James A. Folta

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Planarization of optical substrates
- Patent number 10,175,391
- Issue date Jan 8, 2019
- Lawrence Livermore National Security, LLC
- Christopher Stolz
- G02 - OPTICS
Information Patent Grant
Adhesive particle shielding
- Patent number 7,473,301
- Issue date Jan 6, 2009
- EUV LLC
- Leonard Elliott Klebanoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic mask for producing uniform or graded-thickness thin films
- Patent number 7,062,348
- Issue date Jun 13, 2006
- The Extreme Ultaviolet Lithography LLC
- James A. Folta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of precision optics using an imbedded reference surface
- Patent number 6,849,859
- Issue date Feb 1, 2005
- EUV Limited Liability Corporation
- James A. Folta
- G02 - OPTICS
Information Patent Grant
Correction of localized shape errors on optical surfaces by alterin...
- Patent number 6,844,272
- Issue date Jan 18, 2005
- EUV Limited Liability Corporation
- John S. Taylor
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optimized capping layers for EUV multilayers
- Patent number 6,780,496
- Issue date Aug 24, 2004
- EUV LLC
- Sasa Bajt
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method and system using power modulation and velocity modulation pr...
- Patent number 6,668,207
- Issue date Dec 23, 2003
- The United States of America
- Claude Montcalm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-cost method for producing extreme ultraviolet lithography optics
- Patent number 6,634,760
- Issue date Oct 21, 2003
- The Regents of the University of California
- James A. Folta
- G02 - OPTICS
Information Patent Grant
Conformal chemically resistant coatings for microflow devices
- Patent number 6,562,404
- Issue date May 13, 2003
- The Regents of the University of California
- James A. Folta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for producing sputtered thin films with sub-angst...
- Patent number 6,524,449
- Issue date Feb 25, 2003
- James A. Folta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system using power modulation for maskless vapor deposit...
- Patent number 6,425,988
- Issue date Jul 30, 2002
- Claude Montcalm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to adjust multilayer film stress induced deformation of optics
- Patent number 6,134,049
- Issue date Oct 17, 2000
- The Regents of the University of California
- Eberhard A. Spiller
- G02 - OPTICS
Information Patent Grant
Zero dead volume tube to surface seal
- Patent number 6,056,331
- Issue date May 2, 2000
- The Regents of the University of California
- William J. Benett
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Fabrication method for miniature plastic gripper
- Patent number 5,783,130
- Issue date Jul 21, 1998
- Regents of the University of California
- William J. Benett
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Miniaturized flow injection analysis system
- Patent number 5,644,395
- Issue date Jul 1, 1997
- Regents of the University of California
- James A. Folta
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Miniature plastic gripper and fabrication method
- Patent number 5,609,608
- Issue date Mar 11, 1997
- Regents of the University of California
- William J. Benett
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Patents Applicationslast 30 patents

Information Patent Application
PLANARIZATION OF OPTICAL SUBSTRATES
- Publication number 20190162879
- Publication date May 30, 2019
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Christopher J. Stolz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANARIZATION OF OPTICAL SUBSTRATES
- Publication number 20150276993
- Publication date Oct 1, 2015
- Christopher J. Stolz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Correcting surface contour of a non-rigid object through control of...
- Publication number 20040100638
- Publication date May 27, 2004
- The Regents of the University of California.
- James A. Folta
- G02 - OPTICS
Information Patent Application
Use of ion beams for protecting substrates from particulate defect...
- Publication number 20040055871
- Publication date Mar 25, 2004
- The Regents of the University of California.
- Christopher C. Walton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Adhesive particle shielding
- Publication number 20040050317
- Publication date Mar 18, 2004
- Leonard Elliott Klebanoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Correction of localized shape errors on optical surfaces by alterin...
- Publication number 20030164949
- Publication date Sep 4, 2003
- The Regents of the University of California.
- John S. Taylor
- B82 - NANO-TECHNOLOGY
Information Patent Application
Low-cost method for producing extreme ultraviolet lithography optics
- Publication number 20030043483
- Publication date Mar 6, 2003
- The Regents of the University of California.
- James A. Folta
- G02 - OPTICS
Information Patent Application
Optimized capping layers for EUV multilayers
- Publication number 20030008180
- Publication date Jan 9, 2003
- The Regents of the University of California.
- Sasa Bajt
- B82 - NANO-TECHNOLOGY
Information Patent Application
Optimized capping layers for EUV multilayers
- Publication number 20030008148
- Publication date Jan 9, 2003
- Sasa Bajt
- B82 - NANO-TECHNOLOGY
Information Patent Application
Fabrication of precision optics using an imbedded reference surface
- Publication number 20020135778
- Publication date Sep 26, 2002
- The Regents of the University of California.
- James A. Folta
- G02 - OPTICS

James A. Folta

Person

Patents Grantslast 30 patents

Planarization of optical substrates

Adhesive particle shielding

Dynamic mask for producing uniform or graded-thickness thin films

Fabrication of precision optics using an imbedded reference surface

Correction of localized shape errors on optical surfaces by alterin...

Optimized capping layers for EUV multilayers

Method and system using power modulation and velocity modulation pr...

Low-cost method for producing extreme ultraviolet lithography optics

Conformal chemically resistant coatings for microflow devices

Method and system for producing sputtered thin films with sub-angst...

Method and system using power modulation for maskless vapor deposit...

Method to adjust multilayer film stress induced deformation of optics

Zero dead volume tube to surface seal

Fabrication method for miniature plastic gripper

Miniaturized flow injection analysis system

Miniature plastic gripper and fabrication method

Patents Applicationslast 30 patents

PLANARIZATION OF OPTICAL SUBSTRATES

PLANARIZATION OF OPTICAL SUBSTRATES

Correcting surface contour of a non-rigid object through control of...

Use of ion beams for protecting substrates from particulate defect...

Adhesive particle shielding

Correction of localized shape errors on optical surfaces by alterin...

Low-cost method for producing extreme ultraviolet lithography optics

Optimized capping layers for EUV multilayers

Optimized capping layers for EUV multilayers

Fabrication of precision optics using an imbedded reference surface