Jeffery W. Butterbaugh

Person

Chanhassen, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for rotating and translating a substrate in a p...
- Patent number 11,458,512
- Issue date Oct 4, 2022
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 11,355,376
- Issue date Jun 7, 2022
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for monitoring treatment of microelectronic subst...
- Patent number 11,207,715
- Issue date Dec 28, 2021
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Jeffery W. Butterbaugh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 10,991,610
- Issue date Apr 27, 2021
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Grant
Systems and methods for rotating and translating a substrate in a p...
- Patent number 10,843,236
- Issue date Nov 24, 2020
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 10,748,789
- Issue date Aug 18, 2020
- Tel FSI, Inc.
- Chimaobi W. Mbanaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 10,062,596
- Issue date Aug 28, 2018
- Tel FSI, Inc.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 10,020,217
- Issue date Jul 10, 2018
- Tel FSI, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 10,014,191
- Issue date Jul 3, 2018
- Tel FSI, Inc.
- Chimaobi W. Mbanaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for silicon nitride removal selective to SiGex
- Patent number 9,691,628
- Issue date Jun 27, 2017
- Tel FSI, Inc.
- Jeffery W. Butterbaugh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for silicon nitride removal selective to SiGex
- Patent number 9,299,570
- Issue date Mar 29, 2016
- Tel FSI, Inc.
- Jeffery W. Butterbaugh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for selectively removing nitride from substrates
- Patent number 9,059,104
- Issue date Jun 16, 2015
- Tel FSI, Inc.
- Anthony S. Ratkovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for treatment of substrates with water vapor or steam
- Patent number 8,920,577
- Issue date Dec 30, 2014
- Tel FSI, Inc.
- David DeKraker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for treatment of substrates with water vapor or steam
- Patent number 7,819,984
- Issue date Oct 26, 2010
- FSI International, Inc.
- David DeKraker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for surface conditioning
- Patent number 7,025,831
- Issue date Apr 11, 2006
- FSI International, Inc.
- Jeffery W. Butterbaugh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of surface preparation
- Patent number 6,465,374
- Issue date Oct 15, 2002
- FSI International, Inc.
- Jeffery W. Butterbaugh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method
- Patent number 6,124,211
- Issue date Sep 26, 2000
- FSI International, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Grant
Vapor phase cleaning of alkali and alkaline earth metals
- Patent number 6,107,166
- Issue date Aug 22, 2000
- FSI International, Inc.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for surface conditioning
- Patent number 6,015,503
- Issue date Jan 18, 2000
- FSI International, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Grant
Process for metals removal using beta-diketone or beta-ketoimine li...
- Patent number 5,782,986
- Issue date Jul 21, 1998
- FSI International
- Jeffery W. Butterbaugh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method
- Patent number 5,716,495
- Issue date Feb 10, 1998
- FSI International
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Grant
Apparatus for surface conditioning
- Patent number 5,580,421
- Issue date Dec 3, 1996
- FSI International
- C. Fred Hiatt
- B08 - CLEANING
Information Patent Grant
UV-enhanced dry stripping of silicon nitride films
- Patent number 5,534,107
- Issue date Jul 9, 1996
- FSI International
- David C. Gray
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
WET PROCESSING OF MICROELECTRONIC SUBSTRATES WITH CONTROLLED MIXING...
- Publication number 20230352321
- Publication date Nov 2, 2023
- TEL Manufacturing and Engineering of America, Inc.
- Thomas J. Wagener
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...
- Publication number 20220088647
- Publication date Mar 24, 2022
- TEL Manufacturing and Engineering of America, Inc.
- Jeffery W. Butterbaugh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MI...
- Publication number 20210050233
- Publication date Feb 18, 2021
- TEL Manufacturing and Engineering of America, Inc.
- Chimaobi W. Mbanaso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Rotating and Translating a Substrate in a P...
- Publication number 20210023591
- Publication date Jan 28, 2021
- TEL Manufacturing and Engineering of American, Inc.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...
- Publication number 20190337026
- Publication date Nov 7, 2019
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MI...
- Publication number 20180308720
- Publication date Oct 25, 2018
- TEL FSI, Inc.
- Chimaobi W. Mbanso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Rotating and Translating a Substrate in a P...
- Publication number 20180214915
- Publication date Aug 2, 2018
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECIPE SELECTABLE DISPENSE SYSTEM AND METHOD OF OPERATING
- Publication number 20180190517
- Publication date Jul 5, 2018
- TEL FSI, Inc.
- David DeKraker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20160303617
- Publication date Oct 20, 2016
- TEL FSI, Inc.
- Chimaobi W. Mbanaso
- B08 - CLEANING
Information Patent Application
METHOD FOR WET STRIPPING SILICON-CONTAINING ORGANIC LAYERS
- Publication number 20160284535
- Publication date Sep 29, 2016
- TEL FSI, Inc.
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20160096206
- Publication date Apr 7, 2016
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20160096207
- Publication date Apr 7, 2016
- TEL FSI, Inc,
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20160096210
- Publication date Apr 7, 2016
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...
- Publication number 20160096209
- Publication date Apr 7, 2016
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
Process for Silicon Nitride Removal Selective to SiGex
- Publication number 20160013068
- Publication date Jan 14, 2016
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process for Silicon Nitride Removal Selective to SiGex
- Publication number 20130203262
- Publication date Aug 8, 2013
- TEL FSI, Inc.
- Jeffery W. Butterbaugh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR SELECTIVELY REMOVING NITRIDE FROM SUBSTRATES
- Publication number 20120145672
- Publication date Jun 14, 2012
- Anthony S. Ratkovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET PROCESSING OF MICROELECTRONIC SUBSTRATES WITH CONTROLLED MIXING...
- Publication number 20110259376
- Publication date Oct 27, 2011
- Thomas J. Wagener
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID AEROSOL PARTICLE REMOVAL METHOD
- Publication number 20110180114
- Publication date Jul 28, 2011
- Jeffery W. Butterbaugh
- B08 - CLEANING
Information Patent Application
PROCESS FOR TREATMENT OF SUBSTRATES WITH WATER VAPOR OR STEAM
- Publication number 20100326477
- Publication date Dec 30, 2010
- David DeKraker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process for treatment of substrates with water vapor or steam
- Publication number 20080283090
- Publication date Nov 20, 2008
- David DeKraker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid aersol particle removal method
- Publication number 20080006303
- Publication date Jan 10, 2008
- Jeffery W. Butterbaugh
- B08 - CLEANING

Jeffery W. Butterbaugh

Person

Patents Grantslast 30 patents

Systems and methods for rotating and translating a substrate in a p...

Systems and methods for treating substrates with cryogenic fluid mi...

System and method for monitoring treatment of microelectronic subst...

Systems and methods for treating substrates with cryogenic fluid mi...

Systems and methods for rotating and translating a substrate in a p...

Systems and methods for treating substrates with cryogenic fluid mi...

Systems and methods for treating substrates with cryogenic fluid mi...

Systems and methods for treating substrates with cryogenic fluid mi...

Systems and methods for treating substrates with cryogenic fluid mi...

Process for silicon nitride removal selective to SiGex

Process for silicon nitride removal selective to SiGex

Process for selectively removing nitride from substrates

Process for treatment of substrates with water vapor or steam

Process for treatment of substrates with water vapor or steam

Apparatus for surface conditioning

Method of surface preparation

Cleaning method

Vapor phase cleaning of alkali and alkaline earth metals

Method and apparatus for surface conditioning

Process for metals removal using beta-diketone or beta-ketoimine li...

Cleaning method

Apparatus for surface conditioning

UV-enhanced dry stripping of silicon nitride films

Patents Applicationslast 30 patents

WET PROCESSING OF MICROELECTRONIC SUBSTRATES WITH CONTROLLED MIXING...

SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...

SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MI...

Systems and Methods for Rotating and Translating a Substrate in a P...

SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBST...

SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MI...

Systems and Methods for Rotating and Translating a Substrate in a P...

RECIPE SELECTABLE DISPENSE SYSTEM AND METHOD OF OPERATING

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

METHOD FOR WET STRIPPING SILICON-CONTAINING ORGANIC LAYERS

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

Systems and Methods for Treating Substrates with Cryogenic Fluid Mi...

Process for Silicon Nitride Removal Selective to SiGex

Process for Silicon Nitride Removal Selective to SiGex

PROCESS FOR SELECTIVELY REMOVING NITRIDE FROM SUBSTRATES

WET PROCESSING OF MICROELECTRONIC SUBSTRATES WITH CONTROLLED MIXING...

LIQUID AEROSOL PARTICLE REMOVAL METHOD

PROCESS FOR TREATMENT OF SUBSTRATES WITH WATER VAPOR OR STEAM

Process for treatment of substrates with water vapor or steam

Liquid aersol particle removal method