James R. McLane

Person

Beverly, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for calibration of substrate temperature using...
- Patent number 11,543,296
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot calibration method
- Patent number 9,026,249
- Issue date May 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Jason M. Schaller
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Material transport systems using autonomous controls
- Patent number 8,073,559
- Issue date Dec 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Han Zhang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and apparatus for glitch recovery in stationary-beam ion im...
- Patent number 7,361,913
- Issue date Apr 22, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HIGH-PRECISION IN-SITU VERIFICATION AND CORRECTION OF WAFER POSITIO...
- Publication number 20240412997
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Michael Lee SWEARS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CALIBRATION OF SUBSTRATE TEMPERATURE USING...
- Publication number 20200378832
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Eric D. Wilson
- G01 - MEASURING TESTING
Information Patent Application
ROBOT CALIBRATION METHOD
- Publication number 20140081456
- Publication date Mar 20, 2014
- Jason M. Schaller
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MATERIAL TRANSPORT SYSTEMS USING AUTONOMOUS CONTROLS
- Publication number 20090319073
- Publication date Dec 24, 2009
- Han Zhang
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE HANDLING SYSTEM AND METHOD
- Publication number 20080075563
- Publication date Mar 27, 2008
- James R. McLane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mask position detection
- Publication number 20080073569
- Publication date Mar 27, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Charles A. Teodorczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for glitch recovery in stationary-beam ion im...
- Publication number 20060219954
- Publication date Oct 5, 2006
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS

James R. McLane

Person

Patents Grantslast 30 patents

Method and apparatus for calibration of substrate temperature using...

Robot calibration method

Material transport systems using autonomous controls

Methods and apparatus for glitch recovery in stationary-beam ion im...

Patents Applicationslast 30 patents

HIGH-PRECISION IN-SITU VERIFICATION AND CORRECTION OF WAFER POSITIO...

METHOD AND APPARATUS FOR CALIBRATION OF SUBSTRATE TEMPERATURE USING...

ROBOT CALIBRATION METHOD

MATERIAL TRANSPORT SYSTEMS USING AUTONOMOUS CONTROLS

SUBSTRATE HANDLING SYSTEM AND METHOD

Mask position detection

Methods and apparatus for glitch recovery in stationary-beam ion im...