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Etching apparatus and method
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Patent number 4,400,235
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Issue date Aug 23, 1983
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Bell Telephone Laboratories, Incorporated
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Gerald A. Coquin
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H01 - BASIC ELECTRIC ELEMENTS
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X-ray lithography
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Patent number 4,185,202
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Issue date Jan 22, 1980
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Bell Telephone Laboratories, Incorporated
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Robert E. Dean
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Control of scanning laser beam
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Patent number 3,943,529
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Issue date Mar 9, 1976
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Bell Telephone Laboratories, Incorporated
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Martin Feldman
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR