Hsu-Sheng Yu

Person

Chi-Lung City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 9,449,915
- Issue date Sep 20, 2016
- Macronix International Co., Ltd.
- Hong-Ji Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling contact hole profile for metal fill-in
- Patent number 9,425,086
- Issue date Aug 23, 2016
- Macronix International Co., Ltd.
- Fang-Hao Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster system for eliminating barrier overhang
- Patent number 9,305,840
- Issue date Apr 5, 2016
- Macronix International Co., Ltd.
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for preventing Al-Cu bottom damage using TiN liner
- Patent number 8,076,778
- Issue date Dec 13, 2011
- Macronix International Co., Ltd.
- Kuo Liang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of simultaneously fabricating isolation structures having ro...
- Patent number 7,772,670
- Issue date Aug 10, 2010
- Macronix International Co., Ltd.
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming dielectric layer
- Patent number 7,648,921
- Issue date Jan 19, 2010
- Macronix International Co., Ltd.
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of simultaneously fabricating isolation structures having ro...
- Patent number 7,244,680
- Issue date Jul 17, 2007
- Macronix International Co., Ltd.
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of simultaneously fabricating isolation structures having v...
- Patent number 6,995,095
- Issue date Feb 7, 2006
- Macronix International Co., Ltd.
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating method of a semiconductor etcher
- Patent number 6,635,579
- Issue date Oct 21, 2003
- Macronix International Co. Ltd.
- Ming-Chung Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of fabricating memory cells for nonvolatile memory devices
- Patent number 6,551,899
- Issue date Apr 22, 2003
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20160190061
- Publication date Jun 30, 2016
- Macronix International Co., Ltd.
- Hong-Ji Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER SYSTEM FOR ELIMINATING BARRIER OVERHANG
- Publication number 20150179514
- Publication date Jun 25, 2015
- Macronix International Co., Ltd.
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING CONTACT HOLE PROFILE FOR METAL FILL-IN
- Publication number 20150179569
- Publication date Jun 25, 2015
- Macronix International Co., Ltd.
- Fang-Hao Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREVENTING Al-Cu BOTTOM DAMAGE USING TiN LINER
- Publication number 20110074030
- Publication date Mar 31, 2011
- Macronix International Co., Ltd.
- Kuo Liang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING DIELECTRIC LAYER
- Publication number 20080124940
- Publication date May 29, 2008
- Macronix International Co., Ltd.
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of simultaneously fabricating isolation structures having ro...
- Publication number 20070122993
- Publication date May 31, 2007
- MACRONIX INTERNATIONAL CO., LTD
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Non-volatile memory cell and method for manufacturing the same
- Publication number 20070111449
- Publication date May 17, 2007
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of simultaneously fabricating isolation structures having ro...
- Publication number 20050106871
- Publication date May 19, 2005
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of simultaneously fabricating isolation structures having v...
- Publication number 20050079722
- Publication date Apr 14, 2005
- Hsu-Sheng Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Operating method of a semiconductor etcher
- Publication number 20020168862
- Publication date Nov 14, 2002
- Ming-Chung Liang
- H01 - BASIC ELECTRIC ELEMENTS

Hsu-Sheng Yu

Person

Patents Grantslast 30 patents

Semiconductor device and method of manufacturing the same

Method of controlling contact hole profile for metal fill-in

Cluster system for eliminating barrier overhang

Method for preventing Al-Cu bottom damage using TiN liner

Method of simultaneously fabricating isolation structures having ro...

Method of forming dielectric layer

Method of simultaneously fabricating isolation structures having ro...

Methods of simultaneously fabricating isolation structures having v...

Operating method of a semiconductor etcher

Methods of fabricating memory cells for nonvolatile memory devices

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

CLUSTER SYSTEM FOR ELIMINATING BARRIER OVERHANG

METHOD OF CONTROLLING CONTACT HOLE PROFILE FOR METAL FILL-IN

METHOD FOR PREVENTING Al-Cu BOTTOM DAMAGE USING TiN LINER

METHOD OF FORMING DIELECTRIC LAYER

Method of simultaneously fabricating isolation structures having ro...

Non-volatile memory cell and method for manufacturing the same

Method of simultaneously fabricating isolation structures having ro...

Methods of simultaneously fabricating isolation structures having v...

Operating method of a semiconductor etcher