James Caron

Person

Tracy, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for selectively etching film
- Patent number 10,727,089
- Issue date Jul 28, 2020
- Lam Research Corporation
- James Eugene Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber member of a plasma source and pedestal with radially outwar...
- Patent number 10,699,878
- Issue date Jun 30, 2020
- Lam Research Corporation
- James Eugene Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer lift ring system for wafer transfer
- Patent number 10,438,833
- Issue date Oct 8, 2019
- Lam Research Corporation
- Brian Severson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for increasing electron density levels in a plasm...
- Patent number 10,147,588
- Issue date Dec 4, 2018
- Lam Research Corporation
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generator systems and methods of forming plasma
- Patent number 8,916,022
- Issue date Dec 23, 2014
- Novellus Systems, Inc.
- James Caron
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reactor showerhead face plate having concentric ridge pattern
- Patent number D641829
- Issue date Jul 19, 2011
- Novellus Systems, Inc.
- Ivelin A. Angelov
- D23 - Environmental heating and cooling

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR CONTROLLING A PLASMA SHEATH CHARACTERISTIC
- Publication number 20230245874
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION DIRECTIONALITY ESC
- Publication number 20180233321
- Publication date Aug 16, 2018
- LAM RESEARCH CORPORATION
- James E. CARON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LIFT RING SYSTEM FOR WAFER TRANSFER
- Publication number 20170236743
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- Brian Severson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER MEMEBER OF A PLASMA SOURCE AND PEDESTAL WITH RADIALLY OUTWA...
- Publication number 20170236688
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- James Eugene Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR INCREASING ELECTRON DENSITY LEVELS IN A PLASM...
- Publication number 20170236694
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SELECTIVELY ETCHING FILM
- Publication number 20170236731
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- James Eugene Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD CONFIGURATIONS FOR PLASMA REACTORS
- Publication number 20120108072
- Publication date May 3, 2012
- Ivelin A. Angelov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

James Caron

Person

Patents Grantslast 30 patents

Systems and methods for selectively etching film

Chamber member of a plasma source and pedestal with radially outwar...

Wafer lift ring system for wafer transfer

System and method for increasing electron density levels in a plasm...

Plasma generator systems and methods of forming plasma

Plasma reactor showerhead face plate having concentric ridge pattern

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR CONTROLLING A PLASMA SHEATH CHARACTERISTIC

ION DIRECTIONALITY ESC

WAFER LIFT RING SYSTEM FOR WAFER TRANSFER

CHAMBER MEMEBER OF A PLASMA SOURCE AND PEDESTAL WITH RADIALLY OUTWA...

SYSTEM AND METHOD FOR INCREASING ELECTRON DENSITY LEVELS IN A PLASM...

SYSTEMS AND METHODS FOR SELECTIVELY ETCHING FILM

SHOWERHEAD CONFIGURATIONS FOR PLASMA REACTORS