Ichiju Satoh

Person

Fujisawa-shi, Kanagawa 251-8502, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate rotation device, substrate cleaning device, substrate pro...
- Patent number 11,731,241
- Issue date Aug 22, 2023
- Ebara Corporation
- Ichiju Satoh
- B24 - GRINDING POLISHING
Information Patent Grant
Stage positioning device
- Patent number 6,437,864
- Issue date Aug 20, 2002
- Ebara Corporation
- Katsuhide Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polishing apparatus including attitude controller for turntable and...
- Patent number 6,354,907
- Issue date Mar 12, 2002
- Ebara Corporation
- Ichiju Satoh
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus including attitude controller for dressing appa...
- Patent number 6,322,434
- Issue date Nov 27, 2001
- Ebara Corporation
- Ichiju Satoh
- B24 - GRINDING POLISHING
Information Patent Grant
Damper device and turbomolecular pump with damper device
- Patent number 6,213,737
- Issue date Apr 10, 2001
- Ebara Corporation
- Chikara Murakami
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Filter circuit
- Patent number 6,212,540
- Issue date Apr 3, 2001
- Chikara Murakami
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Polishing apparatus
- Patent number 6,183,342
- Issue date Feb 6, 2001
- Ebara Corporation
- Katsuhide Watanabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Polishing apparatus
- Patent number 5,951,368
- Issue date Sep 14, 1999
- Ebara Corporation
- Katsuhide Watanabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
BEARING APPARATUS AND LASER APPARATUS COMPRISING BEARING APPARATUS
- Publication number 20240035514
- Publication date Feb 1, 2024
- EBARA CORPORATION
- Ichiju SATOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ROTATION DEVICE, SUBSTRATE CLEANING DEVICE, SUBSTRATE PRO...
- Publication number 20200047310
- Publication date Feb 13, 2020
- EBARA CORPORATION
- Ichiju Satoh
- B24 - GRINDING POLISHING
Information Patent Application
Vibration isolation system for a vacuum chamber
- Publication number 20060042059
- Publication date Mar 2, 2006
- EBARA CORPORATION
- Ichiju Satoh
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...

Ichiju Satoh

Person

Patents Grantslast 30 patents

Substrate rotation device, substrate cleaning device, substrate pro...

Stage positioning device

Polishing apparatus including attitude controller for turntable and...

Polishing apparatus including attitude controller for dressing appa...

Damper device and turbomolecular pump with damper device

Filter circuit

Polishing apparatus

Polishing apparatus

Patents Applicationslast 30 patents

BEARING APPARATUS AND LASER APPARATUS COMPRISING BEARING APPARATUS

SUBSTRATE ROTATION DEVICE, SUBSTRATE CLEANING DEVICE, SUBSTRATE PRO...

Vibration isolation system for a vacuum chamber