James R. McLane

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Beverly, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for calibration of substrate temperature using...
- Patent number 11,543,296
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot calibration method
- Patent number 9,026,249
- Issue date May 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Jason M. Schaller
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Material transport systems using autonomous controls
- Patent number 8,073,559
- Issue date Dec 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Han Zhang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and apparatus for glitch recovery in stationary-beam ion im...
- Patent number 7,361,913
- Issue date Apr 22, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CALIBRATION OF SUBSTRATE TEMPERATURE USING...
- Publication number 20200378832
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Eric D. Wilson
- G01 - MEASURING TESTING
Information Patent Application
ROBOT CALIBRATION METHOD
- Publication number 20140081456
- Publication date Mar 20, 2014
- Jason M. Schaller
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MATERIAL TRANSPORT SYSTEMS USING AUTONOMOUS CONTROLS
- Publication number 20090319073
- Publication date Dec 24, 2009
- Han Zhang
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE HANDLING SYSTEM AND METHOD
- Publication number 20080075563
- Publication date Mar 27, 2008
- James R. McLane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mask position detection
- Publication number 20080073569
- Publication date Mar 27, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Charles A. Teodorczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for glitch recovery in stationary-beam ion im...
- Publication number 20060219954
- Publication date Oct 5, 2006
- Russell J. Low
- H01 - BASIC ELECTRIC ELEMENTS