coating on a su...
- Patent number 6,750,156
- Issue date Jun 15, 2004
- Applied Materials, Inc.
- Hien-Minh Huu Le
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Two-step AIN-PVD for improved film properties
- Patent number 6,312,568
- Issue date Nov 6, 2001
- Applied Materials, Inc.
- Ingo Wilke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon-doped titanium wetting layer for aluminum plug
- Patent number 6,232,665
- Issue date May 15, 2001
- Applied Materials, Inc.
- Gongda Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition process for coating or filling re-entry shaped contact h...
- Patent number 6,033,541
- Issue date Mar 7, 2000
- Applied Materials, Inc.
- Zheng Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon-doped titanium wetting layer for aluminum plug
- Patent number 5,911,113
- Issue date Jun 8, 1999
- Applied Materials, Inc.
- Gongda Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit structure having contact openings and vias fille...
- Patent number 5,847,461
- Issue date Dec 8, 1998
- Applied Materials, Inc.
- Zheng Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition process for coating or filling re-entry shaped contact h...
- Patent number 5,780,357
- Issue date Jul 14, 1998
- Applied Materials, Inc.
- Zheng Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of filling of contact openings and vias by self-extrusion of...
- Patent number 5,668,055
- Issue date Sep 16, 1997
- Applied Materials, Inc.
- Zheng Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Material deposition method for integrated circuit manufacturing
- Patent number 5,171,412
- Issue date Dec 15, 1992
- Applied Materials, Inc.
- Homoyoun Talieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for depositing dielectric films
- Publication number 20050136691
- Publication date Jun 23, 2005
- APPLIED MATERIALS, INC.
- Hien-Minh Huu Le
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reducing particle generation during sputter deposition
- Publication number 20030196890
- Publication date Oct 23, 2003
- APPLIED MATERIALS, INC.
- Hien-Minh Huu Le
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming an anti-reflective coating on a su...
- Publication number 20030077914
- Publication date Apr 24, 2003
- APPLIED MATERIALS, INC.
- Hien-Minh Huu Le
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TWO-STEP AIN-PVD FOR IMPROVED FILM PROPERTIES
- Publication number 20010008205
- Publication date Jul 19, 2001
- APPLIED MATERIALS, INC.
- INGO WILKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hoa Thi Kieu

Person

Patents Grantslast 30 patents

Reducing particle generation during sputter deposition

Method and apparatus for depositing dielectric films

Method and apparatus for forming an anti-reflective coating on a su...

Two-step AIN-PVD for improved film properties

Silicon-doped titanium wetting layer for aluminum plug

Deposition process for coating or filling re-entry shaped contact h...

Silicon-doped titanium wetting layer for aluminum plug

Integrated circuit structure having contact openings and vias fille...

Deposition process for coating or filling re-entry shaped contact h...

Method of filling of contact openings and vias by self-extrusion of...

Material deposition method for integrated circuit manufacturing

Patents Applicationslast 30 patents

Method and apparatus for depositing dielectric films

Reducing particle generation during sputter deposition

Method and apparatus for forming an anti-reflective coating on a su...

TWO-STEP AIN-PVD FOR IMPROVED FILM PROPERTIES