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Hong Sheng Yang

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    TILTED PVD SOURCE WITH ROTATING PEDESTAL
    • Publication number 20230130947
    • Publication date Apr 27, 2023
    • Applied Materials, Inc.
    • Harish PENMETHSA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Transition Metal Oxide Bilayers
    • Publication number 20150200361
    • Publication date Jul 16, 2015
    • INTERMOLECULAR INC.
    • Hieu Pham
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MULTIFUNCTIONAL ELECTRODE
    • Publication number 20140374240
    • Publication date Dec 25, 2014
    • Hieu Pham
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Methods of Plasma Surface Treatment in a PVD Chamber
    • Publication number 20140262749
    • Publication date Sep 18, 2014
    • Intermolecular, Inc.
    • Ashish Bodke
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTIFUNCTIONAL ELECTRODE
    • Publication number 20140224645
    • Publication date Aug 14, 2014
    • INTERMOLECULAR INC.
    • Hieu Pham
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Transition Metal Oxide Bilayers
    • Publication number 20140217348
    • Publication date Aug 7, 2014
    • INTERMOLECULAR INC.
    • Hieu Pham
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    High Deposition Rate Chamber with Co-Sputtering Capabilities
    • Publication number 20140174907
    • Publication date Jun 26, 2014
    • Intermolecular, Inc.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Multi-Piece Target and Magnetron to Prevent Sputtering of Target Ba...
    • Publication number 20140174921
    • Publication date Jun 26, 2014
    • Intermolecular, Inc.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Sputter Gun
    • Publication number 20140174918
    • Publication date Jun 26, 2014
    • Intermolecular, Inc.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Cooling Efficiency Method for Fluid Cooled Sputter Guns
    • Publication number 20140144771
    • Publication date May 29, 2014
    • Intermolecular, Inc.
    • Kent Riley Child
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Multifunctional Electrode
    • Publication number 20140038380
    • Publication date Feb 6, 2014
    • Kabushiki Kaisha Toshiba
    • Hieu Pham
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Transition Metal Oxide Bilayers
    • Publication number 20130334490
    • Publication date Dec 19, 2013
    • INTERMOLECULAR INC.
    • Hieu Pham
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    COMBINATORIAL PROCESSING USING MOSAIC SPUTTERING TARGETS
    • Publication number 20130270104
    • Publication date Oct 17, 2013
    • Intermolecular, Inc.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTIFUNCTIONAL ELECTRODE
    • Publication number 20130200323
    • Publication date Aug 8, 2013
    • Intermolecular, Inc.
    • Hieu Pham
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Transition Metal Oxide Bilayers
    • Publication number 20130200324
    • Publication date Aug 8, 2013
    • Intermolecular, Inc.
    • Hieu Pham
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method For Sputter Deposition And RF Plasma Sputter Etch Combinator...
    • Publication number 20130168231
    • Publication date Jul 4, 2013
    • INTERMOLECULAR INC.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Combinatorial Processing Using High Deposition Rate Sputtering
    • Publication number 20130167773
    • Publication date Jul 4, 2013
    • INTERMOLECULAR INC.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTER GUN SHUTTER
    • Publication number 20130153413
    • Publication date Jun 20, 2013
    • Intermolecular, Inc.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Tool with Tunable Fluid Flow
    • Publication number 20130153149
    • Publication date Jun 20, 2013
    • Intermolecular, Inc.
    • Danny Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROFILED SPUTTER TARGET
    • Publication number 20130146442
    • Publication date Jun 13, 2013
    • Intermolecular, Inc.
    • HONG SHENG YANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COMBINATORIAL RF BIAS METHOD FOR PVD
    • Publication number 20130149469
    • Publication date Jun 13, 2013
    • Intermolecular, Inc.
    • ShouQian Shao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method and Apparatus for Enhanced Film Uniformity
    • Publication number 20130101749
    • Publication date Apr 25, 2013
    • Intermolecular, Inc.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    High Metal Ionization Sputter Gun
    • Publication number 20130101750
    • Publication date Apr 25, 2013
    • Intermolecular, Inc.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTER GUN
    • Publication number 20130017316
    • Publication date Jan 17, 2013
    • Intermolecular, Inc.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Combinatorial and Full Substrate Sputter Deposition Tool and Method
    • Publication number 20120285819
    • Publication date Nov 15, 2012
    • Intermolecular, Inc.
    • Kent Riley Child
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CONTROL OF FILM COMPOSITION IN CO-SPUTTER DEPOSITION BY USING COLLI...
    • Publication number 20120258255
    • Publication date Oct 11, 2012
    • Intermolecular, Inc.
    • Hong Sheng Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Mechanism for continuously varying radial position of a magnetron
    • Publication number 20100243440
    • Publication date Sep 30, 2010
    • APPLIED MATERIALS, INCORPORATED
    • Keith A. Miller
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD TO MODULATE COVERAGE OF BARRIER AND SEED LAYER USING TITANIU...
    • Publication number 20100105204
    • Publication date Apr 29, 2010
    • Applied Materials, Inc.
    • WINSOR LAM
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING TARGET HAVING INCREASED LIFE AND SPUTTERING UNIFORMITY
    • Publication number 20080308416
    • Publication date Dec 18, 2008
    • APPLIED MATERIALS, INC.
    • Adolph Miller Allen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20080257261
    • Publication date Oct 23, 2008
    • Applied Materials, Inc.
    • Hiroji Hanawa
    • H01 - BASIC ELECTRIC ELEMENTS