Jiro Matsuo

Person

Uji, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning method, substrate cleaning device, and vacuum pr...
- Patent number 9,881,815
- Issue date Jan 30, 2018
- Tokyo Electron Limited
- Jiro Matsuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of smoothing solid surface with gas cluster ion beam and sol...
- Patent number 9,663,862
- Issue date May 30, 2017
- Japan Aviation Electronics Industry, Limited
- Akinobu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for smoothing a solid surface
- Patent number 8,764,952
- Issue date Jul 1, 2014
- Japan Aviation Electronics Industry Limited
- Akinobu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of smoothing solid surface with gas cluster ion beam and sol...
- Patent number 8,481,981
- Issue date Jul 9, 2013
- Japan Aviation Electronics Industry, Limited
- Akiko Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster jet processing method, semiconductor element, microelectrom...
- Patent number 8,461,051
- Issue date Jun 11, 2013
- Iwatani Corporation
- Kunihiko Koike
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of processing solid surface with gas cluster ion beam
- Patent number 8,268,183
- Issue date Sep 18, 2012
- Japan Aviaton Electronics Industry, Limited
- Akiko Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for flattening solid surface
- Patent number 8,178,857
- Issue date May 15, 2012
- Japan Aviation Electronics Industry, Limited
- Akinobu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Second ion mass spectrometry method and imaging method
- Patent number 7,960,691
- Issue date Jun 14, 2011
- Kyoto University
- Jiro Matsuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method and photonic crystal device fabricated by use of...
- Patent number 7,563,379
- Issue date Jul 21, 2009
- Japan Aviation Electronics Industry Limited
- Akiko Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas cluster-ion irradiation apparatus
- Patent number 7,405,394
- Issue date Jul 29, 2008
- Hitachi, Ltd.
- Shigeru Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Production method of SiC monitor wafer
- Patent number 7,022,545
- Issue date Apr 4, 2006
- Mitsui Engineering & Shipbuilding Co., Ltd.
- Isao Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming gas cluster and method for forming thin film
- Patent number 6,797,334
- Issue date Sep 28, 2004
- Research Development Corporation of Japan
- Makoto Akizuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transparent conductive film and process for producing the film
- Patent number 6,641,937
- Issue date Nov 4, 2003
- Agency of Industrial Science & Technology
- Masato Kiuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing group III nitride compound semiconductor l...
- Patent number 6,486,068
- Issue date Nov 26, 2002
- Toyoda Gosei Co., Ltd.
- Shiro Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming carbonaceous hard film
- Patent number 6,416,820
- Issue date Jul 9, 2002
- Epion Corporation
- Isao Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boron doping by decaborane
- Patent number 6,013,332
- Issue date Jan 11, 2000
- Fujitsu Limited
- Kenichi Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...
- Publication number 20160068970
- Publication date Mar 10, 2016
- Japan Aviation Electronics Industry, Limited
- Akinobu SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...
- Publication number 20160071694
- Publication date Mar 10, 2016
- Japan Aviation Electronics Industry, Limited
- Akinobu SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING DEVICE, AND VACUUM PR...
- Publication number 20150007858
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Jiro Matsuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLID SURFACE SMOOTHING METHOD
- Publication number 20140299465
- Publication date Oct 9, 2014
- Akinobu SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...
- Publication number 20140295107
- Publication date Oct 2, 2014
- JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED
- Akinobu SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...
- Publication number 20140106086
- Publication date Apr 17, 2014
- Japan Aviation Electronics Industry, Limited
- Akinobu SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD UTILIZING CLUSTER
- Publication number 20140061031
- Publication date Mar 6, 2014
- KYOTO UNIVERSITY
- Yu YOSHINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CLUSTER JET PROCESSING METHOD, SEMICONDUCTOR ELEMENT, MICROELECTROM...
- Publication number 20110147896
- Publication date Jun 23, 2011
- IWATANI CORPORATION
- Kunihiko Koike
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER LON BEAM AND SOL...
- Publication number 20100230616
- Publication date Sep 16, 2010
- Japan Aviation Electronics Industry Limited
- Akiko Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Smoothing Solid Surface with Gas Cluster Ion Beam and Sol...
- Publication number 20100207041
- Publication date Aug 19, 2010
- Japan Aviatiton Electronics Industry Limited
- Akinobu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Second ion mass spectrometry method and imaging method
- Publication number 20100155591
- Publication date Jun 24, 2010
- Jiro Matsuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Solid surface smoothing apparatus
- Publication number 20100096263
- Publication date Apr 22, 2010
- Japan Aviation Electronics Industry Limited
- Akinobu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of processing solid surface with gas cluster ion beam
- Publication number 20090305507
- Publication date Dec 10, 2009
- Japan Aviation Electronics Industry Limited
- Akiko Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus For Flattening Solid Surface
- Publication number 20080315128
- Publication date Dec 25, 2008
- Japan Aviation Electronics Industry Limited
- Akinobu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and device for flattening surface of solid
- Publication number 20060278611
- Publication date Dec 14, 2006
- Japan Aviation Electronics Industry Limited
- Akinobu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cluster-ion beam irradiation apparatus and method for manufacturing...
- Publication number 20060043317
- Publication date Mar 2, 2006
- Shigeru Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry etching method and photonic crystal device fabricated by use of...
- Publication number 20050155951
- Publication date Jul 21, 2005
- Akiko Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Production method of sic monitor wafer
- Publication number 20050042800
- Publication date Feb 24, 2005
- MITSUI ENGINEERING & SHIPPING CO LTD
- Isao Yamada
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for forming gas cluster and method for forming thin film
- Publication number 20040037970
- Publication date Feb 26, 2004
- Makoto Akizuki
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Method for forming carbonaceous hard films
- Publication number 20030026990
- Publication date Feb 6, 2003
- Isao Yamada
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for forming gas cluster and method for forming thin film
- Publication number 20020068128
- Publication date Jun 6, 2002
- Makoto Akizuki
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Method for forming gas cluster and method for forming thin film
- Publication number 20010010835
- Publication date Aug 2, 2001
- Makoto Akizuki
- C07 - ORGANIC CHEMISTRY

Jiro Matsuo

Person

Patents Grantslast 30 patents

Substrate cleaning method, substrate cleaning device, and vacuum pr...

Method of smoothing solid surface with gas cluster ion beam and sol...

Method for smoothing a solid surface

Method of smoothing solid surface with gas cluster ion beam and sol...

Cluster jet processing method, semiconductor element, microelectrom...

Method of processing solid surface with gas cluster ion beam

Method and apparatus for flattening solid surface

Second ion mass spectrometry method and imaging method

Dry etching method and photonic crystal device fabricated by use of...

Gas cluster-ion irradiation apparatus

Production method of SiC monitor wafer

Method for forming gas cluster and method for forming thin film

Transparent conductive film and process for producing the film

Method for manufacturing group III nitride compound semiconductor l...

Method for forming carbonaceous hard film

Boron doping by decaborane

Patents Applicationslast 30 patents

METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...

METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING DEVICE, AND VACUUM PR...

SOLID SURFACE SMOOTHING METHOD

METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...

METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...

PROCESSING METHOD UTILIZING CLUSTER

CLUSTER JET PROCESSING METHOD, SEMICONDUCTOR ELEMENT, MICROELECTROM...

METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER LON BEAM AND SOL...

Method of Smoothing Solid Surface with Gas Cluster Ion Beam and Sol...

Second ion mass spectrometry method and imaging method

Solid surface smoothing apparatus

Method of processing solid surface with gas cluster ion beam

Method and Apparatus For Flattening Solid Surface

Method and device for flattening surface of solid

Cluster-ion beam irradiation apparatus and method for manufacturing...

Dry etching method and photonic crystal device fabricated by use of...

Production method of sic monitor wafer

Method for forming gas cluster and method for forming thin film

Method for forming carbonaceous hard films

Method for forming gas cluster and method for forming thin film

Method for forming gas cluster and method for forming thin film