Isao Uchiyama

Person

Fukushima, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of purifying alkaline solution and method of etching semicon...
- Patent number 6,319,845
- Issue date Nov 20, 2001
- Shin-Etsu Handotai Co., Ltd.
- Isao Uchiyama
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of purifying alkaline solution and method of etching semicon...
- Patent number 6,110,839
- Issue date Aug 29, 2000
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for cleaning semiconductor silicon wafer
- Patent number 5,665,168
- Issue date Sep 9, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning silicon wafers in cleaning baths with controlled...
- Patent number 5,662,743
- Issue date Sep 2, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting particles on wafers
- Patent number 5,640,238
- Issue date Jun 17, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning semiconductor wafers
- Patent number 5,626,681
- Issue date May 6, 1997
- Shin-Etsu Handotai Co., Ltd.
- Masami Nakano
- B08 - CLEANING
Information Patent Grant
Device for handling wafers
- Patent number 5,595,412
- Issue date Jan 21, 1997
- Shin-Etsu Handotai Co., Ltd.
- Hideo Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Brush cleaning apparatus and cleaning system for disk-shaped object...
- Patent number 5,581,837
- Issue date Dec 10, 1996
- Shin-Etsu Handotai Co., Ltd.
- Isao Uchiyama
- B08 - CLEANING
Information Patent Grant
Wafer holder
- Patent number 5,555,634
- Issue date Sep 17, 1996
- Shin-Etsu Handotai Co., Ltd.
- Isao Uchiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for handling or processing semiconductor wafers
- Patent number 5,547,515
- Issue date Aug 20, 1996
- Shin-Etsu Handotai Co., Ltd.
- Hideo Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning tank
- Patent number 5,503,173
- Issue date Apr 2, 1996
- Shin-Etsu Handotai Co., Ltd.
- Hideo Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic cleaning apparatus for wafers
- Patent number 5,317,778
- Issue date Jun 7, 1994
- Shin-Etsu Handotai Co., Ltd.
- Hideo Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scrubber apparatus for cleaning a thin disk work
- Patent number 5,282,289
- Issue date Feb 1, 1994
- Shin-Etsu Handotai Co., Ltd.
- Fumihiko Hasegawa
- B08 - CLEANING
Information Patent Grant
Polishing apparatus
- Patent number 5,081,795
- Issue date Jan 21, 1992
- Shin-Etsu Handotai Company, Ltd.
- Kouichi Tanaka
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CARRIER FOR USE IN DOUBLE-SIDE POLISHING APPARATUS AND METHOD OF DO...
- Publication number 20150321311
- Publication date Nov 12, 2015
- Shin-Etsu Handotai Co., Ltd.
- Masanao SASAKI
- B24 - GRINDING POLISHING
Information Patent Application
Carrier for double-side polishing apparatus, double-side polishing...
- Publication number 20090305615
- Publication date Dec 10, 2009
- Shin-Etsu Handotai Co., Ltd.
- Isao Uchiyama
- B24 - GRINDING POLISHING

Isao Uchiyama

Person

Patents Grantslast 30 patents

Method of purifying alkaline solution and method of etching semicon...

Method of purifying alkaline solution and method of etching semicon...

Method for cleaning semiconductor silicon wafer

Method of cleaning silicon wafers in cleaning baths with controlled...

Method of inspecting particles on wafers

Method of cleaning semiconductor wafers

Device for handling wafers

Brush cleaning apparatus and cleaning system for disk-shaped object...

Wafer holder

Method for handling or processing semiconductor wafers

Wafer cleaning tank

Automatic cleaning apparatus for wafers

Scrubber apparatus for cleaning a thin disk work

Polishing apparatus

Patents Applicationslast 30 patents

CARRIER FOR USE IN DOUBLE-SIDE POLISHING APPARATUS AND METHOD OF DO...

Carrier for double-side polishing apparatus, double-side polishing...