Ji Zhu

Person

El Cerrito, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Efficient cleaning and etching of high aspect ratio structures
- Patent number 12,040,193
- Issue date Jul 16, 2024
- Lam Research Corporation
- Ji Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture including hydrogen fluoride, alcohol and an additive fo...
- Patent number 11,823,892
- Issue date Nov 21, 2023
- Lam Research AG
- Ji Zhu
- B08 - CLEANING
Information Patent Grant
Efficient cleaning and etching of high aspect ratio structures
- Patent number 11,488,831
- Issue date Nov 1, 2022
- Lam Research Corporation
- Ji Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrahigh selective nitride etch to form FinFET devices
- Patent number 11,469,079
- Issue date Oct 11, 2022
- Lam Research Corporation
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to etch copper barrier film
- Patent number 9,570,320
- Issue date Feb 14, 2017
- Lam Research Corporation
- Meihua Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of dielectric film treatment
- Patent number 9,236,279
- Issue date Jan 12, 2016
- Lam Research Corporation
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removing contaminants from substrate
- Patent number 8,758,522
- Issue date Jun 24, 2014
- Lam Research Corporation
- Ji Zhu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method and system for uniformly applying a multi-phase cleaning sol...
- Patent number 8,726,919
- Issue date May 20, 2014
- Lam Research Corporation
- Jeffrey J. Farber
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of reducing pattern collapse in high aspect ratio nanostruct...
- Patent number 8,617,993
- Issue date Dec 31, 2013
- Lam Research Corporation
- Amir A. Yasseri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for application of two-phase contaminant removal medium
- Patent number 8,601,639
- Issue date Dec 10, 2013
- Lam Research Corporation
- Ji Zhu
- B08 - CLEANING
Information Patent Grant
Method and system for uniformly applying a multi-phase cleaning sol...
- Patent number 8,567,421
- Issue date Oct 29, 2013
- Lam Research Corporation
- Jeffrey J. Farber
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods for fabrication of positional and compositionally controlle...
- Patent number 8,486,287
- Issue date Jul 16, 2013
- The Regents of the University of California
- Ji Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for application of two-phase contaminant removal medium
- Patent number 8,480,809
- Issue date Jul 9, 2013
- Lam Research Corporation
- Ji Zhu
- B08 - CLEANING
Information Patent Grant
Materials and systems for advanced substrate cleaning
- Patent number 8,314,055
- Issue date Nov 20, 2012
- Lam Research Corporation
- David S. L. Mui
- B08 - CLEANING
Information Patent Grant
Methods for particle removal by single-phase and two-phase media
- Patent number 8,226,775
- Issue date Jul 24, 2012
- Lam Research Corporation
- David S. L. Mui
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Composition of a cleaning material for particle removal
- Patent number 8,227,394
- Issue date Jul 24, 2012
- Lam Research Corporation
- Ji Zhu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Materials for particle removal by single-phase and two-phase media
- Patent number 8,211,846
- Issue date Jul 3, 2012
- Lam Research Group
- David S. L. Mui
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Composition and application of a two-phase contaminant removal medium
- Patent number 8,105,997
- Issue date Jan 31, 2012
- Lam Research Corporation
- Ji Zhu
- B08 - CLEANING
Information Patent Grant
Apparatus for particle removal by single-phase and two-phase media
- Patent number 8,084,406
- Issue date Dec 27, 2011
- Lam Research Corporation
- David S. L. Mui
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method and apparatus for removing contaminants from substrate
- Patent number 7,967,019
- Issue date Jun 28, 2011
- Lam Research Corporation
- Ji Zhu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method and apparatus for uniformly applying a multi-phase cleaning...
- Patent number 7,913,703
- Issue date Mar 29, 2011
- Lam Research Corporation
- Jeffrey J. Farber
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for cleaning edge of substrate and method for using the same
- Patent number 7,758,404
- Issue date Jul 20, 2010
- Lam Research Corporation
- Jason A. Ryder
- B24 - GRINDING POLISHING
Information Patent Grant
Post etch wafer surface cleaning with liquid meniscus
- Patent number 7,597,765
- Issue date Oct 6, 2009
- Lam Research Corporation
- Ji Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for plasma stripping using periodic modulation of gas chemis...
- Patent number 7,294,580
- Issue date Nov 13, 2007
- Lam Research Corporation
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20240363355
- Publication date Oct 31, 2024
- LAM RESEARCH CORPORATION
- Ji ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MIXTURE INCLUDING HYDROGEN FLUORIDE, ALCOHOL AND AN ADDITIVE FO...
- Publication number 20240038526
- Publication date Feb 1, 2024
- LAM RESEARCH AG
- Ji ZHU
- B08 - CLEANING
Information Patent Application
SELECTIVE SILICON TRIM BY THERMAL ETCHING
- Publication number 20230268189
- Publication date Aug 24, 2023
- LAM RESEARCH CORPORATION
- Nathan Musselwhite
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE PRECISION ETCHING OF SEMICONDUCTOR MATERIALS
- Publication number 20230207328
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Nathan MUSSELWHITE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING
- Publication number 20230131233
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Nathan Lavdovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES
- Publication number 20230084901
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Kwame EASON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20230035732
- Publication date Feb 2, 2023
- LAM RESEARCH CORPORATION
- Ji ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MIXTURE INCLUDING HYDROGEN FLUORIDE, ALCOHOL AND AN ADDITIVE FO...
- Publication number 20210391166
- Publication date Dec 16, 2021
- LAM RESEARCH AG
- Ji ZHU
- B08 - CLEANING
Information Patent Application
EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20210249274
- Publication date Aug 12, 2021
- LAM RESEARCH CORPORATION
- Ji ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PLASMA-LESS DE-HALOGENATION
- Publication number 20190051540
- Publication date Feb 14, 2019
- LAM RESEARCH CORPORATION
- Ji Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES
- Publication number 20180269070
- Publication date Sep 20, 2018
- LAM RESEARCH CORPORATION
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOVEL METHOD TO ETCH COPPER BARRIER FILM
- Publication number 20160104630
- Publication date Apr 14, 2016
- LAM RESEARCH CORPORATION
- Meihua SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOL...
- Publication number 20140202503
- Publication date Jul 24, 2014
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DIELECTRIC FILM TREATMENT
- Publication number 20140048108
- Publication date Feb 20, 2014
- LAM RESEARCH CORPORATION
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...
- Publication number 20140014146
- Publication date Jan 16, 2014
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Application of Two-Phase Contaminant Removal Medium
- Publication number 20120132229
- Publication date May 31, 2012
- LAM RESEARCH CORPORATION
- Ji Zhu
- B08 - CLEANING
Information Patent Application
Apparatus for Application of Two-Phase Contaminant Removal Medium
- Publication number 20120132235
- Publication date May 31, 2012
- LAM RESEARCH CORPORATION
- Ji Zhu
- B08 - CLEANING
Information Patent Application
APPARATUS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
- Publication number 20120132234
- Publication date May 31, 2012
- David S.L. Mui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Removing Contaminants from Substrate
- Publication number 20120125375
- Publication date May 24, 2012
- LAM RESEARCH CORPORATION
- Ji Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Post Etch Polymer Residue Removal
- Publication number 20120115332
- Publication date May 10, 2012
- LAM RESEARCH CORPORATION
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REDUCING PATTERN COLLAPSE IN HIGH ASPECT RATIO NANOSTRUC...
- Publication number 20110189858
- Publication date Aug 4, 2011
- LAM RESEARCH CORPORATION
- Amir A. Yasseri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...
- Publication number 20110132400
- Publication date Jun 9, 2011
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPOSITION OF A CLEANING MATERIAL FOR PARTICLE REMOVAL
- Publication number 20100120647
- Publication date May 13, 2010
- LAM RESEARCH CORPORATION
- Ji Zhu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
COMPOSITION AND APPLICATION OF A TWO-PHASE CONTAMINANT REMOVAL MEDIUM
- Publication number 20100116290
- Publication date May 13, 2010
- LAM RESEARCH CORPORATION
- Ji Zhu
- B08 - CLEANING
Information Patent Application
MATERIALS AND SYSTEMS FOR ADVANCED SUBSTRATE CLEANING
- Publication number 20100016202
- Publication date Jan 21, 2010
- LAM RESEARCH CORPORATION
- David S. L. Mui
- B08 - CLEANING
Information Patent Application
METHOD OF DIELECTRIC FILM TREATMENT
- Publication number 20090229638
- Publication date Sep 17, 2009
- LAM RESEARCH CORPORATION
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of post etch polymer residue removal
- Publication number 20090211596
- Publication date Aug 27, 2009
- LAM RESEARCH CORPORATION
- Seokmin Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
- Publication number 20090151757
- Publication date Jun 18, 2009
- David S.L. Mui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
- Publication number 20090151752
- Publication date Jun 18, 2009
- David S.L. Mui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIALS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
- Publication number 20090156452
- Publication date Jun 18, 2009
- David S.L. Mui
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Efficient cleaning and etching of high aspect ratio structures

Gas mixture including hydrogen fluoride, alcohol and an additive fo...

Efficient cleaning and etching of high aspect ratio structures

Ultrahigh selective nitride etch to form FinFET devices

Method to etch copper barrier film

Method of dielectric film treatment

Method and apparatus for removing contaminants from substrate

Method and system for uniformly applying a multi-phase cleaning sol...

Method of reducing pattern collapse in high aspect ratio nanostruct...

Apparatus for application of two-phase contaminant removal medium

Method and system for uniformly applying a multi-phase cleaning sol...

Methods for fabrication of positional and compositionally controlle...

Methods for application of two-phase contaminant removal medium

Materials and systems for advanced substrate cleaning

Methods for particle removal by single-phase and two-phase media

Composition of a cleaning material for particle removal

Materials for particle removal by single-phase and two-phase media

Composition and application of a two-phase contaminant removal medium

Apparatus for particle removal by single-phase and two-phase media

Method and apparatus for removing contaminants from substrate

Method and apparatus for uniformly applying a multi-phase cleaning...

Apparatus for cleaning edge of substrate and method for using the same

Post etch wafer surface cleaning with liquid meniscus

Method for plasma stripping using periodic modulation of gas chemis...

Patents Applicationslast 30 patents

EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES

GAS MIXTURE INCLUDING HYDROGEN FLUORIDE, ALCOHOL AND AN ADDITIVE FO...

SELECTIVE SILICON TRIM BY THERMAL ETCHING

SELECTIVE PRECISION ETCHING OF SEMICONDUCTOR MATERIALS

RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING

ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES

EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES

GAS MIXTURE INCLUDING HYDROGEN FLUORIDE, ALCOHOL AND AN ADDITIVE FO...

EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES

SYSTEMS AND METHODS FOR PLASMA-LESS DE-HALOGENATION

ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES

NOVEL METHOD TO ETCH COPPER BARRIER FILM

METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOL...

METHOD OF DIELECTRIC FILM TREATMENT

Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...

Methods for Application of Two-Phase Contaminant Removal Medium

Apparatus for Application of Two-Phase Contaminant Removal Medium

APPARATUS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA

Method and Apparatus for Removing Contaminants from Substrate

Method of Post Etch Polymer Residue Removal

METHOD FOR REDUCING PATTERN COLLAPSE IN HIGH ASPECT RATIO NANOSTRUC...

Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...

COMPOSITION OF A CLEANING MATERIAL FOR PARTICLE REMOVAL

COMPOSITION AND APPLICATION OF A TWO-PHASE CONTAMINANT REMOVAL MEDIUM

MATERIALS AND SYSTEMS FOR ADVANCED SUBSTRATE CLEANING

METHOD OF DIELECTRIC FILM TREATMENT

Method of post etch polymer residue removal

APPARATUS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA

METHODS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA

MATERIALS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA