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Anode design for semiconductor deposition
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Patent number 6,251,251
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Issue date Jun 26, 2001
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International Business Machines Corporation
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Cyprian E. Uzoh
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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Electroplating workpiece fixture
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Patent number 5,522,975
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Issue date Jun 4, 1996
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International Business Machines Corporation
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Panayotis C. Andricacos
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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Vertical paddle plating cell
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Patent number 5,516,412
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Issue date May 14, 1996
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International Business Machines Corporation
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Panayotis C. Andricacos
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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Multi-compartment eletroplating system
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Patent number 5,312,532
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Issue date May 17, 1994
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International Business Machines Corporation
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Panayotis Andricacos
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR