Jon McChesney

Person

Sacramento, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Bottom and middle edge rings
- Patent number 12,183,554
- Issue date Dec 31, 2024
- Lam Research Corporation
- Hiran Rajitha Rathnasinghe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring arrangement with moveable edge rings
- Patent number 12,027,410
- Issue date Jul 2, 2024
- Lam Research Corporation
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for cooling RF heated chamber components
- Patent number 11,887,819
- Issue date Jan 30, 2024
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air cooled faraday shield and methods for using the same
- Patent number 11,692,732
- Issue date Jul 4, 2023
- Lam Research Corporation
- Saravanapriyan Sriraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moveable edge coupling ring for edge process control during semicon...
- Patent number 11,605,546
- Issue date Mar 14, 2023
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for cooling RF heated chamber components
- Patent number 11,495,441
- Issue date Nov 8, 2022
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for performing edge ring characterization
- Patent number 11,011,353
- Issue date May 18, 2021
- Lam Research Corporation
- Marcus Musselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image based plasma sheath profile detection on plasma processing tools
- Patent number 10,957,521
- Issue date Mar 23, 2021
- Lam Research Corporation
- Yuhou Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems for cooling RF heated chamber components
- Patent number 10,825,661
- Issue date Nov 3, 2020
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated replacement of consumable parts using interfacing chambers
- Patent number 10,770,339
- Issue date Sep 8, 2020
- Lam Research Corporation
- Damon Tyrone Genetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air cooled faraday shield and methods for using the same
- Patent number 10,690,374
- Issue date Jun 23, 2020
- Lam Research Corporation
- Saravanapriyan Sriraman
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Moveable edge coupling ring for edge process control during semicon...
- Patent number 10,658,222
- Issue date May 19, 2020
- Lam Research Corporation
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for tuning to reduce reflected power in multipl...
- Patent number 10,651,013
- Issue date May 12, 2020
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control in RF chamber with heater and air amplifier
- Patent number 10,600,620
- Issue date Mar 24, 2020
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring centering method using ring dynamic alignment data
- Patent number 10,541,168
- Issue date Jan 21, 2020
- Lam Research Corporation
- Ali Sucipto Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated replacement of consumable parts using end effectors inter...
- Patent number 10,427,307
- Issue date Oct 1, 2019
- Lam Research Corporation
- Damon Tyrone Genetti
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Systems and methods for tuning to reduce reflected power in multipl...
- Patent number 10,410,836
- Issue date Sep 10, 2019
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated replacement of consumable parts using interfacing chambers
- Patent number 10,304,717
- Issue date May 28, 2019
- Lam Research Corporation
- Damon Tyrone Genetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotating RF electric field antenna for uniform plasma generation
- Patent number 10,242,844
- Issue date Mar 26, 2019
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated replacement of consumable parts using end effectors inter...
- Patent number 10,124,492
- Issue date Nov 13, 2018
- Lam Research Corporation
- Damon Tyrone Genetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated replacement of consumable parts using interfacing chambers
- Patent number 10,062,599
- Issue date Aug 28, 2018
- Lam Research Corporation
- Damon Tyrone Genetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for cooling RF heated chamber components
- Patent number 9,978,565
- Issue date May 22, 2018
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air cooled faraday shield and methods for using the same
- Patent number 9,885,493
- Issue date Feb 6, 2018
- Lam Research Corporation
- Saravanapriyan Sriraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber filler kit for plasma etch chamber useful for fast gas swit...
- Patent number 9,679,751
- Issue date Jun 13, 2017
- Lam Research Corporation
- Jon McChesney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control in RF chamber with heater and air amplifier
- Patent number 9,530,656
- Issue date Dec 27, 2016
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for testing an electrostatic chuck
- Patent number 9,082,805
- Issue date Jul 14, 2015
- Lam Research Corporation
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective coating for a plasma processing chamber part and a metho...
- Patent number 8,522,716
- Issue date Sep 3, 2013
- Lam Research Corporation
- Bobby Kadkhodayan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for testing an electrostatic chuck
- Patent number 8,143,904
- Issue date Mar 27, 2012
- Lam Research Corporation
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tandem etch chamber plasma processing system
- Patent number 6,962,644
- Issue date Nov 8, 2005
- Applied Materials, Inc.
- Alexander Paterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus to monitor electrical states at a workpiece in...
- Patent number 6,727,655
- Issue date Apr 27, 2004
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
- Publication number 20240355667
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
- Publication number 20230039721
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Jon MCCHESNEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM AND MIDDLE EDGE RINGS
- Publication number 20220189745
- Publication date Jun 16, 2022
- LAM RESEARCH CORPORATION
- Hiran Rajitha RATHNASINGHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM AND MIDDLE EDGE RINGS
- Publication number 20220189744
- Publication date Jun 16, 2022
- LAM RESEARCH CORPORATION
- Hiran Rajitha RATHNASINGHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS
- Publication number 20210183687
- Publication date Jun 17, 2021
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
- Publication number 20210050188
- Publication date Feb 18, 2021
- LAM RESEARCH CORPORATION
- Jon MCCHESNEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Air Cooled Faraday Shield and Methods for Using the Same
- Publication number 20200318852
- Publication date Oct 8, 2020
- LAM RESEARCH CORPORATION
- Saravanapriyan Sriraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM AND MIDDLE EDGE RINGS
- Publication number 20200312633
- Publication date Oct 1, 2020
- LAM RESEARCH CORPORATION
- Hiran Rajitha RATHNASINGHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE EDGE RING DESIGNS
- Publication number 20200020565
- Publication date Jan 16, 2020
- LAM RESEARCH CORPORATION
- Hiran Rajitha RATHNASINGHE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE BASED PLASMA SHEATH PROFILE DETECTION ON PLASMA PROCESSING TOOLS
- Publication number 20190371581
- Publication date Dec 5, 2019
- LAM RESEARCH CORPORATION
- Yuhou Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR TUNING TO REDUCE REFLECTED POWER IN MULTIPL...
- Publication number 20190371571
- Publication date Dec 5, 2019
- LAM RESEARCH CORPORATION
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automated Replacement of Consumable Parts Using Interfacing Chambers
- Publication number 20190252234
- Publication date Aug 15, 2019
- LAM RESEARCH CORPORATION
- Damon Tyrone Genetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE EDGE RING DESIGN
- Publication number 20190013232
- Publication date Jan 10, 2019
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
- Publication number 20180247796
- Publication date Aug 30, 2018
- LAM RESEARCH CORPORATION
- Jon MCCHESNEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR TUNING TO REDUCE REFLECTED POWER IN MULTIPL...
- Publication number 20180240647
- Publication date Aug 23, 2018
- LAM RESEARCH CORPORATION
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Air Cooled Faraday Shield and Methods for Using the Same
- Publication number 20180156489
- Publication date Jun 7, 2018
- LAM RESEARCH CORPORATION
- Saravanapriyan Sriraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING CENTERING METHOD USING RING DYNAMIC ALIGNMENT DATA
- Publication number 20180138069
- Publication date May 17, 2018
- LAM RESEARCH CORPORATION
- Ali Sucipto Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automated Replacement of Consumable Parts Using End Effectors Inter...
- Publication number 20170334074
- Publication date Nov 23, 2017
- LAM RESEARCH CORPORATION
- Damon Tyrone Genetti
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Automated Replacement of Consumable Parts Using Interfacing Chambers
- Publication number 20170330786
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Damon Tyrone Genetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PERFORMING EDGE RING CHARACTERIZATION
- Publication number 20170287682
- Publication date Oct 5, 2017
- LAM RESEARCH CORPORATION
- Marcus Musselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Detection System for Tunable/Replaceable Edge Coupling Ring
- Publication number 20170263478
- Publication date Sep 14, 2017
- LAM RESEARCH CORPORATION
- Jon McCHESNEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automated Replacement of Consumable Parts Using End Effectors Inter...
- Publication number 20170113355
- Publication date Apr 27, 2017
- LAM RESEARCH CORPORATION
- Damon Tyrone Genetti
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Automated Replacement of Consumable Parts Using Interfacing Chambers
- Publication number 20170117172
- Publication date Apr 27, 2017
- LAM RESEARCH CORPORATION
- Damon Tyrone Genetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Control in RF Chamber with Heater and Air Amplifier
- Publication number 20170103875
- Publication date Apr 13, 2017
- LAM RESEARCH CORPORATION
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICON...
- Publication number 20160211165
- Publication date Jul 21, 2016
- LAM RESEARCH CORPORATION
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICON...
- Publication number 20160211166
- Publication date Jul 21, 2016
- LAM RESEARCH CORPORATION
- Haoquan Yan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Rotating RF Electric Field Antenna For Uniform Plasma Generation
- Publication number 20160093471
- Publication date Mar 31, 2016
- LAM RESEARCH CORPORATION
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Air Cooled Faraday Shield and Methods for Using the Same
- Publication number 20150020969
- Publication date Jan 22, 2015
- Saravanapriyan Sriraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE COATING FOR A PLASMA PROCESSING CHAMBER PART AND A METHO...
- Publication number 20140065835
- Publication date Mar 6, 2014
- LAM RESEARCH CORPORATION
- Bobby Kadkhodayan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER FILLER KIT FOR PLASMA ETCH CHAMBER USEFUL FOR FAST GAS SWIT...
- Publication number 20130244440
- Publication date Sep 19, 2013
- LAM RESEARCH CORPORATION
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS

Jon McChesney

Person

Patents Grantslast 30 patents

Bottom and middle edge rings

Edge ring arrangement with moveable edge rings

Systems for cooling RF heated chamber components

Air cooled faraday shield and methods for using the same

Moveable edge coupling ring for edge process control during semicon...

Systems for cooling RF heated chamber components

Systems and methods for performing edge ring characterization

Image based plasma sheath profile detection on plasma processing tools

Systems for cooling RF heated chamber components

Automated replacement of consumable parts using interfacing chambers

Air cooled faraday shield and methods for using the same

Moveable edge coupling ring for edge process control during semicon...

Systems and methods for tuning to reduce reflected power in multipl...

Temperature control in RF chamber with heater and air amplifier

Edge ring centering method using ring dynamic alignment data

Automated replacement of consumable parts using end effectors inter...

Systems and methods for tuning to reduce reflected power in multipl...

Automated replacement of consumable parts using interfacing chambers

Rotating RF electric field antenna for uniform plasma generation

Automated replacement of consumable parts using end effectors inter...

Automated replacement of consumable parts using interfacing chambers

Systems for cooling RF heated chamber components

Air cooled faraday shield and methods for using the same

Chamber filler kit for plasma etch chamber useful for fast gas swit...

Temperature control in RF chamber with heater and air amplifier

System and method for testing an electrostatic chuck

Protective coating for a plasma processing chamber part and a metho...

System and method for testing an electrostatic chuck

Tandem etch chamber plasma processing system

Method and apparatus to monitor electrical states at a workpiece in...

Patents Applicationslast 30 patents

EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS

SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS

BOTTOM AND MIDDLE EDGE RINGS

BOTTOM AND MIDDLE EDGE RINGS

EDGE RING ARRANGEMENT WITH MOVEABLE EDGE RINGS

SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS

Air Cooled Faraday Shield and Methods for Using the Same

BOTTOM AND MIDDLE EDGE RINGS

MOVEABLE EDGE RING DESIGNS

IMAGE BASED PLASMA SHEATH PROFILE DETECTION ON PLASMA PROCESSING TOOLS

SYSTEMS AND METHODS FOR TUNING TO REDUCE REFLECTED POWER IN MULTIPL...

Automated Replacement of Consumable Parts Using Interfacing Chambers

MOVEABLE EDGE RING DESIGN

SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS

SYSTEMS AND METHODS FOR TUNING TO REDUCE REFLECTED POWER IN MULTIPL...

Air Cooled Faraday Shield and Methods for Using the Same

EDGE RING CENTERING METHOD USING RING DYNAMIC ALIGNMENT DATA

Automated Replacement of Consumable Parts Using End Effectors Inter...

Automated Replacement of Consumable Parts Using Interfacing Chambers

SYSTEMS AND METHODS FOR PERFORMING EDGE RING CHARACTERIZATION

Detection System for Tunable/Replaceable Edge Coupling Ring

Automated Replacement of Consumable Parts Using End Effectors Inter...

Automated Replacement of Consumable Parts Using Interfacing Chambers

Temperature Control in RF Chamber with Heater and Air Amplifier

MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICON...

MOVEABLE EDGE COUPLING RING FOR EDGE PROCESS CONTROL DURING SEMICON...

Rotating RF Electric Field Antenna For Uniform Plasma Generation

Air Cooled Faraday Shield and Methods for Using the Same

PROTECTIVE COATING FOR A PLASMA PROCESSING CHAMBER PART AND A METHO...

CHAMBER FILLER KIT FOR PLASMA ETCH CHAMBER USEFUL FOR FAST GAS SWIT...